Resources Contact Us Home
Reference signal for stitching of interferometric profiles

Image Number 6 for United States Patent #6987570.

Composite height profiles are produced by taking successive interferometric measurements of different sections of a sample surface by sequentially placing them within the field of view of the instrument. A reference signal is used to provide a full history of scanner motion during each measurement scan. The reference signal is independent of the fringes collected for profile-measurement purposes and is used to produce a z-position history of the scan that is independent of scanner nonlinearities and other error sources. As a result, errors caused by scanner nonlinearity and lack of repeatability are removed from the process and it is possible to combine profiles of sections that are spatially disconnected without loss of precision attributable to scanner imperfections.

  Recently Added Patents
Apparatus and method for efficient transmission of acknowledgements
High voltage fast recovery trench diode
Communication apparatus, communication method, and program for exchanging data with a target
Image signal processing apparatus and image signal processing method
Integrated circuit packaging system with coupling features and method of manufacture thereof
State control of remote hosts for management of distributed applications
  Randomly Featured Patents
Bolster type cushions for therapeutic use
Depositing tungsten into high aspect ratio features
Fenestrated surgical drape with in situ features
Type of parallel machine tool frame driven by slider and extensible strut
Anti-idiotypic antibody and its use in diagnosis and therapy of Hepatitis C Virus related diseases
Heat transport system
Delta-sigma analog-to-digital converter (ADC) having an intermittent power-down state between conversion cycles
Linear hydraulic actuator with adjustable output speed
Electric lamp with ceramic reflector
Reference generator