Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of manufacturing dielectric isolated silicon structure










Image Number 2 for United States Patent #7067387.

A method for fabricating dielectric isolated silicon islands or regions is described in this invention. A hard composite mask of pad oxide and silicon nitride is first patterned on a silicon substrate and trenches of required dimensions are etched into silicon. After forming an oxide liner on trench surfaces, boron ions are implanted in areas around the trenches such that heavily doped p.sup.+ regions are formed. The oxide liner is anisotropically etched with a reactive ion etching process such that only the silicon surface at trench bottom is exposed, leaving the oxide liner on trench walls. Epitaxial silicon is then deposited selectively on exposed single crystal silicon surface so as to fill the trenches. After removing the hard mask, trenches are masked with photo-resist pattern and the wafer is anodically etched in an aqueous bath of HF to form a buried porous silicon layer under and around the trenches. After removing the mask, the porous silicon is then oxidized. Discrete silicon regions, electrically isolated by silicon dioxide, are then formed after removing the top oxide film on the epitaxial silicon surface.








 
 
  Recently Added Patents
Correcting color plate data for mis-registration in a sub-scanning direction by performing a pixel transition at the transition point aligned in the main-scanning direction
Method, apparatus and computer program product for visualizing whole streets based on imagery generated from panoramic street views
Method, apparatus, and system for synchronizing contents
Method for dynamic multi-level pricing for wireless communications according to quality of service
LED light source lamp having drive circuit arranged in outer periphery of LED light source
Apparatus and method for an iterative cryptographic block
Distylium plant named `PIIDIST-I`
  Randomly Featured Patents
Data transfer technique for use with peripheral storage devices
Fusogenic liposome compositions and method
Commode
Portable microcomputer and display unit
Adjustable pedal apparatus
Peak detection for magnetic tape timing based servo
Apparatus for automated identification of thick cell groupings on a biological specimen
Multilayer, transparent film made from PET and PEN with at least one functional outer layer for producing composite packaging with UV resistance
Exercise device
Bear down system for yarn handling machine