Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Wafer level packaging of materials with different coefficients of thermal expansion










Image Number 3 for United States Patent #7109635.

An electro-mechanical device package includes a cap material permanently bonded to a device wafer encapsulating an electromechanical device. An intermediate material is used to bond the device and capping material together at a low temperature, and a structure including the intermediate material emanating from either the device or cap material, or both, provides an interlocking at the bonding interface. One package includes a reusable carrier wafer with a similar coefficient of thermal expansion as a mating material and a low cost cap wafer of different material than the device wafer. A method for temporarily bonding the cap material to the carrier wafer includes attaching the cap material to the carrier wafer and is then singulated to mitigate thermal expansion mismatch with the device wafer.








 
 
  Recently Added Patents
Idle stop and go system and method for controlling thereof
Charged particle source with multiple selectable particle emitters
Motor device and method of manufacturing the same
Process for preparing synthetic intermediates of peripherally-selective inhibitors of dopamine-.beta.-hydroxylase involving catalytic asymmetric hydrogenation
Apparatus and method for efficient transmission of acknowledgements
Power management implementation in an optical link
Di and tri- substituted oxathiazine derivatives, method for the production, method for the production thereof, use thereof as medicine and drug containing said derivatives and use thereof
  Randomly Featured Patents
Air conditioner
Multiple-interleaved integrated circuit transformer
Hydraulic disk brake having a braking torque-to-hydraulic force converter
High-power tunable capacitor
End-ventilating adjustable pitch arcuate roof ventilator
Case for socket wrench accessories
Ink for inkjet recording
Method and apparatus for controlling communication between user equipment and a base station in a radio access network
Self-learning and self-personalizing knowledge search engine that delivers holistic results
Screw grommet