Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Compressive alpha-tantalum thin film stack










Image Number 5 for United States Patent #7081306.

A layer of compressive alpha-tantalum is formed on a substrate by depositing a buffer layer on the substrate and depositing a layer of compressive alpha-tantalum on the buffer layer with lattice matching between the layer of compressive alpha-tantalum and the buffer layer. A bias may be applied to the substrate during deposition of the buffer layer and/or compressive alpha-tantalum layer. In some embodiments, the method may include depositing buffers layers comprising titanium, niobium, substantially pure aluminum or aluminum-copper alloy.








 
 
  Recently Added Patents
Upper surface of a skateboard deck
Battery loading and unloading mechanism
Compositions and methods for concentrating and depleting microorganisms
Image processing apparatus, control method for the same, and storage medium
Copolymer for positive type lithography, polymerization initiator used in production of said copolymer, and composition for semiconductor lithography
Control device
Level-shift circuit, electro-optical device, and level shift method
  Randomly Featured Patents
Method for generating spread spectrum driver signals for a seismic vibrator array using multiple biphase modulation operations in each driver signal chip
Tool for producing camshafts by expanding
Methods of growing heteroepitaxial single crystal or large grained semiconductor films and devices thereon
Footwear device
Footwear upper
Endoscope insertion direction detection method
Device for supplying printing plates in a printing machine
Moisture insensitive electroluminescent phosphor
Code manipulation for a high speed JPEG decoder
End panel for a storage unit