Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Scanning electron microscope










Image Number 9 for United States Patent #7075078.

A disclosed scanning electron microscope (SEM) is intended to prevent deterioration of resolution due to increase in off-axis aberration resulting from a deviation of a primary electron bean from the optical axis of the microscope. An example of the SEM has an image shifting deflector system including two deflectors disposed respectively at upper and lower stages. The deflector at the lower stage is a multipole electrostatic deflecting electrode and is disposed in an objective. Even if the distance of image shifting is great, an image of a high resolution can be formed, and dimensions can be measured in a high accuracy. The SEM is able to achieve precision inspection at a high throughput when applied to inspection in semiconductor device fabricating processes that process a wafer having a large area and provided with very minute circuit elements.








 
 
  Recently Added Patents
Automatic parallelization using binary rewriting
6-cyclylmethyl-and 6-alkylmethyl-substituted pyrazolepyrimidines
Passenger information module with on demand channel screen of graphical user interface
Systems and methods for specifying an item order
Method and apparatus for supporting memory usage throttling
Inter-system handoffs in multi-access environments
Scheduled programmatic game content
  Randomly Featured Patents
Process for manufacturing a panel made of a thermoplastic composite
Active matrix display device
Method of manufacturing a microwave intergrated circuit substrate including metal lined via holes
Triple price setter for totalizer coin mechanism
Restore of backup to computer system with filesystem/volume attribute modification
Method for continuous updating in real time of bidimensional and tridimensional seismic images of a subsurface section using drilling well data
Ceramic fusion implants and compositions
Automated method and apparatus for distance measurement
Motor control for a brushless DC motor
Method for controlling data transfer between a data transmitter and a data receiver through a bus by means of a control device connected to the bus, and a control device for carrying out the m