Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Semiconductor integrated circuit device manufacturing method including static charge elimination










Image Number 10 for United States Patent #7172981.

A sealed type container accommodating a semiconductor substrate is positioned to a load port of a semiconductor manufacturing apparatus. The semiconductor substrate is taken out of the container. An ionizer is used for static-charge-eliminating the semiconductor substrates before and after process treatment in a transport area between the load port and a treatment section. The static-charge-eliminated semiconductor substrate is accommodated in the container positioned to the load port. Thus, it is possible to decrease foreign materials adhering to the semiconductor substrate and errors in handling the semiconductor substrate.








 
 
  Recently Added Patents
Nucleic acid sequences encoding strictosidine synthase proteins
Apparatus and method for encoding/decoding signal
Secure soft SIM credential transfer
DL control channel structure enhancement
Proton conducting electrolytes with cross-linked copolymer additives for use in fuel cells
Method and apparatus for band switching in wireless local access network
(4938
  Randomly Featured Patents
Decorative sheet material
Self-regeneration ballistic projectile-arrester
Blender blades
Detection of nucleic acid sequence differences using the ligase detection reaction with addressable arrays
X-ray examination apparatus including a diaphragm unit
Chair legs
Electrodeposition coating material and electrodeposition method
3-aminocyclopentanecarboxamides as modulators of chemokine receptors
Hydraulic regulator
Selectively-expandable speakerphone system and method