Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of manufacturing dielectric isolated silicon structure










Image Number 2 for United States Patent #7067387.

A method for fabricating dielectric isolated silicon islands or regions is described in this invention. A hard composite mask of pad oxide and silicon nitride is first patterned on a silicon substrate and trenches of required dimensions are etched into silicon. After forming an oxide liner on trench surfaces, boron ions are implanted in areas around the trenches such that heavily doped p.sup.+ regions are formed. The oxide liner is anisotropically etched with a reactive ion etching process such that only the silicon surface at trench bottom is exposed, leaving the oxide liner on trench walls. Epitaxial silicon is then deposited selectively on exposed single crystal silicon surface so as to fill the trenches. After removing the hard mask, trenches are masked with photo-resist pattern and the wafer is anodically etched in an aqueous bath of HF to form a buried porous silicon layer under and around the trenches. After removing the mask, the porous silicon is then oxidized. Discrete silicon regions, electrically isolated by silicon dioxide, are then formed after removing the top oxide film on the epitaxial silicon surface.








 
 
  Recently Added Patents
Image processing apparatus
Liquid crystal display device and driving method thereof
Photoacoustic joulemeter utilizing beam deflection technique
Subpixel-based image down-sampling
Process for recovering and recycling an acid catalyst
Reduction of HMF ethers with metal catalyst
LED light
  Randomly Featured Patents
Microwave load
Touch safe fuse module with improved wiring lugs
Projector and method for controlling projector
In vivo production of cyclic peptides for inhibiting protein-protein interaction
Stabilized optical gimbal assembly
Device for launching non-lethal ring airfoil projectiles
Integrated electrical circuit with passivation layer
Ink solvent application system for inkjet printheads
Jumping device having a flexible tether and method of using the jumping device
Copolymers of ethylene and/or .alpha.-olefins and vicinally disubstituted olefins