Resources Contact Us Home
Dual-trench isolated crosspoint memory array

Image Number 8 for United States Patent #7042066.

A memory array dual-trench isolation structure and a method for forming the same have been provided. The method comprises: forming a p-doped silicon (p-Si) substrate; forming an n-doped (n+) Si layer overlying the p-Si substrate; prior to forming the n+ Si bit lines, forming a p+ Si layer overlying the n+ Si layer; forming a layer of silicon nitride overlying the p+ layer; forming a top oxide layer overlying the silicon nitride layer; performing a first selective etch of the top oxide layer, the silicon nitride layer, the p+ Si layer, and a portion of the n+ Si layer, to form n+ Si bit lines and bit line trenches between the bit lines; forming an array of metal bottom electrodes overlying a plurality of n-doped silicon (n+ Si) bit lines, with intervening p-doped (p+) Si areas; forming a plurality of word line oxide isolation structures orthogonal to and overlying the n+ Si bit lines, adjacent to the bottom electrodes, and separating the p+ Si areas; forming a plurality of top electrode word lines, orthogonal to the n+ Si bit lines, with an interposing memory resistor material overlying the bottom electrodes; and, forming oxide-filled word line trenches adjacent the word lines.

  Recently Added Patents
Semiconductor chip, stack module, and memory card
Sports helmet
Image processing apparatus, image registering method, program causing computer to execute image registering method, and recording medium in which program is recorded
Method and system for providing status of a machine
Methods for determining decoding order in a MIMO system with successive interference cancellation
Flame-proofed thermoplastic compositions
  Randomly Featured Patents
Washer console
Preparation of compact or cellular elastomers containing urethane and urea groups, and moldings produced therefrom
Apparatus for extracorporeal blood treatment with a device for checking a sterile filter, and method of checking a sterile filter of an extracorporeal blood treatment apparatus
Television receiver
Mask pattern data generation method, mask manufacturing method, semiconductor device manufacturing method, and pattern data generation program
Apparatus and method for mounting pellicle
Method of formatting a disk recording medium and information recording apparatus
Reservoir-type fuel injection system
Method and apparatus for virtually erasing data from WORM storage devices
Electrically conductive articles and processes for their fabrication