Resources Contact Us Home
Wafer with vertical diode structures

Image Number 13 for United States Patent #7170103.

A method of making a vertical diode is provided, the vertical diode having associated therewith a diode opening extending through an insulation layer and contacting an active region on a silicon wafer. A titanium silicide layer covers the interior surface of the diode opening and contacts the active region. The diode opening is initially filled with an amorphous silicon plug that is doped during deposition and subsequently recrystallized to form large grain polysilicon. The silicon plug has a top portion that is heavily doped with a first type dopant and a bottom portion that is lightly doped with a second type dopant. The top portion is bounded by the bottom portion so as not to contact the titanium silicide layer. For one embodiment of the vertical diode, a programmable resistor contacts the top portion of the silicon plug and a metal line contacts the programmable resistor.

  Recently Added Patents
Power converter for an LED assembly and lighting application
Leadless integrated circuit packaging system and method of manufacture thereof
Optical navigation device with image sensor and inner housing
Multi-wired antenna for mobile apparatus
Magnetic memory element, driving method for same, and nonvolatile storage device
Predictive time entry for workforce management systems
System and method for computational unification of heterogeneous implicit and explicit processing elements
  Randomly Featured Patents
Atovaquone pharmaceutical compositions
Headboard for bed
Brush for applying cosmetic substances
Lossless recovery for computer systems with remotely dependent data recovery
Modified E. coli enterotoxin II signal peptide and a microorganism expressing a fusion protein of a said peptide and a heterologous protein
Method and apparatus for sound enhancement with envelopes of multiband-passed signals feeding comb filters
Pressure relief valve for pressure equalization between a closed space and the surrounding atmosphere
Apparatus for the preparation and the performance of sedimentation velocity tests on organic liquids and other substances
Enclosed patio table
Optical disk device and tilt correction method thereof