Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Nitrous oxide anneal of TEOS/ozone CVD for improved gapfill










Image Number 7 for United States Patent #7141483.

A method of filling a gap defined by adjacent raised features on a substrate includes providing a flow of a silicon-containing processing gas to a chamber housing the substrate and providing a flow of an oxidizing gas to the chamber. The method also includes depositing a first portion of a film as a substantially conformal layer in the gap by causing a reaction between the silicon-containing processing gas and the oxidizing gas. Depositing the conformal layer includes varying over time a ratio of the (silicon-containing processing gas):(oxidizing gas) and regulating the chamber to a pressure in a range from about 200 torr to about 760 torr throughout deposition of the conformal layer. The method also includes depositing a second portion of the film as a bulk layer. Depositing a second portion of the film includes maintaining the ratio of the (silicon-containing processing gas):(oxidizing gas) substantially constant throughout deposition of the bulk layer and regulating the chamber to a pressure in a range from about 200 torr to about 760 torr throughout deposition of the bulk layer. The method also includes exposing the substrate to nitrous oxide at a temperature less than about 900.degree. C. to anneal the deposited film.








 
 
  Recently Added Patents
Hepodxilin analog enantiomers
Method of fabricating solid electrolytic capacitor and solid electrolytic capacitor
Rechargeable battery
System and method for redundant array copy removal in a pointer-free language
Receiver and transmitter receiver system
Plants and seeds of hybrid corn variety CH424126
Layout design defect repair based on inverse lithography and traditional optical proximity correction
  Randomly Featured Patents
Component selection system for a multiple line adapter organization
Heat engine
Illuminated flea trap
Positive resist composition and method of forming resist pattern
Cutting board
Data processing apparatus and method, and recording medium
Method for simulating dispersed bubble flow
Line-powered network interface device
Optoelectronic circuit element
Water-dispersible tablets