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Micro movable mechanism system and control method for the same

Image Number 11 for United States Patent #7088492.

A micro movable mechanism system includes a micro movable mechanism. A target position generating section generates a signal indicative a target position of the micro movable mechanism. A nonlinear control unit outputs a controller output signal indicating a control value based on a difference between the target position signal and a signal indicating a current position of the micro movable mechanism. A root correction section drives the micro movable mechanism based on a signal proportional to a square root of the control value.

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