Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
MEMS scanning mirror with trenched surface and I-beam like cross-section for reducing inertia and deformation










Image Number 13 for United States Patent #7046421.

A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. The mirror can include a top flange and a bottom flange joined by a web, wherein the top and the bottom flanges form the top and the bottom surfaces, respectively. The rotational comb teeth can have a tapered shape. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror.








 
 
  Recently Added Patents
Apparatus and method for multiplying frequency of a clock signal
Liquid crystal display device
Formation of an optical waveguide
Contact lens material
Scalable security services for multicast in a router having integrated zone-based firewall
Gas cap removal tool
Optical switching device and communications system
  Randomly Featured Patents
Solid state circuit interruption employing a stored charge power transistor
Method of fabricating a semiconductor device
Constant flow rate control valve with low pressure drop start
Pulse width modulated charge pump
Quinacridine derivatives and organic electronic devices using the same
Peripheral device with access control
Locking assembly for securing semiconductor device to carrier substrate
Composite enclosure for electronic hardware
Process for forming foundry components
Hepatitis C inhibitor tri-pepitides