Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
MEMS scanning mirror with trenched surface and I-beam like cross-section for reducing inertia and deformation










Image Number 13 for United States Patent #7046421.

A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. The mirror can include a top flange and a bottom flange joined by a web, wherein the top and the bottom flanges form the top and the bottom surfaces, respectively. The rotational comb teeth can have a tapered shape. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror.








 
 
  Recently Added Patents
Computer-readable storage medium, image recognition apparatus, image recognition system, and image recognition method
Method for pulse-based ultra-broadband communication between at least one transmitting node and at least one receiving node
Methods for enhancing digital search query techniques based on task-oriented user activity
L2 method for partial VLAN service migration
Cosmetic container
Switch matrix modeling system and method
Method for enabling a home base station to choose between local and remote transportation of uplink data packets
  Randomly Featured Patents
Vector path merging into gradient elements
Boat docking device
Strontium precursor for use in chemical vapor deposition, atomic layer deposition and rapid vapor deposition
Bone marrow biopsy needle
Navigation apparatus
Device for reducing the velocity of impact of printed products in the base of a delivery paddle wheel of printing presses
Golf club head
Compost receptacle
Hub bore mounted central tire inflation valve system
Autonomous signal processing resource for selective series processing of data in transit on communications paths in multi-processor arrangements