Resources Contact Us Home
Method of monitoring an exposure process

Image Number 6 for United States Patent #6929892.

In monitoring of an exposure process, a highly isolative pattern greatly changed in a shape of cross section by fluctuations in the exposure dose and the focal position is an observation target. Especially, to detect a change in a resist shape of cross section from a tapered profile to an inverse tapered profile, one of the following observation methods is employed to obtain observation data: (1) a tilt image of a resist pattern is imaged by using tilt imaging electron microscopy, (2) an electron beam image of a resist pattern is imaged under imaging conditions for generating asymmetry on an electron beam signal waveform, and (3) scattering characteristic data of a resist pattern is obtained by an optical measurement system. The observation data is applied to model data created beforehand in accordance with the exposure conditions to estimate fluctuations in the exposure dose and the focal position.

  Recently Added Patents
Semiconductor device
Film-forming resins as a carrier for topical application of pharmacologically active agents
Image processing apparatus and image processing method
Computer-implemented method of constructing a stock index using index rotation
Detachably integrated battery charger for mobile cell phones and like devices
Electrical installation arrangement
  Randomly Featured Patents
Electrical connector with external seal and internal terminal retaining means
Electric connector
Cash dispensing automated banking machine system and method
Ring positionable about a periphery of a contact pad, semiconductor device components including same, and methods for positioning the ring around a contact pad
Disposable toothbrush holder
Means for transferring electrical energy to and from living tissue
Photovoltaic module
Method for evaluation of quality of the interface between layer and substrate
Electromagnetic valve actuating device for an internal combustion engine
Stream data processing apparatus and stream data processing method