Resources Contact Us Home
Vibration-type piezoelectric acceleration sensor element and vibration-type piezoelectric acceleration sensor therewith

Image Number 2 for United States Patent #7168321.

The vibration-type piezoelectric acceleration sensor element includes a frame; and a diaphragm, support, and retentive part, provided in the frame. The diaphragm includes a bottom electrode layer, a piezoelectric thin-film layer formed on the bottom electrode layer, and a top electrode layer formed on the piezoelectric thin-film layer. A first end of the diaphragm is connected to the frame. The support retains a second end of the diaphragm. The retentive part retains the support so that the support is reciprocable only in a direction through the first end and the second end of the diaphragm.

  Recently Added Patents
System and method for receiving MBMS broadcasting service
Pre and post-paid real time billing convergence system
Converter and measuring apparatus
Panel for decoration
Rotating device
Process for the production of an acylation catalyst
Process for producing .beta.-sialon fluorescent material
  Randomly Featured Patents
Color image forming apparatus with position compensation
Piggy bank
Sealed recharge battery plenum stabilized with state changeable substance
Portable advertising platform
System and method for cleaning and/or treating vehicles and the surfaces of other objects
Image reading apparatus provided with correction for shadings in image data
Touch sensitive input control device
Dual/differential GMR head with a single AFM layer
Publication convertible to poster and removable insert and method of making same
Color processing apparatus and method thereof