Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of manufacturing dielectric isolated silicon structure










Image Number 2 for United States Patent #7067387.

A method for fabricating dielectric isolated silicon islands or regions is described in this invention. A hard composite mask of pad oxide and silicon nitride is first patterned on a silicon substrate and trenches of required dimensions are etched into silicon. After forming an oxide liner on trench surfaces, boron ions are implanted in areas around the trenches such that heavily doped p.sup.+ regions are formed. The oxide liner is anisotropically etched with a reactive ion etching process such that only the silicon surface at trench bottom is exposed, leaving the oxide liner on trench walls. Epitaxial silicon is then deposited selectively on exposed single crystal silicon surface so as to fill the trenches. After removing the hard mask, trenches are masked with photo-resist pattern and the wafer is anodically etched in an aqueous bath of HF to form a buried porous silicon layer under and around the trenches. After removing the mask, the porous silicon is then oxidized. Discrete silicon regions, electrically isolated by silicon dioxide, are then formed after removing the top oxide film on the epitaxial silicon surface.








 
 
  Recently Added Patents
Method, system, and computer program product for tracking and accounting for roaming of mobile devices
Placental tissue grafts
Inhibitors of F18+ E coli binding
Selectively accessing faster or slower multi-level cell memory
Aminophosphinic derivatives that can be used in the treatment of pain
Intersection collision avoidance with adaptable vehicle dimensions
Coverage antenna apparatus with selectable horizontal and vertical polarization elements
  Randomly Featured Patents
Low voltage low loss piezoelectric driver and switching apparatus
Protease adsorbent and process for purifying TPA utilizing the same
Apparatus for controlling a temperature of a microelectronics substrate
Loaded line phase shifter having regions of higher and lower impedance
Fluorescent lamp electrode disconnect arrangement
Purification
Method of installing a mineral fibre material provided in roll form, a mineral fibre strip suitable for carrying out the method and a method of producing the mineral fibre strip
Composite leaf spring
Method of gradation reproduction
Plastic blow molded container