Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Compressive alpha-tantalum thin film stack










Image Number 5 for United States Patent #7081306.

A layer of compressive alpha-tantalum is formed on a substrate by depositing a buffer layer on the substrate and depositing a layer of compressive alpha-tantalum on the buffer layer with lattice matching between the layer of compressive alpha-tantalum and the buffer layer. A bias may be applied to the substrate during deposition of the buffer layer and/or compressive alpha-tantalum layer. In some embodiments, the method may include depositing buffers layers comprising titanium, niobium, substantially pure aluminum or aluminum-copper alloy.








 
 
  Recently Added Patents
Application authentication system and method
Method and apparatus for content-aware resizing of data chunks for replication
Method and apparatus for policy-based network access control with arbitrary network access control frameworks
Vehicle grille
Lubricant composition
Error protection for pipeline resources
Semiconductor device and manufacturing method thereof
  Randomly Featured Patents
Pants pockets
Hub and detectable spool
Electrochemical biosensor analysis system
Preparation of high performance silica slurry using a centrifuge
Temperature compensated surface acoustic wave devices
Test circuit for bias temperature instability recovery measurements
Batproofing apparatus and method
Streaming media buffering system
Lens and an optical apparatus with the lens
Semiconductor device and method for manufacturing the same