Resources Contact Us Home
MEMS scanning mirror with trenched surface and I-beam like cross-section for reducing inertia and deformation

Image Number 13 for United States Patent #7046421.

A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. The mirror can include a top flange and a bottom flange joined by a web, wherein the top and the bottom flanges form the top and the bottom surfaces, respectively. The rotational comb teeth can have a tapered shape. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror.

  Recently Added Patents
Comparison of visual information
Image processing apparatus, image processing method, and program
Method for producing coated steel sheet
Process for making diethyl ether from acetic acid
Wristband with detachable labels
Device and method for controlling brightness of organic light emitting diode display
  Randomly Featured Patents
Connection device between a vacuum cleaner and a suction pipe
Modularized parallel drivetrain
Reliable sustained self-sputtering
Enclosures for fluidic oscillators
Vehicle hydraulic transmission
Sample extractor
Resolderable electrical connector
Method and system for improved wireless communications payload
Color-stable, weather-, and impact-resistant molding compositions based on polymethylmethacrylate, and process for production thereof
Variable rate digital switching system