Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Nitrous oxide anneal of TEOS/ozone CVD for improved gapfill










Image Number 7 for United States Patent #7141483.

A method of filling a gap defined by adjacent raised features on a substrate includes providing a flow of a silicon-containing processing gas to a chamber housing the substrate and providing a flow of an oxidizing gas to the chamber. The method also includes depositing a first portion of a film as a substantially conformal layer in the gap by causing a reaction between the silicon-containing processing gas and the oxidizing gas. Depositing the conformal layer includes varying over time a ratio of the (silicon-containing processing gas):(oxidizing gas) and regulating the chamber to a pressure in a range from about 200 torr to about 760 torr throughout deposition of the conformal layer. The method also includes depositing a second portion of the film as a bulk layer. Depositing a second portion of the film includes maintaining the ratio of the (silicon-containing processing gas):(oxidizing gas) substantially constant throughout deposition of the bulk layer and regulating the chamber to a pressure in a range from about 200 torr to about 760 torr throughout deposition of the bulk layer. The method also includes exposing the substrate to nitrous oxide at a temperature less than about 900.degree. C. to anneal the deposited film.








 
 
  Recently Added Patents
Method and device for peer arrangement in single substream upload P2P overlay networks
Alternate source programming
Fuser member having composite outer layer
Position detection device, pointing device and input device
Pharmaceutical compositions of entacapone, levodopa and carbidopa with improved bioavailability
Method of operating an electromechanical converter, a controller and a computer program product
Computer product, information retrieval method, and information retrieval apparatus
  Randomly Featured Patents
Rotary picker for harvesting fruit
Method for treating insulin resistance
Versatile audio power amplifier
High-resolution integrated X-ray CMOS image sensor
Root feeder
Method to render a hard surface hydrophilic
Method and apparatus for pre-heating vitrifiable batch
Non-invasive device and method for measuring the cardiac output of a patient
Ischemia detection
Blood recuperation device and method