Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Nitrous oxide anneal of TEOS/ozone CVD for improved gapfill










Image Number 7 for United States Patent #7141483.

A method of filling a gap defined by adjacent raised features on a substrate includes providing a flow of a silicon-containing processing gas to a chamber housing the substrate and providing a flow of an oxidizing gas to the chamber. The method also includes depositing a first portion of a film as a substantially conformal layer in the gap by causing a reaction between the silicon-containing processing gas and the oxidizing gas. Depositing the conformal layer includes varying over time a ratio of the (silicon-containing processing gas):(oxidizing gas) and regulating the chamber to a pressure in a range from about 200 torr to about 760 torr throughout deposition of the conformal layer. The method also includes depositing a second portion of the film as a bulk layer. Depositing a second portion of the film includes maintaining the ratio of the (silicon-containing processing gas):(oxidizing gas) substantially constant throughout deposition of the bulk layer and regulating the chamber to a pressure in a range from about 200 torr to about 760 torr throughout deposition of the bulk layer. The method also includes exposing the substrate to nitrous oxide at a temperature less than about 900.degree. C. to anneal the deposited film.








 
 
  Recently Added Patents
Method of measuring specific absorption rate of electromagnetic waves
Purine compounds used as CB2 agonists
Voltage regulator with improved voltage regulator response and reduced voltage drop
Making transparent capacitor with multi-layer grid
Fuel cell module
Synchronization processing circuit and synchronization processing method in wireless communication system
Method for generating multi-antenna signals
  Randomly Featured Patents
Grinding disc for disc refiners
Electrode design for solid state devices, fuel cells and sensors
Verification information for digital video signal
Learnable object segmentation
Multi-level interconnection network
Apparatus and methods for positioning in a borehole
Tong assembly for manipulating a tubular
Solvent-free water-based emulsions of anionically polymerized polymers
Electrostatic discharge protection apparatus for a circuit board
Data storage method and device and storage medium therefor