Resources Contact Us Home
Scanning electron microscope

Image Number 9 for United States Patent #7075078.

A disclosed scanning electron microscope (SEM) is intended to prevent deterioration of resolution due to increase in off-axis aberration resulting from a deviation of a primary electron bean from the optical axis of the microscope. An example of the SEM has an image shifting deflector system including two deflectors disposed respectively at upper and lower stages. The deflector at the lower stage is a multipole electrostatic deflecting electrode and is disposed in an objective. Even if the distance of image shifting is great, an image of a high resolution can be formed, and dimensions can be measured in a high accuracy. The SEM is able to achieve precision inspection at a high throughput when applied to inspection in semiconductor device fabricating processes that process a wafer having a large area and provided with very minute circuit elements.

  Recently Added Patents
Charging current control method and charging system
Portable computer
Inhibitor of casein kinase 1delta and casein kinase 1E
Elastic wave device having a capacitive electrode on the piezoelectric substrate
Management of computer-file sharing between at least two devices
Content display monitor
Spectral measurement device
  Randomly Featured Patents
Pressure based selection
Driver assistance system for traffic sign recognition
Natural language interface customization
Elastic dog leash and coupler
mRNA splice variant of the doublecortin-like kinase gene and its use in cancer diagnosis and therapy
Six-speed powertrain of an automatic transmission
Latch unit for an electronic device
Shock wave generator for generating an acoustical shock wave pulse
Aircraft communication system
Automatic tool changer with internal tool storage magazine