Resources Contact Us Home
Laser irradiation method, laser irradiation apparatus, and semiconductor device

Image Number 13 for United States Patent #7095762.

An object of the present invention is obtaining a semiconductor film with uniform characteristics by improving irradiation variations of the semiconductor film. The irradiation variations are generated due to scanning while irradiating with a linear laser beam of the pulse emission. At a laser crystallization step of irradiating a semiconductor film with a laser light, a continuous light emission excimer laser emission device is used as a laser light source. For example, in a method of fabricating an active matrix type liquid crystal display device, a continuous light emission excimer laser beam is irradiated to a semiconductor film, which is processed to be a linear shape, while scanning in a vertical direction to the linear direction. Therefore, more uniform crystallization can be performed because irradiation marks can be avoided by a conventional pulse laser.

  Recently Added Patents
Multi currency exchanges between participants
Oil extractor and the preparation method thereof
Glycosyltransferase promoter
Method for building taxonomy of topics and categorizing videos
Method of controlling semiconductor device, signal processing method, semiconductor device, and electronic apparatus
Methods and compositions for wound healing
Systems of an electronic device and methods for manufacturing the same
  Randomly Featured Patents
Clock delay adjusting method of semiconductor integrated circuit device and semiconductor integrated circuit device formed by the method
Pattern matching game machine of prepaid card system
Cap for toner fillable container and toner fillable container using same
System and method for analyzing and improving business performance
Duplex processor arrangement for a switching system
Optical recording medium recording pixel data as a compressed unit data block
Structures for electrically conductive decals filled with inorganic insulator material
Processes for treating aluminium dross residues
Oval umbrella handle
Bus bars