Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
MEMS scanning mirror with trenched surface and I-beam like cross-section for reducing inertia and deformation










Image Number 13 for United States Patent #7046421.

A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. The mirror can include a top flange and a bottom flange joined by a web, wherein the top and the bottom flanges form the top and the bottom surfaces, respectively. The rotational comb teeth can have a tapered shape. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror.








 
 
  Recently Added Patents
Method and apparatus for filter-less class D audio amplifier EMI reduction
Method and apparatus for re-routing calls in a packet network during failures
Memory system with data line switching scheme
Segmentation of a product markup image based on color and color differences
Radiation detector array
Automated measurement of concentration and/or amount in a biological sample
Segmented display panel and camera with segmented display
  Randomly Featured Patents
Coating for glass substrate for anti-reflective properties with abrasion, chemical and UV resistance
Solid electrolytic device
Light source apparatus for electronic endoscope and electronic endoscope
Power supply apparatus having plurality of planar fuel cell assemblies connected in stack form
Triangular shaped air inlet for an over-the-range type oven
Circuit for accurately measuring phase relationship of BPSK signals
Polyphenylene ether-polyester molding compositions useful under severe molding conditions
Interactive television program guide system with title and description blocking
Multi-series battery control system
Apparatus for adjustably profiling a cant