Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of manufacturing dielectric isolated silicon structure










Image Number 2 for United States Patent #7067387.

A method for fabricating dielectric isolated silicon islands or regions is described in this invention. A hard composite mask of pad oxide and silicon nitride is first patterned on a silicon substrate and trenches of required dimensions are etched into silicon. After forming an oxide liner on trench surfaces, boron ions are implanted in areas around the trenches such that heavily doped p.sup.+ regions are formed. The oxide liner is anisotropically etched with a reactive ion etching process such that only the silicon surface at trench bottom is exposed, leaving the oxide liner on trench walls. Epitaxial silicon is then deposited selectively on exposed single crystal silicon surface so as to fill the trenches. After removing the hard mask, trenches are masked with photo-resist pattern and the wafer is anodically etched in an aqueous bath of HF to form a buried porous silicon layer under and around the trenches. After removing the mask, the porous silicon is then oxidized. Discrete silicon regions, electrically isolated by silicon dioxide, are then formed after removing the top oxide film on the epitaxial silicon surface.








 
 
  Recently Added Patents
Heap/stack guard pages using a wakeup unit
Sheet coil type resolver
Cooler
PMI feedback with codebook interpolation
Non-transitory computer readable recording medium storing print management program, print management device, print management method, and print system
Lighting device with device for regulating the illumination according to the luminance of the illumination field and corresponding use
Method of using N-thio compounds for oligonucleotide synthesis
  Randomly Featured Patents
System and method for displaying two-dimensional data on small screen devices
High precision servo track writing with position error signal feedback
Repositionable tuning peg
Method for making float glass having reduced defect density
Target molecules detection by waveguiding in a photonic silicon membrane
Composition for treating cancer cells and synthetic method for the same
Screw displacement pump
System and method for validating resource groups
Wristwatch
Spirally wound tampon with overwrap