Resources Contact Us Home
Scanning electron microscope

Image Number 9 for United States Patent #7075078.

A disclosed scanning electron microscope (SEM) is intended to prevent deterioration of resolution due to increase in off-axis aberration resulting from a deviation of a primary electron bean from the optical axis of the microscope. An example of the SEM has an image shifting deflector system including two deflectors disposed respectively at upper and lower stages. The deflector at the lower stage is a multipole electrostatic deflecting electrode and is disposed in an objective. Even if the distance of image shifting is great, an image of a high resolution can be formed, and dimensions can be measured in a high accuracy. The SEM is able to achieve precision inspection at a high throughput when applied to inspection in semiconductor device fabricating processes that process a wafer having a large area and provided with very minute circuit elements.

  Recently Added Patents
Probiotic enriched and low organic acid food products
External preparation composition for skin comprising ginseng flower or ginseng seed extracts
Paging of a user equipment (UE) within a wireless communications system
Support member, rotation device comprising such a support and rolling bearing assembly including such a detection device
Vehicle lamp component
Processing circuitry for use with a position sensor
Method and apparatus for controlling peak amplifier and doherty power amplifier
  Randomly Featured Patents
Pharmacy label and record system and method
Weigh bed
Method for treatment of heavy fraction recovered through thermal cracking of high molecular-weight hydrocarbonaceous materials
Apparatus for cleaning plastics forming mold faces
Stability display apparatus
Liposomes as contrast agents for ultrasonic imaging
Hollow cathodes for plasma-containing display devices and method of producing same
Ion-electron source with channel multiplier having a feedback region
Vaccine against swine influenza virus
Image sensor