Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
In-situ monitoring on an ion implanter










Image Number 12 for United States Patent #7078712.

The present invention is directed to in-situ detection of particles and other such features in an ion implantation system during implantation operations to avoid such additional monitoring tool steps otherwise expended before and/or after implantation, for example. One or more such systems are revealed for detecting scattered light from particles on one or more semiconductor wafers illuminated by a light source (e.g., laser beam). The system comprises an ion implanter having a laser for illumination of a spot on the wafer and a pair of detectors (e.g., PMT or photodiode) rotationally opposite from the ion implantation operations. A wafer transport holds a wafer or wafers for translational scanning under the fixed laser spot. A computer analyzes the intensity of the scattered light detected from the illuminated wafer (workpiece), and may also map the light detected to a unique position. For example, particles or other such contaminates may be identified on wafers during the implantation process before additional time and resources are consumed, and aid in determining the sources of such contaminates. Further, threshold analysis of the quantity or size of such particles, for example, may provide a system interlock for shutdown or feedback control.








 
 
  Recently Added Patents
Bessel beam plane illumination microscope
Antibody recognizing turn structure in amyloid .beta.
Resistor-2 resistor (R-2R) digital-to-analog converter with resistor network reversal
Memory management configuration
Simulation tool for air traffic communications security
Fabric-backplane enterprise servers with pluggable I/O sub-system
Device chip carriers, modules, and methods of forming thereof
  Randomly Featured Patents
Vehicular vision system with a wide angle lens including a diffractive element
Push-button digital combination padlock
Wafer level chip scale package of image sensor and manufacturing method thereof
Zoom lens system
User interface for a display screen
Low overhead aggregation at the physical layer
Catheter and the method of making
Two-stage analog-to-digital converter using SAR and TDC
Method of forming concrete masonry blocks with external plates
Method and apparatus for performing refresh operations in high-density memories