Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Vibration-type piezoelectric acceleration sensor element and vibration-type piezoelectric acceleration sensor therewith










Image Number 2 for United States Patent #7168321.

The vibration-type piezoelectric acceleration sensor element includes a frame; and a diaphragm, support, and retentive part, provided in the frame. The diaphragm includes a bottom electrode layer, a piezoelectric thin-film layer formed on the bottom electrode layer, and a top electrode layer formed on the piezoelectric thin-film layer. A first end of the diaphragm is connected to the frame. The support retains a second end of the diaphragm. The retentive part retains the support so that the support is reciprocable only in a direction through the first end and the second end of the diaphragm.








 
 
  Recently Added Patents
Apparatus and method for exerting force on a subject tissue
Radio communication system, base station device and mobile station device utilizing an intermittent reception
Method and apparatus for sensing an input object relative to a sensing region of an ultrasound sensor device
Stacked type semiconductor memory device and chip selection circuit
Electronic currency, electronic wallet therefor and electronic payment systems employing them
Pointer display device, pointer display/detection method, pointer display/detection program and information apparatus
Method for producing interferon alpha 5
  Randomly Featured Patents
Locking slide block
Method for manufacturing semiconductor device having grown layer on insulating layer
Method and circuit for non-cooperative interference suppression of radio frequency signals
LED vehicular lamp with flat reflector
Compositions and methods for modulating vascularization
Solar cell device
Resin composition for paper-coating, coating composition for paper and coated paper
Plasma panel based ionizing radiation detector
Generator apparatus coupled to side frame of vehicle and energized by rotation of axle on vehicle
Cyclic peptides as potent and selective melanocortin-4 receptor antagonists