Resources Contact Us Home
Laser irradiation method, laser irradiation apparatus, and semiconductor device

Image Number 16 for United States Patent #7095762.

An object of the present invention is obtaining a semiconductor film with uniform characteristics by improving irradiation variations of the semiconductor film. The irradiation variations are generated due to scanning while irradiating with a linear laser beam of the pulse emission. At a laser crystallization step of irradiating a semiconductor film with a laser light, a continuous light emission excimer laser emission device is used as a laser light source. For example, in a method of fabricating an active matrix type liquid crystal display device, a continuous light emission excimer laser beam is irradiated to a semiconductor film, which is processed to be a linear shape, while scanning in a vertical direction to the linear direction. Therefore, more uniform crystallization can be performed because irradiation marks can be avoided by a conventional pulse laser.

  Recently Added Patents
Elementary network description for efficient link between neuronal models and neuromorphic systems
Method for configuring analog-to-digital converter keys and non-transitory machine readable medium storing program code executed for performing such method
Memory device and semiconductor device
Plants and seeds of hybrid corn variety CH424126
Method and system for shared high speed cache in SAS switches
Processing abstract derived entities defined in a data abstraction model
Semiconductor fin device and method for forming the same using high tilt angle implant
  Randomly Featured Patents
Oil supply system for vertical engine
Composite having two or more layers, including an EVOH layer
Print media cartridge incorporating print media and ink housing assemblies
Semiconductor memory device with single clock signal line
.beta.-lactam compounds and process for producing the same
Acoustic fluid analyzer
Trash can assembly
Self-heating integrated circuit
Soybean cultivar 03414552
Expandable enclosure for freeze forming meat or poultry products