Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Reference signal for stitching of interferometric profiles










Image Number 6 for United States Patent #6987570.

Composite height profiles are produced by taking successive interferometric measurements of different sections of a sample surface by sequentially placing them within the field of view of the instrument. A reference signal is used to provide a full history of scanner motion during each measurement scan. The reference signal is independent of the fringes collected for profile-measurement purposes and is used to produce a z-position history of the scan that is independent of scanner nonlinearities and other error sources. As a result, errors caused by scanner nonlinearity and lack of repeatability are removed from the process and it is possible to combine profiles of sections that are spatially disconnected without loss of precision attributable to scanner imperfections.








 
 
  Recently Added Patents
Fan assembly
Initiating router functions
Method to screen high affinity antibody
Resistive random access memory and method for manufacturing the same
Method and apparatus for light emitting diode control
Sensor-based wireless communication systems using compressive sampling
Scroll compressor bodies with scroll tip seals and extended thrust region
  Randomly Featured Patents
Radiographic phosphor panel having binder compatible oxosulfur stabilizer and method for preparing phosphor panel
Fail judging method and analyzer
Process for preparing 1,3-dioxolane derivatives
Variable air volume air distribution system
Low-resistance conductive pigment and method of manufacturing same
Cured meat spread and its preparation
System and method for controlling the rotating speed of a fan
Ear piercing device
Generating device, generating method, and program
Charging apparatus and image forming apparatus