Resources Contact Us Home
Wafer with vertical diode structures

Image Number 13 for United States Patent #7170103.

A method of making a vertical diode is provided, the vertical diode having associated therewith a diode opening extending through an insulation layer and contacting an active region on a silicon wafer. A titanium silicide layer covers the interior surface of the diode opening and contacts the active region. The diode opening is initially filled with an amorphous silicon plug that is doped during deposition and subsequently recrystallized to form large grain polysilicon. The silicon plug has a top portion that is heavily doped with a first type dopant and a bottom portion that is lightly doped with a second type dopant. The top portion is bounded by the bottom portion so as not to contact the titanium silicide layer. For one embodiment of the vertical diode, a programmable resistor contacts the top portion of the silicon plug and a metal line contacts the programmable resistor.

  Recently Added Patents
Fuel cell system, and electric vehicle equipped with the fuel cell system
Fuel cell support structure
Management of computer-file sharing between at least two devices
Method of manufacturing semiconductor devices using ion implantation
Re-establishing push notification channels via user identifiers
Method and apparatus for controlling cardiac resynchronization therapy using cardiac impedance
Protecting information written to recording medium
  Randomly Featured Patents
Hard waxes comprising terpolymers of ethylene with unsaturated carboxylic acids and unsaturated carboxylic acid esters
Light emitting device and light emitting display
Macrocyclic inhibitors of hepatitis C virus
Porous ceramic composite with dense surface
Decorative noncombustible coatings and methods of making the same
Dry powder inhalers, related blister devices, and associated methods of dispensing dry powder substances and fabricating blister packages
Therapeutic application of a thienycyclohexylamine derivative
System and method for performing secure online transactions
Single inductor multiple output switching devices
Computer chip spacer element