Resources Contact Us Home
Compressive alpha-tantalum thin film stack

Image Number 5 for United States Patent #7081306.

A layer of compressive alpha-tantalum is formed on a substrate by depositing a buffer layer on the substrate and depositing a layer of compressive alpha-tantalum on the buffer layer with lattice matching between the layer of compressive alpha-tantalum and the buffer layer. A bias may be applied to the substrate during deposition of the buffer layer and/or compressive alpha-tantalum layer. In some embodiments, the method may include depositing buffers layers comprising titanium, niobium, substantially pure aluminum or aluminum-copper alloy.

  Recently Added Patents
Magnetic memory element, driving method for same, and nonvolatile storage device
Guitar strap attachment means
Method for determining a corrected variance representative of the condition of reception of signals representative of symbols
Image pickup device with a plurality of pixels and an AD conversion circuit
Pharmaceutical compositions of paclitaxel, paclitaxel analogs or paclitaxel conjugates and related methods of preparation and use
High purity diphenyl sulfone, preparation and use thereof for the preparation of a poly(aryletherketone)
  Randomly Featured Patents
Fungicidally active N-(2-methyl-5-chlorophenyl)-N-methoxyacetyl-3-amino-1,3-oxazolidin-2-one
Semiconductor memory device including clock control circuit and method for operating the same
Variable electronic flash light equipment
Method for improving the adherence of a phosphor-photobinder layer to a glass support
Projection-type display device
Photographic camera having also function of panoramic photographing
Reloadable word recognizer for logic analyzer
Non-noble metal catalytic microaggregates, a method for their preparation and their application in the catalysis of the photoreduction of water
Electrically photosensitive materials and elements for photoelectrophoretic imaging processes
Communication apparatus for generating a call signal from a telephone set to a data terminal