Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
In-situ monitoring on an ion implanter










Image Number 12 for United States Patent #7078712.

The present invention is directed to in-situ detection of particles and other such features in an ion implantation system during implantation operations to avoid such additional monitoring tool steps otherwise expended before and/or after implantation, for example. One or more such systems are revealed for detecting scattered light from particles on one or more semiconductor wafers illuminated by a light source (e.g., laser beam). The system comprises an ion implanter having a laser for illumination of a spot on the wafer and a pair of detectors (e.g., PMT or photodiode) rotationally opposite from the ion implantation operations. A wafer transport holds a wafer or wafers for translational scanning under the fixed laser spot. A computer analyzes the intensity of the scattered light detected from the illuminated wafer (workpiece), and may also map the light detected to a unique position. For example, particles or other such contaminates may be identified on wafers during the implantation process before additional time and resources are consumed, and aid in determining the sources of such contaminates. Further, threshold analysis of the quantity or size of such particles, for example, may provide a system interlock for shutdown or feedback control.








 
 
  Recently Added Patents
Data processor with virtual machine management
Schottky diode and method of manufacture
Resuming piecewise calibration of a real-time-clock unit after a measured offset that begins at the next calibration period
Floor standing rack
System and method for displaying a constant time selection context menu interface
Chip on chip semiconductor device including an underfill layer having a resin containing an amine-based curing agent
Information processing apparatus, non-transitory computer-readable recording medium, and information processing method
  Randomly Featured Patents
Anal incontinence treatment with energy transfer device
Tethered missile element game apparatus
Process for producing non-directional electric steel sheets free from ridging
Calipers
Underwater erosion control structure
Resistojet
3-heteroarylidene-2-indolinone protein kinase inhibitors
Rapid solidification processing system for producing molds, dies and related tooling
Method for improving partial stripe write performance in disk array subsystems
Method and system for locating events in-context