Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Real time analysis of periodic structures on semiconductors










Image Number 5 for United States Patent #6931361.

A system for characterizing periodic structures formed on a sample on a real time basis is disclosed. A spectroscopic measurement module generates output signals as a function of wavelength. The output signals are supplied to a processor for evaluation, which creates an initial theoretical model having a rectangular structure. The processor calculates the theoretical optical response of that sample, which is compared to normalized measured values at each of a plurality of wavelengths. The model configuration is then modified to be closer to the actual measured structure. The processor recalculates the optical response and compares the result to the normalized data. This process is repeated in an iterative manner until a best fit rectangular shape is obtained. Thereafter, the complexity of the model is iteratively increased, and model is iteratively fit to the data until a best fit model is obtained which is similar to the periodic structure.








 
 
  Recently Added Patents
User interface for integrating applications on a mobile communication device
Method, apparatus and article for detection of transponder tagged objects, for example during surgery
Method to dynamically tune precision resistance
Method and apparatus for pre-scheduling in closed-loop MU-MIMO antenna system
Method for improving the performance of browser-based, formula-driven parametric objects
Decontamination apparatus and method
System and method for passing PLC signals from a first electrical line to a second electrical line
  Randomly Featured Patents
Power factor control with overvoltage and undervoltage override control in a capacitor control system for a distribution system
Granular body-processing apparatus
Molecules containing at least one peptide sequence carrying one or several epitopes characteristic of a protein produced by P. falciparum at the sporozoite stage and in the hepatocytes
Fluorescent lamp system
Methods and systems for laser treatment using non-uniform output beam
Vehicle-use cooling fan driving apparatus provided with a trouble sensing function
Optimized flash memory access method and device
Electro-optical device, inspection method thereof, and electronic equipment
Social network message categorization systems and methods
Housing for horizontal rolling piston rotary compressor