Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Nitrous oxide anneal of TEOS/ozone CVD for improved gapfill










Image Number 7 for United States Patent #7141483.

A method of filling a gap defined by adjacent raised features on a substrate includes providing a flow of a silicon-containing processing gas to a chamber housing the substrate and providing a flow of an oxidizing gas to the chamber. The method also includes depositing a first portion of a film as a substantially conformal layer in the gap by causing a reaction between the silicon-containing processing gas and the oxidizing gas. Depositing the conformal layer includes varying over time a ratio of the (silicon-containing processing gas):(oxidizing gas) and regulating the chamber to a pressure in a range from about 200 torr to about 760 torr throughout deposition of the conformal layer. The method also includes depositing a second portion of the film as a bulk layer. Depositing a second portion of the film includes maintaining the ratio of the (silicon-containing processing gas):(oxidizing gas) substantially constant throughout deposition of the bulk layer and regulating the chamber to a pressure in a range from about 200 torr to about 760 torr throughout deposition of the bulk layer. The method also includes exposing the substrate to nitrous oxide at a temperature less than about 900.degree. C. to anneal the deposited film.








 
 
  Recently Added Patents
Silicon-on-insulator (SOI) structure configured for reduced harmonics and method of forming the structure
Matching a usage history to a new cloud
Signal apparatus for facilitating safe backup of vehicles
Channel marking for chip mark overflow and calibration errors
Blended block copolymer composition
Battery loading and unloading mechanism
Process for filtering interferograms obtained from SAR images acquired on the same area
  Randomly Featured Patents
Noise filter
Information distribution system
Panel mounted connector for use in confined areas
Glazing system
Digital broadcasting transmission/reception devices capable of improving a receiving performance and signal processing method thereof
Guide wire apparatus with location sensing member
Early termination controller for iterative FEC decoders and method therefor
Chair
Overload protection device
Method for fitting a cylinder assembly into a cylinder housing