Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
In-situ monitoring on an ion implanter










Image Number 12 for United States Patent #7078712.

The present invention is directed to in-situ detection of particles and other such features in an ion implantation system during implantation operations to avoid such additional monitoring tool steps otherwise expended before and/or after implantation, for example. One or more such systems are revealed for detecting scattered light from particles on one or more semiconductor wafers illuminated by a light source (e.g., laser beam). The system comprises an ion implanter having a laser for illumination of a spot on the wafer and a pair of detectors (e.g., PMT or photodiode) rotationally opposite from the ion implantation operations. A wafer transport holds a wafer or wafers for translational scanning under the fixed laser spot. A computer analyzes the intensity of the scattered light detected from the illuminated wafer (workpiece), and may also map the light detected to a unique position. For example, particles or other such contaminates may be identified on wafers during the implantation process before additional time and resources are consumed, and aid in determining the sources of such contaminates. Further, threshold analysis of the quantity or size of such particles, for example, may provide a system interlock for shutdown or feedback control.








 
 
  Recently Added Patents
Area reduction for surface mount package chips
Codeword-enhanced peer-to-peer authentication
Workflow-enabled client
Controller for internal combustion engine
Resonant conversion system with over-current protection processes
Power-on reset circuit
Image processing apparatus, remote management system, license update method, and computer program product
  Randomly Featured Patents
Substituted urea compounds useful in pain management
Head and neck protection apparatus
Liquid ejecting apparatus, method and program of controlling fluid ejecting apparatus, and target
Blank and process for the formation of beam leads for IC chip bonding
Use of dual density spacer fluids to improve cementing efficiency in horizontal wellbores
Dispenser for pasty or flowable media
Recyclable or biodegradable blood pressure cuff
Method of manufacturing synthetic resin lens, method of manufacturing reformed synthetic resin material and optical pickup apparatus
Apparatus and method for sealing a liner to a prosthesis
Pendant