Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of manufacturing semiconductor device










Image Number 13 for United States Patent #6953717.

A grain size of a crystal grain in a crystalline semiconductor film obtained by a thermal crystallization method using a metallic element is reduced. Thus, the number of crystal grains in active regions of a device is made uniform. The thermal crystallization method using a metallic element is performed for a semiconductor film formed on an insulating film formed at a lower temperature than that at formation of the semiconductor film and that at crystallization of the semiconductor film. By thermal treatment in a step of crystallizing the semiconductor film, stress of the insulating film is applied to the semiconductor film, thus causing distortion in the semiconductor film. When the distortion is caused, surface energy and a chemical potential of the semiconductor film are changed to promote the generation of a natural nucleus. Therefore, since a generation density of the crystal nucleus is increased, a grain size of a crystal grain can be reduced.








 
 
  Recently Added Patents
Information processing apparatus, non-transitory computer-readable recording medium, and information processing method
PCSK9 antagonists
System and method for providing an extended platform for an operating system
Image stabilization
Secure access to customer log data in a multi-tenant environment
Sequential control device for a striking mechanism
Content protection apparatus and content encryption and decryption apparatus using white-box encryption table
  Randomly Featured Patents
Control system with adaptive process controllers especially adapted for electric power plant operation
Synergistic activity of glutaraldehyde in the presence of oxidants
Electrical contact manufacturing method and apparatus
Electric outlet safety plate
Push-button mechanisms and equipment including them
Conforming artificial finger mechanism
Code table reduction apparatus for variable length decoder
Liquid crystal display device and manufacturing method therefor
Structure and method for manually controlling automatic configuration in an integrated circuit logic block array
Table or similar article