Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Dual-trench isolated crosspoint memory array










Image Number 8 for United States Patent #7042066.

A memory array dual-trench isolation structure and a method for forming the same have been provided. The method comprises: forming a p-doped silicon (p-Si) substrate; forming an n-doped (n+) Si layer overlying the p-Si substrate; prior to forming the n+ Si bit lines, forming a p+ Si layer overlying the n+ Si layer; forming a layer of silicon nitride overlying the p+ layer; forming a top oxide layer overlying the silicon nitride layer; performing a first selective etch of the top oxide layer, the silicon nitride layer, the p+ Si layer, and a portion of the n+ Si layer, to form n+ Si bit lines and bit line trenches between the bit lines; forming an array of metal bottom electrodes overlying a plurality of n-doped silicon (n+ Si) bit lines, with intervening p-doped (p+) Si areas; forming a plurality of word line oxide isolation structures orthogonal to and overlying the n+ Si bit lines, adjacent to the bottom electrodes, and separating the p+ Si areas; forming a plurality of top electrode word lines, orthogonal to the n+ Si bit lines, with an interposing memory resistor material overlying the bottom electrodes; and, forming oxide-filled word line trenches adjacent the word lines.








 
 
  Recently Added Patents
Automated difference recognition between speaking sounds and music
Method of providing user-tailored entertainment experience at hospitality location and hospitality media system thereof
Global codebook for coordinated multi-point processing
Method of bonding metallic members, and metallic bonded body
Coupling device having piercing member
Method and system for cooling of integrated circuits
Reproducible dither-noise injection
  Randomly Featured Patents
DC to DC Converter
Circuit for reducing negative bias temperature instability
Stator core cooling for dynamoelectric machines
Crystalline form of a quinolinone-carboxamide compound
Sludgeless oxidative biological purification process
Method and apparatus for digital MTS receiver
Vehicular rearview mirror elements and assemblies incorporating these elements
Method and machine for cutting window blind
Footwear outsole
O-[1-Alkyl-5-substituted-mercapto-triazol(3)yl]-phosphoric(phosphonic) acid esters and ester-amides