Resources Contact Us Home
Method of manufacturing dielectric isolated silicon structure

Image Number 2 for United States Patent #7067387.

A method for fabricating dielectric isolated silicon islands or regions is described in this invention. A hard composite mask of pad oxide and silicon nitride is first patterned on a silicon substrate and trenches of required dimensions are etched into silicon. After forming an oxide liner on trench surfaces, boron ions are implanted in areas around the trenches such that heavily doped p.sup.+ regions are formed. The oxide liner is anisotropically etched with a reactive ion etching process such that only the silicon surface at trench bottom is exposed, leaving the oxide liner on trench walls. Epitaxial silicon is then deposited selectively on exposed single crystal silicon surface so as to fill the trenches. After removing the hard mask, trenches are masked with photo-resist pattern and the wafer is anodically etched in an aqueous bath of HF to form a buried porous silicon layer under and around the trenches. After removing the mask, the porous silicon is then oxidized. Discrete silicon regions, electrically isolated by silicon dioxide, are then formed after removing the top oxide film on the epitaxial silicon surface.

  Recently Added Patents
Alleviation of laser-induced damage in optical materials by suppression of transient color centers formation and control of phonon population
Materials for organic electroluminescent devices containing substituted 10-benzo[c]phenanthrenes
Mass spectrometry method
Agent for expelling parasites in humans, animals or birds
Plants and seeds of hybrid corn variety CH367819
AIN buffer N-polar GaN HEMT profile
Serving base station selection based on backhaul capability
  Randomly Featured Patents
Non-polymeric acetoacetates as adhesion promoting coalescing agents
Energy consumption reduction in a multi-effect absorption system
Disinfecting agent
Optimizing light path uniformity in inspection systems
Fc receptor modulators and uses thereof
Method for manufacturing a multiple walled tube
Pharmaceutical composition for use as a retinal pigment epithelial cell growth agent
Systems and methods for harvesting and processing leafy vegetables
Intermediates for thia-aza compounds with a .beta.-lactam ring
Secure messaging systems