Resources Contact Us Home
In-situ monitoring on an ion implanter

Image Number 12 for United States Patent #7078712.

The present invention is directed to in-situ detection of particles and other such features in an ion implantation system during implantation operations to avoid such additional monitoring tool steps otherwise expended before and/or after implantation, for example. One or more such systems are revealed for detecting scattered light from particles on one or more semiconductor wafers illuminated by a light source (e.g., laser beam). The system comprises an ion implanter having a laser for illumination of a spot on the wafer and a pair of detectors (e.g., PMT or photodiode) rotationally opposite from the ion implantation operations. A wafer transport holds a wafer or wafers for translational scanning under the fixed laser spot. A computer analyzes the intensity of the scattered light detected from the illuminated wafer (workpiece), and may also map the light detected to a unique position. For example, particles or other such contaminates may be identified on wafers during the implantation process before additional time and resources are consumed, and aid in determining the sources of such contaminates. Further, threshold analysis of the quantity or size of such particles, for example, may provide a system interlock for shutdown or feedback control.

  Recently Added Patents
Method and system for detecting target objects
Sample analysis and/or sample processing system
Case for camera
Linear jet ionizer
Device to facilitate moving an electrical cable of an electric vehicle charging station and method of providing the same
Memory device and method for dynamic random access memory having serial interface and integral instruction buffer
Switch redundancy in systems with dual-star backplanes
  Randomly Featured Patents
Tire having silica reinforced tread
Wide dynamic range linear to log converter with microcomputer control
Polyurethane adhesive/sealant remover
Use of output impedance control to eliminate mastership change-over delays in a data communication network
Methods for storing data in non-volatile memories
Recording head and test apparatus for recording head
Providing an audio track number to a status display of a portable computer system which is in an audio compact disk play mode
Device for providing elements for survival
Genetically engineered modification of potato to form amylopectin-type starch
System and method for controlling data flow in a wireless network connection