Resources Contact Us Home
Dual-trench isolated crosspoint memory array

Image Number 8 for United States Patent #7042066.

A memory array dual-trench isolation structure and a method for forming the same have been provided. The method comprises: forming a p-doped silicon (p-Si) substrate; forming an n-doped (n+) Si layer overlying the p-Si substrate; prior to forming the n+ Si bit lines, forming a p+ Si layer overlying the n+ Si layer; forming a layer of silicon nitride overlying the p+ layer; forming a top oxide layer overlying the silicon nitride layer; performing a first selective etch of the top oxide layer, the silicon nitride layer, the p+ Si layer, and a portion of the n+ Si layer, to form n+ Si bit lines and bit line trenches between the bit lines; forming an array of metal bottom electrodes overlying a plurality of n-doped silicon (n+ Si) bit lines, with intervening p-doped (p+) Si areas; forming a plurality of word line oxide isolation structures orthogonal to and overlying the n+ Si bit lines, adjacent to the bottom electrodes, and separating the p+ Si areas; forming a plurality of top electrode word lines, orthogonal to the n+ Si bit lines, with an interposing memory resistor material overlying the bottom electrodes; and, forming oxide-filled word line trenches adjacent the word lines.

  Recently Added Patents
Host route convergence based on sequence values
Integrated circuit devices having conductive structures with different cross sections
Dual protocol input device
Control device for radiation imaging apparatus and control method therefor
Distortion compensation device, distortion compensation method, and radio transmitter
Method, base station and system for adjusting cell wireless configuration parameter
Secure provisioning of a portable device using a representation of a key
  Randomly Featured Patents
Rivet with sliding cap for friction stir riveting
Engine starting and stopping device
Method and device for reversing the thrust of very high bypass ratio turbojet engines
Servomechanism monitor for numerically controlled machine tools
Method for wire sawing
Multipurpose pen and pencil holder
Method for the production of carbon microspheres 1-20 .mu. in diameter
Methods and compositions for the identification and assessment of prostate cancer therapies and the diagnosis of prostate cancer
Adjustable stanchion
Antenna coupling apparatus for cordless telephone