Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Wafer with vertical diode structures










Image Number 13 for United States Patent #7170103.

A method of making a vertical diode is provided, the vertical diode having associated therewith a diode opening extending through an insulation layer and contacting an active region on a silicon wafer. A titanium silicide layer covers the interior surface of the diode opening and contacts the active region. The diode opening is initially filled with an amorphous silicon plug that is doped during deposition and subsequently recrystallized to form large grain polysilicon. The silicon plug has a top portion that is heavily doped with a first type dopant and a bottom portion that is lightly doped with a second type dopant. The top portion is bounded by the bottom portion so as not to contact the titanium silicide layer. For one embodiment of the vertical diode, a programmable resistor contacts the top portion of the silicon plug and a metal line contacts the programmable resistor.








 
 
  Recently Added Patents
Heat stable variants of plant adenosine diphosphate glucose pyrophosphorylase small subunit
Panel for decoration
Method for computing an energy efficient route
Music composition automation including song structure
In-vehicle electronic control apparatus having monitoring control circuit
Thiocyanato or isothiocyanato substituted naphthalene diimide and rylene diimide compounds and their use as n-type semiconductors
Image processing system and method
  Randomly Featured Patents
High-speed interconnection adapter having automated crossed differential pair correction
Tape cast multi-layer ceramic/metal composites
Parallel processing using multi-core processor
Bearing puller
Image forming apparatus capable of compensating for a temperature of a fixing unit and control method thereof
MOS field effect transistor and method for manufacturing the same
Non-periodic wavefront dividing interferometer
Vehicle tire
Food products containing fish oils stabilized with fructose
Drinking glass