Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Laser irradiation method, laser irradiation apparatus, and semiconductor device










Image Number 16 for United States Patent #7095762.

An object of the present invention is obtaining a semiconductor film with uniform characteristics by improving irradiation variations of the semiconductor film. The irradiation variations are generated due to scanning while irradiating with a linear laser beam of the pulse emission. At a laser crystallization step of irradiating a semiconductor film with a laser light, a continuous light emission excimer laser emission device is used as a laser light source. For example, in a method of fabricating an active matrix type liquid crystal display device, a continuous light emission excimer laser beam is irradiated to a semiconductor film, which is processed to be a linear shape, while scanning in a vertical direction to the linear direction. Therefore, more uniform crystallization can be performed because irradiation marks can be avoided by a conventional pulse laser.








 
 
  Recently Added Patents
People engine optimization
Transistor and display device
Support core for cold shrink tube
Method and apparatus for performing real time anomaly detection
Buckle
Visualization of information associated with applications in user interfaces
Method for decoding a spatially multiplexed data signal using a maximum likelihood detection
  Randomly Featured Patents
Rim of glasses
Combustion chamber for direct injected engine
Cup with space for printed matter
Ammonia cell
Method of packaging bicycles for shipment
Protective structures for joints
Sinterable semi-crystalline powder and near-fully dense article formed therewith
Apparatus and method for individually controlling motors in a carton folding machine in order to automatically execute a carton folding process
Air pollution attenuation system for copiers employing noxious gas in a developing chamber through which the copy passes for development
Method of producing monokine induced by gamma interferon