Resources Contact Us Home
Laser irradiation method, laser irradiation apparatus, and semiconductor device

Image Number 16 for United States Patent #7095762.

An object of the present invention is obtaining a semiconductor film with uniform characteristics by improving irradiation variations of the semiconductor film. The irradiation variations are generated due to scanning while irradiating with a linear laser beam of the pulse emission. At a laser crystallization step of irradiating a semiconductor film with a laser light, a continuous light emission excimer laser emission device is used as a laser light source. For example, in a method of fabricating an active matrix type liquid crystal display device, a continuous light emission excimer laser beam is irradiated to a semiconductor film, which is processed to be a linear shape, while scanning in a vertical direction to the linear direction. Therefore, more uniform crystallization can be performed because irradiation marks can be avoided by a conventional pulse laser.

  Recently Added Patents
Imaging lens having five lens elements, and electronic apparatus having the same
Method and apparatus for user selection of advertising combinations
Computer server capable of supporting CPU virtualization
Signal activated molecular delivery
Computer-implemented method of constructing a stock index using index rotation
Use of Lactobacillus for liver protection
Apparatus and method for masking a clock signal
  Randomly Featured Patents
Process and apparatus for precisely metering quantities of granular or pulverulent solids
Continuous fastener feed system
Reset signal generating circuit
Wafer carrying system and carrying method thereof
Tubular guiding and gripping apparatus and method
Fan unit, electronic apparatus with fan unit, method of opening/closing shutter of fan unit, and shutter
Process for making multilayer coatings with a strippable topcoat
Archery target and method
Sprinkler head protector
System and method for archiving and supplying documents using a central archive system