Resources Contact Us Home
Method of manufacturing dielectric isolated silicon structure

Image Number 2 for United States Patent #7067387.

A method for fabricating dielectric isolated silicon islands or regions is described in this invention. A hard composite mask of pad oxide and silicon nitride is first patterned on a silicon substrate and trenches of required dimensions are etched into silicon. After forming an oxide liner on trench surfaces, boron ions are implanted in areas around the trenches such that heavily doped p.sup.+ regions are formed. The oxide liner is anisotropically etched with a reactive ion etching process such that only the silicon surface at trench bottom is exposed, leaving the oxide liner on trench walls. Epitaxial silicon is then deposited selectively on exposed single crystal silicon surface so as to fill the trenches. After removing the hard mask, trenches are masked with photo-resist pattern and the wafer is anodically etched in an aqueous bath of HF to form a buried porous silicon layer under and around the trenches. After removing the mask, the porous silicon is then oxidized. Discrete silicon regions, electrically isolated by silicon dioxide, are then formed after removing the top oxide film on the epitaxial silicon surface.

  Recently Added Patents
Sparse data compression
Interconnecting virtual domains
Lithographic apparatus and device manufacturing method
Optical angular position detection apparatus and method
Selecting content for storage in a multi-device cache
Medical injector
Multi-port, gigabit SERDES transceiver capable of automatic fail switchover
  Randomly Featured Patents
Portable housing for a mobile telephone, radio transceiver and battery pack
Smart translator box for AGM-65 aircraft "Maverick" analog interface to MIL-STD-1760 store digital interface
Method for generating a motion of a human type link system
Register circuit for transmitting and receiving serial data
Fuel injector system with feed-back control
Information processor and disk memory used in the same
Game board
Arylsulfonic acid salts of pyrimidine-based antiviral agents
Insert pin used in an insert molding apparatus