Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Wafer level packaging of materials with different coefficients of thermal expansion










Image Number 3 for United States Patent #7109635.

An electro-mechanical device package includes a cap material permanently bonded to a device wafer encapsulating an electromechanical device. An intermediate material is used to bond the device and capping material together at a low temperature, and a structure including the intermediate material emanating from either the device or cap material, or both, provides an interlocking at the bonding interface. One package includes a reusable carrier wafer with a similar coefficient of thermal expansion as a mating material and a low cost cap wafer of different material than the device wafer. A method for temporarily bonding the cap material to the carrier wafer includes attaching the cap material to the carrier wafer and is then singulated to mitigate thermal expansion mismatch with the device wafer.








 
 
  Recently Added Patents
Device and method for controlling brightness of organic light emitting diode display
Piano keyboard with key touch point detection
Presenting a link to a user
Segmentation of a product markup image based on color and color differences
Method for specifying control curve parameters for controlling climatic environmental conditions of climate-controlled enclosed spaces
Image forming apparatus with static elimination
Generating network topology parameters and monitoring a communications network domain
  Randomly Featured Patents
Ultrasonic ozone-generating unit
Thermoplastic resin composition
System and method for channel assignment in a satellite telephone system
Method and apparatus for synchronizing nodes
Electrical connector
Active web stabilization apparatus
Full array non-disruptive management data migration
Mounting structure for mounting power elements to heat dissipation member
Methods, compositions, and dental delivery systems for the protection of the surfaces of teeth
5-Phenylcarbamoylbarbituric acid compounds