Resources Contact Us Home
Advanced ion beam detector for ion implantation tools

Image Number 5 for United States Patent #7026628.

The present invention provides an improved Faraday cup configuration that allows determination of a non-zero angle of incidence and/or a beam divergence with high accuracy. Moreover, by substantially simultaneously and continuously displaying information of a plurality of Faraday cups, the set-up of an implantation tool may be significantly facilitated and may be carried out in a substantially automated manner.

  Recently Added Patents
Electrowetting display devices with a reflective plate structure
Power or voltage oscillation damping in a power transmission system
Cabinet door with tread pattern
Lithographic apparatus and device manufacturing method
Method and system for advertisement using internet browser to insert advertisements
Global codebook for coordinated multi-point processing
Quinoline compounds and their use for treating viral infection
  Randomly Featured Patents
Auxiliary vehicle windshield wiper apparatus
Throttling mud choke apparatus
Method and apparatus for improving the quality of kinematic MR images
Method of chord in electronic musical instrument system
Thermal transfer image-receiving sheet
Computer aided tuning of turbine controls
Gas fired heater
Method and composition for sweep of cuttings beds in a deviated borehole
Electrically conductive zinc sulfide powder and process of producing the same and use thereof
Enhanced alumina layer with texture