Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of manufacturing semiconductor device










Image Number 16 for United States Patent #6953717.

A grain size of a crystal grain in a crystalline semiconductor film obtained by a thermal crystallization method using a metallic element is reduced. Thus, the number of crystal grains in active regions of a device is made uniform. The thermal crystallization method using a metallic element is performed for a semiconductor film formed on an insulating film formed at a lower temperature than that at formation of the semiconductor film and that at crystallization of the semiconductor film. By thermal treatment in a step of crystallizing the semiconductor film, stress of the insulating film is applied to the semiconductor film, thus causing distortion in the semiconductor film. When the distortion is caused, surface energy and a chemical potential of the semiconductor film are changed to promote the generation of a natural nucleus. Therefore, since a generation density of the crystal nucleus is increased, a grain size of a crystal grain can be reduced.








 
 
  Recently Added Patents
Electrical conduit containing a fire-resisting thermoplastic composition
Pharmaceutical treatment process using chitosan or derivative thereof
Vehicle control system
Dehumidifier
Repeating frame battery with joining of cell tabs via welded-on male and female slip-fit connectors
System and method of error reporting in a video distribution network
Modular utility rack
  Randomly Featured Patents
Two-part coupling structure having cooperating parts effecting fluid flow upon connection and mutual resealing upon disconnection
Clam shell pump housing defining passageways and a sealed pressure or vacuum chamber
Pull print supporting image forming system, image forming apparatus and image forming method
Ultrasonic measuring instrument
Anti-theft system for construction machines and method for managing construction machines
Rotary cone drill bit modular arm
Calibrating control loops
DNA encoding an immune cell cytokine
Method for adhering polyolefin materials
Liquid dispensing apparatus including visually stimulating syrup display tubes