Resources Contact Us Home
Scanning electron microscope

Image Number 9 for United States Patent #7075078.

A disclosed scanning electron microscope (SEM) is intended to prevent deterioration of resolution due to increase in off-axis aberration resulting from a deviation of a primary electron bean from the optical axis of the microscope. An example of the SEM has an image shifting deflector system including two deflectors disposed respectively at upper and lower stages. The deflector at the lower stage is a multipole electrostatic deflecting electrode and is disposed in an objective. Even if the distance of image shifting is great, an image of a high resolution can be formed, and dimensions can be measured in a high accuracy. The SEM is able to achieve precision inspection at a high throughput when applied to inspection in semiconductor device fabricating processes that process a wafer having a large area and provided with very minute circuit elements.

  Recently Added Patents
Wound dressings
Multi currency exchanges between participants
Glass or glass-ceramic pane reflecting infrared radiation
Account managing device, image processing system, and storage medium
Power saving methods for wireless systems
Patient programmer with automated MRI compatibility verification for active implantable medical device
Highly detectable pilot structure
  Randomly Featured Patents
Digital real time postcards including information such as geographic location or landmark
Deflectable catheter
User location based switching between diversity and multiplexing
Heterocyclylcarbonyl substituted benzofuranyl-ureas
Dye metering system
Partial oxidation process
Gang modular jack
Flat battery and manufacture thereof
Wood type head for a golf club
Traveler's multi-pocketed folded pouch or the like