Resources Contact Us Home
Wafer with vertical diode structures

Image Number 13 for United States Patent #7170103.

A method of making a vertical diode is provided, the vertical diode having associated therewith a diode opening extending through an insulation layer and contacting an active region on a silicon wafer. A titanium silicide layer covers the interior surface of the diode opening and contacts the active region. The diode opening is initially filled with an amorphous silicon plug that is doped during deposition and subsequently recrystallized to form large grain polysilicon. The silicon plug has a top portion that is heavily doped with a first type dopant and a bottom portion that is lightly doped with a second type dopant. The top portion is bounded by the bottom portion so as not to contact the titanium silicide layer. For one embodiment of the vertical diode, a programmable resistor contacts the top portion of the silicon plug and a metal line contacts the programmable resistor.

  Recently Added Patents
Temporary protective cover for an exposed junction box
Bus controller for handling split transactions
Method and system for filtering noises in an image scanned by charged particles
Power management systems and designs
Lid for a container
Methods for processing 2Nx2N block with N being positive integer greater than four under intra-prediction mode and related processing circuits thereof
Profile and template based dynamic portable user workflow
  Randomly Featured Patents
Providing first field data capture in a virtual input/output server (VIOS) cluster environment with cluster-aware vioses
Low stress package assembly for silicon-backed light valves
Method and system for location-centric information retrieval from wireless devices using RFID coding
Light-emitting device and lamp
Methods, kits and compositions pertaining to PNA molecular beacons
Image reading apparatus and image forming apparatus using the same
Coin checking apparatus
Spectacle frame
Service tunnel over a connectionless network
Internal combustion engine piston