Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Laser irradiation method, laser irradiation apparatus, and semiconductor device










Image Number 16 for United States Patent #7095762.

An object of the present invention is obtaining a semiconductor film with uniform characteristics by improving irradiation variations of the semiconductor film. The irradiation variations are generated due to scanning while irradiating with a linear laser beam of the pulse emission. At a laser crystallization step of irradiating a semiconductor film with a laser light, a continuous light emission excimer laser emission device is used as a laser light source. For example, in a method of fabricating an active matrix type liquid crystal display device, a continuous light emission excimer laser beam is irradiated to a semiconductor film, which is processed to be a linear shape, while scanning in a vertical direction to the linear direction. Therefore, more uniform crystallization can be performed because irradiation marks can be avoided by a conventional pulse laser.








 
 
  Recently Added Patents
Sound producing apparatus for vehicle
Method of treating cancer using a survivin inhibitor
Sporting goal practice screen
Methods and apparatus for providing video on demand and network PVR functions using IP streaming
State detection device, electronic apparatus, measurement system and program
Configurable memory controller/memory module communication system
Image erasing apparatus and recording medium conveying method for image erasing apparatus
  Randomly Featured Patents
Vehicle steering device
Traction drive rolling element and method of forming the same
Racquetball racquet
Method for treating ammonia and urea condensates
Gas concentrating method and apparatus using pressure swing adsorption
Data processing device and method
Lamp
Solid immersion lens array and methods for producing a solid immersion lens array
Line marker overcover
Anti-jam device that restricts the number of paper sheets each time