Resources Contact Us Home
MEMS scanning mirror with trenched surface and I-beam like cross-section for reducing inertia and deformation

Image Number 13 for United States Patent #7046421.

A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. The mirror can include a top flange and a bottom flange joined by a web, wherein the top and the bottom flanges form the top and the bottom surfaces, respectively. The rotational comb teeth can have a tapered shape. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror.

  Recently Added Patents
Multi-phase switching regulator and driver circuit and control method thereof
Rotatable polarizer/filter device and feed network using the same
Lighting fixture
Fluororubber-metal laminate gasket material
Motor interface for parallel drive shafts within an independently rotating member
Device for producing stable and augmented flame
Anchor image identification for vertical video search
  Randomly Featured Patents
Shoe upper
Battery charger
Implements with side screening plates
Method and apparatus for storing data
Chairlift or gondola lift including friction drive wheels
Method of friction stir welding with grooved backing member
Method and device for removing bubbles from liquid
Floor mounted utility box
Method and apparatus for a N-NARY logic circuit using capacitance isolation
Control valve for hydraulic braking system