Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Reference signal for stitching of interferometric profiles










Image Number 6 for United States Patent #6987570.

Composite height profiles are produced by taking successive interferometric measurements of different sections of a sample surface by sequentially placing them within the field of view of the instrument. A reference signal is used to provide a full history of scanner motion during each measurement scan. The reference signal is independent of the fringes collected for profile-measurement purposes and is used to produce a z-position history of the scan that is independent of scanner nonlinearities and other error sources. As a result, errors caused by scanner nonlinearity and lack of repeatability are removed from the process and it is possible to combine profiles of sections that are spatially disconnected without loss of precision attributable to scanner imperfections.








 
 
  Recently Added Patents
Semiconductor device
Selection of system parameters based on non-acoustic sensor information
Method and system for routing telephony communications together with modified calling party identifier information
Braided pull tug pet toy
Information repository search system
Sound producing apparatus for vehicle
Low powered activation arrangement and method thereof
  Randomly Featured Patents
Self-cleaning birdhouse
Liquid-crystal polymer film and manufacturing method thereof
Ring opening metathesis polymerization of strained cyclic ethers
Anti-bax inhibitor protein antibodies
Lock unit for foldable housing and electronic apparatus having the same
Method and therapeutic system for providing chemotherapy transdermally
Leg attachment system and method for seats
Polarized electromagnetic relay
Method and apparatus for writing information to registers in a data processing system using a number of registers for processing instructions
Method and apparatus for storing 3D information with raster imagery