Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Semiconductor device having a side wall insulating film and a manufacturing method thereof










Image Number 7 for United States Patent #7081652.

A manufacturing method of a semiconductor device having a side wall insulating film, comprising; forming a gate insulating film on a semiconductor substrate, forming a gate electrode on the gate insulating film, forming a first side wall insulating film on a side surface of the gate electrode, forming a projecting portion on a first upper surface of the semiconductor substrate adjacent to the first side wall insulating film, forming a first diffusion layer by introducing impurities to the projecting portion formed on the semiconductor substrate, removing the first side wall insulating film so as to expose a second upper surface of the semiconductor substrate located below the first side wall insulating film, a width of the second upper surface exposed being a X, forming a second diffusion layer by introducing impurities to the second upper surface of the semiconductor substrate, and forming a second side wall insulating film on the side surface of the gate electrode and the second upper surface of the semiconductor substrate, a width of the second side wall insulating film being a Y, wherein the Y is 0.5X or more and the X or less (0.5X.ltoreq.Y.ltoreq.X).








 
 
  Recently Added Patents
Hanger
Double patterning method using tilt-angle deposition
Accelerator for a read-channel design and simulation tool
Multi currency exchanges between participants
Information processing apparatus, including updating of program and program information, and method of updating program of the information processing apparatus
Method for detecting security error in mobile telecommunications system and device of mobile telecommunications
Wiring structure in a semiconductor device, method of forming the wiring structure, semiconductor device including the wiring structure and method of manufacturing the semiconductor device
  Randomly Featured Patents
Folding and smoothing machine for skirts and the like
Optical assembly and photographing apparatus including the same
Fence installation apparatus
Hitch pin with locking lever
Optical recording medium, information recording method, and information reproducing method
Motorized, retractable antenna system for recreational and similar vehicles
System and method for a communication system
Automated, electronic network based, project management server system, for managing multiple work-groups
Use of codon-varied oligonucleotide synthesis for synthetic shuffling
Body fitting compound sanitary napkin