Resources Contact Us Home
Scanning electron microscope

Image Number 9 for United States Patent #7075078.

A disclosed scanning electron microscope (SEM) is intended to prevent deterioration of resolution due to increase in off-axis aberration resulting from a deviation of a primary electron bean from the optical axis of the microscope. An example of the SEM has an image shifting deflector system including two deflectors disposed respectively at upper and lower stages. The deflector at the lower stage is a multipole electrostatic deflecting electrode and is disposed in an objective. Even if the distance of image shifting is great, an image of a high resolution can be formed, and dimensions can be measured in a high accuracy. The SEM is able to achieve precision inspection at a high throughput when applied to inspection in semiconductor device fabricating processes that process a wafer having a large area and provided with very minute circuit elements.

  Recently Added Patents
Interface circuit and interface system
Front face of a vehicle wheel
Compositions and methods for lowering triglycerides in a subject on concomitant statin therapy
Semiconductor device and method for manufacturing the same
Techniques for accessing a parallel database system via external programs using vertical and/or horizontal partitioning
Secure service for enabling communication for calling party when communication service for called party is suspended
  Randomly Featured Patents
Variable length coding method and variable length decoding method
Process for recovering raw materials from paper industry mechanical waste sludge
Disposable holder for prosthetic heart valve
Platform cannula for guiding the expansion of expandable bodies and method of use
Method for controlling out of order accessing to a multibank memory
Resonator and filter
Method for plugging wellbores with polycarboxylic acid shear thickening composition
Light-triggered semiconductor device
Optical apparatus for conversion of whispering-gallery modes into a free space gaussian like beam
Micro-electro-mechanical-system sensor and method for making same