Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Semiconductor device having a side wall insulating film and a manufacturing method thereof










Image Number 7 for United States Patent #7081652.

A manufacturing method of a semiconductor device having a side wall insulating film, comprising; forming a gate insulating film on a semiconductor substrate, forming a gate electrode on the gate insulating film, forming a first side wall insulating film on a side surface of the gate electrode, forming a projecting portion on a first upper surface of the semiconductor substrate adjacent to the first side wall insulating film, forming a first diffusion layer by introducing impurities to the projecting portion formed on the semiconductor substrate, removing the first side wall insulating film so as to expose a second upper surface of the semiconductor substrate located below the first side wall insulating film, a width of the second upper surface exposed being a X, forming a second diffusion layer by introducing impurities to the second upper surface of the semiconductor substrate, and forming a second side wall insulating film on the side surface of the gate electrode and the second upper surface of the semiconductor substrate, a width of the second side wall insulating film being a Y, wherein the Y is 0.5X or more and the X or less (0.5X.ltoreq.Y.ltoreq.X).








 
 
  Recently Added Patents
Down-drawable, chemically strengthened glass for cover plate
Plasma panel based radiation detector
Wafer level packaging structure with large contact area and preparation method thereof
Fuel cell module, manufacturing method thereof and unit containing several of the latter
Asynchronous loading of scripts in web pages
Vertical gate LDMOS device
Method and apparatus for detection of LVDT core fallout condition
  Randomly Featured Patents
Locking structure of tilting and telescopic steering column
System and method for facilitating diagnosis and maintenance of a mobile conveyance
4-anilinoquinazoline derivatives with adenosine-kinase inhibitor properties
Connected prism elements swivellingly
Soybean variety XB28AD11
Shower panel
Enhanced medical thermal energy exchange pad
Driving system for use in motor vehicle
Flashlight body portion
Front face of vehicle wheel cover