Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Laser irradiation method, laser irradiation apparatus, and semiconductor device










Image Number 16 for United States Patent #7095762.

An object of the present invention is obtaining a semiconductor film with uniform characteristics by improving irradiation variations of the semiconductor film. The irradiation variations are generated due to scanning while irradiating with a linear laser beam of the pulse emission. At a laser crystallization step of irradiating a semiconductor film with a laser light, a continuous light emission excimer laser emission device is used as a laser light source. For example, in a method of fabricating an active matrix type liquid crystal display device, a continuous light emission excimer laser beam is irradiated to a semiconductor film, which is processed to be a linear shape, while scanning in a vertical direction to the linear direction. Therefore, more uniform crystallization can be performed because irradiation marks can be avoided by a conventional pulse laser.








 
 
  Recently Added Patents
Method and system for phase-sensitive magnetic resonance imaging
Inductive antenna coupling
Crosslinked core/shell polymer particles
Liquid crystal display having wide viewing angle
Photographic printing paper and method of making same
Display system with mounting assemblies and associated methods
Treatment of diabetes with milk protein hydrolysate
  Randomly Featured Patents
Diamond film depositing apparatus and method thereof
Method for preparing colloidal size particulate
Scanning probe microscope system
Electrode coating composed of copolymers derived from diacetone acrylamide
Saccharase inhibiting 3,4,5-trihydroxypiperidine derivatives
Cruciform spring element
Production of oil seed protein isolate
Vision-based document segmentation
Flywheel apparatus for storing electrical energy
Structure for compensating for different thermal expansions of inner and outer concentrically mounted pipes