Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Scanning electron microscope










Image Number 9 for United States Patent #7075078.

A disclosed scanning electron microscope (SEM) is intended to prevent deterioration of resolution due to increase in off-axis aberration resulting from a deviation of a primary electron bean from the optical axis of the microscope. An example of the SEM has an image shifting deflector system including two deflectors disposed respectively at upper and lower stages. The deflector at the lower stage is a multipole electrostatic deflecting electrode and is disposed in an objective. Even if the distance of image shifting is great, an image of a high resolution can be formed, and dimensions can be measured in a high accuracy. The SEM is able to achieve precision inspection at a high throughput when applied to inspection in semiconductor device fabricating processes that process a wafer having a large area and provided with very minute circuit elements.








 
 
  Recently Added Patents
Methods, systems, and products for providing ring backs
Method for eliciting an immune response to human telomerase reverse transcriptase
Light source lighting device including a constant-current supply that is connected to a light source and supplies a constant current of a substantially constant magnitude to the light source,
Supply voltage generating circuit and semiconductor device having the same
Disk-based storage device having read channel memory that is selectively accessible to disk controller
Accelerator for a read-channel design and simulation tool
Storing a location within metadata of visual media
  Randomly Featured Patents
Sulfur oxide determination
Radar level gauge system
Barrier webs having bioactive surfaces
Abrasive agglomerate coated raised island articles
Fiber roll with polyester fiber filler
Inter-domain network management system for multi-layer networks
Magnetic microactuator with capacitive position sensor
Methods for preparing, Group II metal overbased sulfurized alkylphenols
Low insertion-force socket for IC device
On-die termination circuit, data output buffer and semiconductor memory device