Resources Contact Us Home
Method of monitoring an exposure process

Image Number 6 for United States Patent #6929892.

In monitoring of an exposure process, a highly isolative pattern greatly changed in a shape of cross section by fluctuations in the exposure dose and the focal position is an observation target. Especially, to detect a change in a resist shape of cross section from a tapered profile to an inverse tapered profile, one of the following observation methods is employed to obtain observation data: (1) a tilt image of a resist pattern is imaged by using tilt imaging electron microscopy, (2) an electron beam image of a resist pattern is imaged under imaging conditions for generating asymmetry on an electron beam signal waveform, and (3) scattering characteristic data of a resist pattern is obtained by an optical measurement system. The observation data is applied to model data created beforehand in accordance with the exposure conditions to estimate fluctuations in the exposure dose and the focal position.

  Recently Added Patents
Process for producing liquid crystal element, and liquid crystal element
Knee guard
Systems and methods for vehicle cruise control
Guitar strap attachment means
Process for making diethyl ether from acetic acid
Linerless labels
Methods of establishing virtual circuits and of providing a virtual private network service through a shared network, and provider edge device for such network
  Randomly Featured Patents
Apparatus for automatically stunning animals to be slaughtered
Coupling for the transmission of alternating torques
Image capturing apparatus comprising image sensor and plurality of pixels with simultaneous transfer of pixel electric charge from a first to an oppositely arranged second storage device
Ink jet recording head with discharge opening surface treatment
Sensitization of water-in-oil emulsion explosives
Process for generating milk froth from milk powder and milk froth generating device and coffee machine suitable for performing this process
Nonluminogenic assay for living cells
Silsesquioxane compositions containing tertiary arylamines for hole transport
Web tension equalizing roll and tracking apparatus
Rotary centering compensator for vehicle steering systems