Resources Contact Us Home
Method of manufacturing dielectric isolated silicon structure

Image Number 2 for United States Patent #7067387.

A method for fabricating dielectric isolated silicon islands or regions is described in this invention. A hard composite mask of pad oxide and silicon nitride is first patterned on a silicon substrate and trenches of required dimensions are etched into silicon. After forming an oxide liner on trench surfaces, boron ions are implanted in areas around the trenches such that heavily doped p.sup.+ regions are formed. The oxide liner is anisotropically etched with a reactive ion etching process such that only the silicon surface at trench bottom is exposed, leaving the oxide liner on trench walls. Epitaxial silicon is then deposited selectively on exposed single crystal silicon surface so as to fill the trenches. After removing the hard mask, trenches are masked with photo-resist pattern and the wafer is anodically etched in an aqueous bath of HF to form a buried porous silicon layer under and around the trenches. After removing the mask, the porous silicon is then oxidized. Discrete silicon regions, electrically isolated by silicon dioxide, are then formed after removing the top oxide film on the epitaxial silicon surface.

  Recently Added Patents
Bioreactor device, and method and system for fabricating tissues in the bioreactor device
Visually tracking an object in real world using 2D appearance and multicue depth estimations
Anti-infective agents and uses thereof
Telephone relaying apparatus, telephone relaying method, and program
Digital fine delay processing
Modified polyolefin resin for glass fiber treatment, surface-treated glass fiber, and fiber-reinforced polyolefin resin
Food safety printer
  Randomly Featured Patents
Sense/control devices, configuration tools and methods for such devices, and systems including such devices
Hydrodehalogenation process and catalyst for use therein
Watering device for hanging plants
Apparatus for preparing rubber scrap for recycling
Method for synchronization in a communication network and implementing appliances
Method and apparatus for determining latency and throughput of a data communication
Credit card validation aid
Device for interrupting the movement of load carrying units along a conveyor path
Extraction process