Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Scanning electron microscope










Image Number 9 for United States Patent #7075078.

A disclosed scanning electron microscope (SEM) is intended to prevent deterioration of resolution due to increase in off-axis aberration resulting from a deviation of a primary electron bean from the optical axis of the microscope. An example of the SEM has an image shifting deflector system including two deflectors disposed respectively at upper and lower stages. The deflector at the lower stage is a multipole electrostatic deflecting electrode and is disposed in an objective. Even if the distance of image shifting is great, an image of a high resolution can be formed, and dimensions can be measured in a high accuracy. The SEM is able to achieve precision inspection at a high throughput when applied to inspection in semiconductor device fabricating processes that process a wafer having a large area and provided with very minute circuit elements.








 
 
  Recently Added Patents
Fingerprinting apparatus, system, and method
Engineered enzymes with methionine-gamma-lyase enzymes and pharmacological preparations thereof
Meter socket cabinet
Terminal device and image printing method
Difference detecting apparatus, difference output apparatus, and medium
Maltol ether processes and intermediates
Liquid crystal shutter glasses
  Randomly Featured Patents
Method for depth peeling and blending
Add-on extension ladder
System and method for setting and compensating errors in AOI and POI of a beam of EM radiation
Device for the marking of information elements
Systems and methods for data alignment
Logarithmic echo canceller
Rimless spectacles and method for making the same
Method for image compression, related system and computer product therefor
Twin turbine exhaust gas re-circulation system having a second stage variable nozzle turbine
Phase-change random access memory