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Chlorotrifuorine gas generator system










Image Number 3 for United States Patent #6929784.

A ClF.sub.3 gas generation system is provided with supply sources of chlorine (3) (for example a cylinder of compressed chlorine) and fluorine (4) (for example a fluorine generator) connected into a gas reaction chamber (2) enabling generation of ClF.sub.3 gas. The reaction chamber has a valved outlet (C) for the supply of the ClF.sub.3 gas to a process chamber for immediate local use.








 
 
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