Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Wafer with vertical diode structures










Image Number 13 for United States Patent #7170103.

A method of making a vertical diode is provided, the vertical diode having associated therewith a diode opening extending through an insulation layer and contacting an active region on a silicon wafer. A titanium silicide layer covers the interior surface of the diode opening and contacts the active region. The diode opening is initially filled with an amorphous silicon plug that is doped during deposition and subsequently recrystallized to form large grain polysilicon. The silicon plug has a top portion that is heavily doped with a first type dopant and a bottom portion that is lightly doped with a second type dopant. The top portion is bounded by the bottom portion so as not to contact the titanium silicide layer. For one embodiment of the vertical diode, a programmable resistor contacts the top portion of the silicon plug and a metal line contacts the programmable resistor.








 
 
  Recently Added Patents
Efficient implementation of hash algorithm on a processor
Cooler
System and method for wireless messaging in a wireless communication system
Methods for the production of aligned carbon nanotubes and nanostructured material containing the same
Arrays of optical confinements and uses thereof
Pattern forming method using printing device and method of manufacturing liquid crystal display device using the same
Surface acoustic wave resonator for down-hole applications
  Randomly Featured Patents
Disposable bag support
5, 11-Dioxa-benzo[b]fluoren-10-one and 5-oxa-11-thia-benzo[b]fluoren-10-ones as estrogenic agents
Method for selecting a target in an automated video tracking system
Coordinated multinode dump collection in response to a fault
Apparatus for reproducing recorded picture image signals
Cellulase or hemicellulase modified by conjugation with a polyethylene glycol fatty alcohol ether, and a process for producing the same
Transmission for speed changing and steering of a vehicle
Hydrazine derivatives
Digital multimeter having remote display with automatic communication binding
Breachable seal