Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Laser irradiation method, laser irradiation apparatus, and semiconductor device










Image Number 16 for United States Patent #7095762.

An object of the present invention is obtaining a semiconductor film with uniform characteristics by improving irradiation variations of the semiconductor film. The irradiation variations are generated due to scanning while irradiating with a linear laser beam of the pulse emission. At a laser crystallization step of irradiating a semiconductor film with a laser light, a continuous light emission excimer laser emission device is used as a laser light source. For example, in a method of fabricating an active matrix type liquid crystal display device, a continuous light emission excimer laser beam is irradiated to a semiconductor film, which is processed to be a linear shape, while scanning in a vertical direction to the linear direction. Therefore, more uniform crystallization can be performed because irradiation marks can be avoided by a conventional pulse laser.








 
 
  Recently Added Patents
Display screen with transitional icon
Method for counting and segmenting viral particles in an image
Novelty headband
Method and system for imaging a cross section of a specimen
Portable multimedia player
Hanger
High porosity ceramic honeycomb article containing rare earth oxide and method of manufacturing same
  Randomly Featured Patents
Carnation plant named `CFPC Lacy`
Reinforced impact beam with woven fabric
Broadband Sagnac Raman amplifiers and cascade lasers
Footwear
Drive system for a propeller driven transport aircraft
Gear mechanism for a vehicle seat adjuster
Flexible circuit for downhole antenna
Valve timing control system for internal combustion engine
PURIFIED CYTOCHROME P450 POLYPEPTIDE CYP76B1 FROM HELIANTHUS TUBEROSUS AND ITS APPLICATIONS AS BIOCATALYST IN PARTICULAR FOR THE DEGRADATION OF ENVIRONMENTAL POLLUTANTS AND FOR ALTERING THE RE
Eyeglasses