Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Reference signal for stitching of interferometric profiles










Image Number 6 for United States Patent #6987570.

Composite height profiles are produced by taking successive interferometric measurements of different sections of a sample surface by sequentially placing them within the field of view of the instrument. A reference signal is used to provide a full history of scanner motion during each measurement scan. The reference signal is independent of the fringes collected for profile-measurement purposes and is used to produce a z-position history of the scan that is independent of scanner nonlinearities and other error sources. As a result, errors caused by scanner nonlinearity and lack of repeatability are removed from the process and it is possible to combine profiles of sections that are spatially disconnected without loss of precision attributable to scanner imperfections.








 
 
  Recently Added Patents
Metal-containing compositions and method of making same
Method and apparatus for triggering expiration of a data tag device
Methods and compositions for improved F-18 labeling of proteins, peptides and other molecules
High conductive water-based silver ink
Extreme ultraviolet light generation apparatus
Pattern forming method using developer containing organic solvent and rinsing solution for use in the pattern forming method
Semiconductor device comprising a Fin and method for manufacturing the same
  Randomly Featured Patents
Aminopyrimidine derivatives as PLK1 inhibitors
Anti-theft vehicle container
Banner support device
Process and apparatus for moulding ingots of ferro-alloys by chill casting in a cooled copper mould
Chest enclosures for ventilators
Wireless LAN using transmission monitoring
Apparatus and method for merging data blocks with error correction code protection
Location identification using broadcast wireless signal signatures
System for electromagnetic radiation dermatology and head for use therewith
Process for the production of a nonwoven and nonwoven obtained by this process