Resources Contact Us Home
Method of manufacturing dielectric isolated silicon structure

Image Number 2 for United States Patent #7067387.

A method for fabricating dielectric isolated silicon islands or regions is described in this invention. A hard composite mask of pad oxide and silicon nitride is first patterned on a silicon substrate and trenches of required dimensions are etched into silicon. After forming an oxide liner on trench surfaces, boron ions are implanted in areas around the trenches such that heavily doped p.sup.+ regions are formed. The oxide liner is anisotropically etched with a reactive ion etching process such that only the silicon surface at trench bottom is exposed, leaving the oxide liner on trench walls. Epitaxial silicon is then deposited selectively on exposed single crystal silicon surface so as to fill the trenches. After removing the hard mask, trenches are masked with photo-resist pattern and the wafer is anodically etched in an aqueous bath of HF to form a buried porous silicon layer under and around the trenches. After removing the mask, the porous silicon is then oxidized. Discrete silicon regions, electrically isolated by silicon dioxide, are then formed after removing the top oxide film on the epitaxial silicon surface.

  Recently Added Patents
Selenium/group 3A ink and methods of making and using same
Parallel processing computer systems with reduced power consumption and methods for providing the same
Methods of modulating interleukin-22 and immune response by notch regulators
User control of replacement television advertisements inserted by a smart television
Photoelectric conversion module
Semiconductor device, method of manufacturing semiconductor device, and electronic apparatus
Image stabilization apparatus and image pickup apparatus
  Randomly Featured Patents
Method and device for manufacturing a single-piece binder with a hanger for sheet packs
Control panel for dishwasher
Child safety restraining device
Planar antifuse and method of fabrication
Flow conditioning system and method for fluid jetting tools
Coextruded film for chub packages
Method for making a snack food ingredient
Drug delivery by polymeric carriers
Centralized medium access control algorithm for CDMA reverse link