Resources Contact Us Home
MEMS scanning mirror with trenched surface and I-beam like cross-section for reducing inertia and deformation

Image Number 13 for United States Patent #7046421.

A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. The mirror can include a top flange and a bottom flange joined by a web, wherein the top and the bottom flanges form the top and the bottom surfaces, respectively. The rotational comb teeth can have a tapered shape. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror.

  Recently Added Patents
Substantially aligned boron nitride nano-element arrays and methods for their use and preparation
Wideband multi-channel receiver with fixed-frequency notch filter for interference rejection
Rupture resistant system
Handover signaling in wireless networks
Digital media content distribution
Call admission control method and system
Dispensing of restricted goods
  Randomly Featured Patents
Compensated vibrating optical fiber pressure measuring device
Programmable product picking apparatus
Resistance adjusting type heater and catalytic converter
Flexible corrugated multilayer metal foil shields and method of making
Optical lens
Digital pulse width modulator
Multi-functional stunt kite
Method of preparing building materials
Anti-backlash gear assembly
Method of producing shaving cutter