Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Compressive alpha-tantalum thin film stack










Image Number 3 for United States Patent #7081306.

A layer of compressive alpha-tantalum is formed on a substrate by depositing a buffer layer on the substrate and depositing a layer of compressive alpha-tantalum on the buffer layer with lattice matching between the layer of compressive alpha-tantalum and the buffer layer. A bias may be applied to the substrate during deposition of the buffer layer and/or compressive alpha-tantalum layer. In some embodiments, the method may include depositing buffers layers comprising titanium, niobium, substantially pure aluminum or aluminum-copper alloy.








 
 
  Recently Added Patents
Light emitting device and light emitting device package
Glass or glass-ceramic pane reflecting infrared radiation
Information processing apparatus capable of authentication processing with improved user convenience, control program for information processing apparatus, and recording medium having control
Composite high reflectivity layer
Critical word forwarding with adaptive prediction
Engineered magnetic layer with improved perpendicular anisotropy using glassing agents for spintronic applications
Floor standing rack
  Randomly Featured Patents
Protective canopy
System for removing chloromethyl ether and bis-chloromethyl ether from air contaminated therewith
Use of quinone and hydroquinone derivatives for the treatment of cachexia
IC power protection circuit
Belt arrangement and press equipped therewith for the continuous manufacture of wood chipboard and similar materials
Preparation of water soluble cationic acrylamide polymer and product using weak acid to adjust pH
Anti-microbial sensitivity test and testing stratum
Major/minor loop bubble memory with timing loop
Microfinish measurement apparatus and technique
Device for in place swimming