Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Laser irradiation method, laser irradiation apparatus, and semiconductor device










Image Number 13 for United States Patent #7095762.

An object of the present invention is obtaining a semiconductor film with uniform characteristics by improving irradiation variations of the semiconductor film. The irradiation variations are generated due to scanning while irradiating with a linear laser beam of the pulse emission. At a laser crystallization step of irradiating a semiconductor film with a laser light, a continuous light emission excimer laser emission device is used as a laser light source. For example, in a method of fabricating an active matrix type liquid crystal display device, a continuous light emission excimer laser beam is irradiated to a semiconductor film, which is processed to be a linear shape, while scanning in a vertical direction to the linear direction. Therefore, more uniform crystallization can be performed because irradiation marks can be avoided by a conventional pulse laser.








 
 
  Recently Added Patents
Terminal device and image printing method
Battery-operated massager and soap dispensing wand
Data output apparatus and data output method
Mounting structure, electro-optical apparatus, and touch panel
Method and system for processing dictated information
Methods and systems for use in tracking targets for direction finding systems
Randomly accessible visual information recording medium and recording method, and reproducing device and reproducing method
  Randomly Featured Patents
Lid of cup
Using a hash value as a pointer to an application class in a communications device
Rear suspension system for motorcycles
Decorative vehicle side step
Novel enzyne derivatives
Plug connector having retainer attached mold case
System and method for handling invalid condition of a data element
Portable and compactible scale
Conical chipper/canter head
Speed control apparatus for the switched reluctance motor