Resources Contact Us Home
Vibration-type piezoelectric acceleration sensor element and vibration-type piezoelectric acceleration sensor therewith

Image Number 2 for United States Patent #7168321.

The vibration-type piezoelectric acceleration sensor element includes a frame; and a diaphragm, support, and retentive part, provided in the frame. The diaphragm includes a bottom electrode layer, a piezoelectric thin-film layer formed on the bottom electrode layer, and a top electrode layer formed on the piezoelectric thin-film layer. A first end of the diaphragm is connected to the frame. The support retains a second end of the diaphragm. The retentive part retains the support so that the support is reciprocable only in a direction through the first end and the second end of the diaphragm.

  Recently Added Patents
ZnO green luminescent material and its preparation
Pharmaceutical compositions of entacapone, levodopa and carbidopa with improved bioavailability
Polarization-coupled ferroelectric unipolar junction memory and energy storage device
Aware manufacturing of integrated circuits
Method of targeting hydrophobic drugs to vascular lesions
Piezoelectric quasi-resonance linear motors based on acoustic standing waves with combined resonator
Equipment to facilitate money transfers into bank accounts
  Randomly Featured Patents
Absorption pad for immunoassay, strip for immunoassay, and immunoassay apparatus
Communication method and device
Inflow turbulence control structure
Polybag packaging
Solid-state quantum dot devices and quantum computing using nanostructured logic gates
Micro probe assembly
Corewire design and construction for medical devices
A/C system side view mirror and side glass DE-ICER
Hydro unit retrofit and method of performing same
Load lifting system