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Semiconductor device having a side wall insulating film and a manufacturing method thereof










Image Number 7 for United States Patent #7081652.

A manufacturing method of a semiconductor device having a side wall insulating film, comprising; forming a gate insulating film on a semiconductor substrate, forming a gate electrode on the gate insulating film, forming a first side wall insulating film on a side surface of the gate electrode, forming a projecting portion on a first upper surface of the semiconductor substrate adjacent to the first side wall insulating film, forming a first diffusion layer by introducing impurities to the projecting portion formed on the semiconductor substrate, removing the first side wall insulating film so as to expose a second upper surface of the semiconductor substrate located below the first side wall insulating film, a width of the second upper surface exposed being a X, forming a second diffusion layer by introducing impurities to the second upper surface of the semiconductor substrate, and forming a second side wall insulating film on the side surface of the gate electrode and the second upper surface of the semiconductor substrate, a width of the second side wall insulating film being a Y, wherein the Y is 0.5X or more and the X or less (0.5X.ltoreq.Y.ltoreq.X).








 
 
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