Resources Contact Us Home
MEMS scanning mirror with trenched surface and I-beam like cross-section for reducing inertia and deformation

Image Number 13 for United States Patent #7046421.

A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. The mirror can include a top flange and a bottom flange joined by a web, wherein the top and the bottom flanges form the top and the bottom surfaces, respectively. The rotational comb teeth can have a tapered shape. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror.

  Recently Added Patents
Personalized dashboard architecture for displaying data display applications
Train car for proppant containers
Method and receiver for jointly decoding received communication signals using maximum likelihood detection
Signal processing device, signal processing method and program
Semiconductor unit having a power semiconductor and semiconductor apparatus using the same
Image stabilization
Potentiometric-sensor chip, potentiometric assay, and assay kit
  Randomly Featured Patents
Raising and lowering aid for trolling motors
Symmetrical keyboard apparatus
Indole phthalides and naphthalides
Power train
Direct vectored legacy instruction set emulation
Vehicle bumper structure
Image display device
Multi-pivot latch assemblies
Method and system for multi-detector-row computed tomography utilizing projection data up-sampling with shift
Camera image stabilization