Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Vibration-type piezoelectric acceleration sensor element and vibration-type piezoelectric acceleration sensor therewith










Image Number 2 for United States Patent #7168321.

The vibration-type piezoelectric acceleration sensor element includes a frame; and a diaphragm, support, and retentive part, provided in the frame. The diaphragm includes a bottom electrode layer, a piezoelectric thin-film layer formed on the bottom electrode layer, and a top electrode layer formed on the piezoelectric thin-film layer. A first end of the diaphragm is connected to the frame. The support retains a second end of the diaphragm. The retentive part retains the support so that the support is reciprocable only in a direction through the first end and the second end of the diaphragm.








 
 
  Recently Added Patents
Spatula
Lithographic apparatus and device manufacturing method
Light emitting device and light emitting device package
Method and apparatus for encoding and decoding video based on first sub-pixel unit and second sub-pixel unit
Emergency call notification for network services
Method and apparatus for map transmission in wireless communication system
Method and system for parallelizing data copy in a distributed file system
  Randomly Featured Patents
Process and catalyst for producing vinyl acetate
Method and system of sheet-wise binding of documents
Chemical-mechanical polishing method
Supply voltage monitoring device for automotive battery
Front-mounted spare tire rack for snowplow headgear
Localisation in a bilateral hearing device system
Shopping cart with baby seat
Run-flat tire
Spatial frequency-domain video signal processing
Toy construction element