Resources Contact Us Home
Compressive alpha-tantalum thin film stack

Image Number 5 for United States Patent #7081306.

A layer of compressive alpha-tantalum is formed on a substrate by depositing a buffer layer on the substrate and depositing a layer of compressive alpha-tantalum on the buffer layer with lattice matching between the layer of compressive alpha-tantalum and the buffer layer. A bias may be applied to the substrate during deposition of the buffer layer and/or compressive alpha-tantalum layer. In some embodiments, the method may include depositing buffers layers comprising titanium, niobium, substantially pure aluminum or aluminum-copper alloy.

  Recently Added Patents
Refuelable battery-powered electric vehicle
System and method for the analysis of biodiesel
Polyester resin for toner, electrostatic charge image developing toner, electrostatic charge image developer, toner cartridge, process cartridge, image forming apparatus, and image forming met
Fixing apparatus
Communication terminal device, communication system, and communication control method
Cardiac function management integrating cardiac contractility modulation
Immunotherapy in cancer treatment
  Randomly Featured Patents
Image processing method and apparatus, and storage medium therefore
Optical device having a temperature independent spectral response using nonplanar geometric distortion of a substrate
Recombinant avipox virus and method to induce an immune response
Leaf rake
Insertless perforated mill roll
Automation using spine routing
Cosmetics and process for preparation thereof
Partition planter
Method for processing meat
Shielded optical probe and method