Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Laser irradiation method, laser irradiation apparatus, and semiconductor device










Image Number 16 for United States Patent #7095762.

An object of the present invention is obtaining a semiconductor film with uniform characteristics by improving irradiation variations of the semiconductor film. The irradiation variations are generated due to scanning while irradiating with a linear laser beam of the pulse emission. At a laser crystallization step of irradiating a semiconductor film with a laser light, a continuous light emission excimer laser emission device is used as a laser light source. For example, in a method of fabricating an active matrix type liquid crystal display device, a continuous light emission excimer laser beam is irradiated to a semiconductor film, which is processed to be a linear shape, while scanning in a vertical direction to the linear direction. Therefore, more uniform crystallization can be performed because irradiation marks can be avoided by a conventional pulse laser.








 
 
  Recently Added Patents
Measurement protocol for a medical technology apparatus
Physiological measuring system comprising a garment in the form of a sleeve or glove and sensing apparatus incorporated in the garment
Pet grooming brush and vacuum attachment
MOS device for eliminating floating body effects and self-heating effects
Catalysts for polyurethane coating compounds
Triazole derivatives as ghrelin analogue ligands of growth hormone secretagogue receptors
Identification of biomarkers in biological samples and methods of using same
  Randomly Featured Patents
Adapter plate for a tarp system for a side-dump trailer or truck
Golf club head
Sheet-material foreign-matter detecting method and apparatus
Method in a gaming machine for providing data recovery
Write-once recording medium preserving data-recording status, method of preserving data-recording status of a write-once recording medium, medium including computer readable code for the same,
Game equipment and method having simultaneously played, balanced, multiple game theories
Fishing reel foot fixing device
Coolant flow field plate for electrochemical fuel cells
Method for reducing disk thermal expansion effects while writing reference spiral servo patterns to a disk of a disk drive
Vacuum pinning of molten thermoplastic film to a roughened casting roll