Resources Contact Us Home
Reference signal for stitching of interferometric profiles

Image Number 6 for United States Patent #6987570.

Composite height profiles are produced by taking successive interferometric measurements of different sections of a sample surface by sequentially placing them within the field of view of the instrument. A reference signal is used to provide a full history of scanner motion during each measurement scan. The reference signal is independent of the fringes collected for profile-measurement purposes and is used to produce a z-position history of the scan that is independent of scanner nonlinearities and other error sources. As a result, errors caused by scanner nonlinearity and lack of repeatability are removed from the process and it is possible to combine profiles of sections that are spatially disconnected without loss of precision attributable to scanner imperfections.

  Recently Added Patents
Image processing apparatus, image printing apparatus and printing data generation method
Method and apparatus for connecting signal lines of multiple layers to certain contacts while preventing connections with other contacts
Optimized control of an energy supplying system and an energy consuming system
Electrophotographic photoreceptor and image forming apparatus including the same
Gas flow indicator
Diazeniumdiolated phosphorylcholine polymers for nitric oxide release
High surface area composition for use in the catalytic hydroconversion of a heavy hydrocarbon feedstock, a method making such composition and its use
  Randomly Featured Patents
Vehicle suspension and bearing therefor
Instrument and method for manipulating an operating member coupled to suture material while maintaining tension on the suture material
Weight determining system
Selective etching of unreacted nickel after salicidation
Durable security laminate with hologram
Pressure fluid-activated brake system including an anti-locking traction slip control
Using query persistence for efficient subquery evaluation in federated databases
Work apparatus for a work on a wall surface
Presenting message detectable by screen reader application
Method of separating and transferring ion-exchange resin