Resources Contact Us Home
Reference signal for stitching of interferometric profiles

Image Number 6 for United States Patent #6987570.

Composite height profiles are produced by taking successive interferometric measurements of different sections of a sample surface by sequentially placing them within the field of view of the instrument. A reference signal is used to provide a full history of scanner motion during each measurement scan. The reference signal is independent of the fringes collected for profile-measurement purposes and is used to produce a z-position history of the scan that is independent of scanner nonlinearities and other error sources. As a result, errors caused by scanner nonlinearity and lack of repeatability are removed from the process and it is possible to combine profiles of sections that are spatially disconnected without loss of precision attributable to scanner imperfections.

  Recently Added Patents
Device and implantation system for electrical stimulation of biological systems
Low drop-out regulator providing constant current and maximum voltage limit
Toilet bowl
Systems and methods to provide report part via a web service
Accessory sleeve
System and method for managing investment funds
Method for producing a flexible composite elastomeric polyurethane skin
  Randomly Featured Patents
Apparatus and method for adaptively adjusting a timing loop
EphB receptor-binding peptides
Thermal reduction of fluoroether carboxylic acids or salts from fluoropolymer dispersions
Needleless connector valve
Method of controlling the position of a write-read head and device for carrying out the method
Trailer hitch assembly with an interchangeable ball
Bottle labels
Method and apparatus for performing volume replication using unified architecture
Method of making semiconductor apparatus having wiring groove and contact hole formed in a self-alignment manner
Powder based granules disintegrating and sizing device, and powder based granules disintegrating and sizing method