Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Reference signal for stitching of interferometric profiles










Image Number 6 for United States Patent #6987570.

Composite height profiles are produced by taking successive interferometric measurements of different sections of a sample surface by sequentially placing them within the field of view of the instrument. A reference signal is used to provide a full history of scanner motion during each measurement scan. The reference signal is independent of the fringes collected for profile-measurement purposes and is used to produce a z-position history of the scan that is independent of scanner nonlinearities and other error sources. As a result, errors caused by scanner nonlinearity and lack of repeatability are removed from the process and it is possible to combine profiles of sections that are spatially disconnected without loss of precision attributable to scanner imperfections.








 
 
  Recently Added Patents
Owner-brokered knowledge sharing machine
Rule-based stimulation program search
Method and system for generating and displaying an interactive dynamic selective view of multiply connected objects
Apparatus and method to reduce noise in magnetic resonance imaging systems
Network decoys
Reactor core of liquid metal cooled reactor
High voltage circuit for electrical stimulation
  Randomly Featured Patents
Display device and instrument panel and automobile incorporating the same
Process for dyeing textiles in a non-uniform fashion and resulting textile products
Eddy current imaging apparatus and method using phase difference detection
Testing apparatus and method for thin film transistor display array
Method and means for electronic image analysis within a raster-scanned field
Curable composition
Pharmaceutical product in the form of a pellet with continuous, delayed medicament substance emission
Transmitter for a heart rate monitor
Microphone coupler for a communication device
Food waste treatment apparatus using microwave