Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Laser irradiation method, laser irradiation apparatus, and semiconductor device










Image Number 13 for United States Patent #7095762.

An object of the present invention is obtaining a semiconductor film with uniform characteristics by improving irradiation variations of the semiconductor film. The irradiation variations are generated due to scanning while irradiating with a linear laser beam of the pulse emission. At a laser crystallization step of irradiating a semiconductor film with a laser light, a continuous light emission excimer laser emission device is used as a laser light source. For example, in a method of fabricating an active matrix type liquid crystal display device, a continuous light emission excimer laser beam is irradiated to a semiconductor film, which is processed to be a linear shape, while scanning in a vertical direction to the linear direction. Therefore, more uniform crystallization can be performed because irradiation marks can be avoided by a conventional pulse laser.








 
 
  Recently Added Patents
Semiconductor thin film, thin film transistor, method for manufacturing same, and manufacturing equipment of semiconductor thin film
Preserving and handling native data in hybrid object trees
Circuit for compressing data and a processor employing same
High-voltage AC light-emitting diode structure
Real-time pricing of shipping vendors
Method and system for fail-safe call survival
Delta-sigma AD converter circuit and battery pack
  Randomly Featured Patents
Heating pressure processing apparatus
Take-up reel, veneer reeling apparatus, tape feeding unit for veneer roll, veneer roll unwinding apparatus and a production method for laminated wood
Low dispersion slope fiber
Exhaust gas purification system
Image sensors having alternating arrays of high and low sensitivity picture elements
Tungsten halogen lamp including phosphorous and bromine
Central configuration and transport supporting software lifecycles
Gasket with integral channel and port seal
Method for the production of cobalt catalysts supported on silicon dioxide and their use
Infant measuring device