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Advanced ion beam detector for ion implantation tools

Image Number 5 for United States Patent #7026628.

The present invention provides an improved Faraday cup configuration that allows determination of a non-zero angle of incidence and/or a beam divergence with high accuracy. Moreover, by substantially simultaneously and continuously displaying information of a plurality of Faraday cups, the set-up of an implantation tool may be significantly facilitated and may be carried out in a substantially automated manner.

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