Resources Contact Us Home
Scanning electron microscope

Image Number 9 for United States Patent #7075078.

A disclosed scanning electron microscope (SEM) is intended to prevent deterioration of resolution due to increase in off-axis aberration resulting from a deviation of a primary electron bean from the optical axis of the microscope. An example of the SEM has an image shifting deflector system including two deflectors disposed respectively at upper and lower stages. The deflector at the lower stage is a multipole electrostatic deflecting electrode and is disposed in an objective. Even if the distance of image shifting is great, an image of a high resolution can be formed, and dimensions can be measured in a high accuracy. The SEM is able to achieve precision inspection at a high throughput when applied to inspection in semiconductor device fabricating processes that process a wafer having a large area and provided with very minute circuit elements.

  Recently Added Patents
Lead frame array package with flip chip die attach
Semiconductor memory device
Flame retardant thermoplastic elastomers
Translation system adapted for query translation via a reranking framework
Robot control device
Non-volatile flash-RAM memory with magnetic memory
  Randomly Featured Patents
System and method for performing distributed consistency verification of a clustered file system
Wireless sensor and system that determines exposure to an enviromental element based on local conditions
Indexable threading and turning insert with pressed-in chip breakers
Automobile trunk lid
Chimeric oligomeric compounds for modulation of splicing
Dielectrically isolated SiC mosfet
Automatic spot sprayer
Compositions containing micronized nebivolol
Media device