Resources Contact Us Home
MEMS scanning mirror with trenched surface and I-beam like cross-section for reducing inertia and deformation

Image Number 13 for United States Patent #7046421.

A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. The mirror can include a top flange and a bottom flange joined by a web, wherein the top and the bottom flanges form the top and the bottom surfaces, respectively. The rotational comb teeth can have a tapered shape. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror.

  Recently Added Patents
Methods and apparatus for processing audio signals
Voltage regulator with improved voltage regulator response and reduced voltage drop
Terminal device, system and computer readable medium
Collating device, collating method, and program
Portable device for treating insect bites and the like
Switchable memory diodes based on ferroelectric/conjugated polymer heterostructures and/or their composites
Methods for the production of aligned carbon nanotubes and nanostructured material containing the same
  Randomly Featured Patents
Engine lubricants
Modular control panel face
Method and apparatus for fixing the rotational positions of eccentric elements in an optical fiber connector
Light emitting apparatus and method of fabricating the same
Sledge with tiltable runners
Sailboard fin retaining member
Process for treating salt waste generated in dry reprocessing of spent metallic nuclear fuel
Set of construction elements
Multistage optical amplifier having tilt compensation feature
Air conditioning housing for an air conditioner of an automobile