Resources Contact Us Home
Wafer with vertical diode structures

Image Number 13 for United States Patent #7170103.

A method of making a vertical diode is provided, the vertical diode having associated therewith a diode opening extending through an insulation layer and contacting an active region on a silicon wafer. A titanium silicide layer covers the interior surface of the diode opening and contacts the active region. The diode opening is initially filled with an amorphous silicon plug that is doped during deposition and subsequently recrystallized to form large grain polysilicon. The silicon plug has a top portion that is heavily doped with a first type dopant and a bottom portion that is lightly doped with a second type dopant. The top portion is bounded by the bottom portion so as not to contact the titanium silicide layer. For one embodiment of the vertical diode, a programmable resistor contacts the top portion of the silicon plug and a metal line contacts the programmable resistor.

  Recently Added Patents
Message transfer apparatus, output method, and computer program product
Method and apparatus for exercise monitoring combining exercise monitoring and visual data with wireless internet connectivity
System and method for distributing emergency data messages to public safety answering points in a balanced manner
Image forming system, prognosis criterion setting apparatus, prognosis apparatus, image forming apparatus and non-transitory computer-readable recording medium
Account managing device, image processing system, and storage medium
Circuit device for preventing radiation emission in portable terminal with two cameras
Auto-aligning spectroscopy system
  Randomly Featured Patents
Injection unit and injection method for an internal combustion engine
Electromagnetic interference suppression device and MRI apparatus using the same
Spectral imaging methods and systems
Method and system to model frequency dependent effects of a communciations network
Body of pneumatic hammer
Integrated butt contact having a protective spacer
Flexible radiused corner key for insulated glass assemblies
Sound pickup method and system with sound source tracking
Roulette side bet game
System and method for control of communications connections