Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Semiconductor device and method of manufacturing same










Image Number 17 for United States Patent #6905980.

A semiconductor device is produced by forming a gate oxide film on a silicon substrate, forming a gate electrode on the gate oxide film, forming a nitrogen-containing oxide film on the silicon substrate and gate electrode in an N.sub.2 O gas or an NO gas, forming a BPSG film on the nitrogen-containing oxide film, and carrying out a reflow process on the BPSG film in a water vapor atmosphere. During the reflow process, the nitrogen-containing oxide film that has no hydrogen atoms prevents the penetration and diffusion of oxygen and hydrogen atoms into the silicon substrate and gate electrode, thereby preventing the oxidization of the silicon substrate and gate electrode. No hydrogen atoms diffuse into the gate oxide film, and therefore, the reliability of the gate oxide film is secured.








 
 
  Recently Added Patents
Radio communication system, transmission apparatus, reception apparatus, and radio communication method in radio communication
Domain isolation through virtual network machines
Enabling improvement in cellular network coverage
Magnetic resonance imaging apparatus for use with radiotherapy
Modular system having expandable form factor
Charge domain filter and method thereof
Far field telemetry operations between an external device and an implantable medical device during recharge of the implantable medical device via a proximity coupling
  Randomly Featured Patents
Mesalamine suppository
Locating satellites
Single and double latch operating devices with improved rack-pinion operation and motion transfer
Mooring device and cleat
Apparatus for magnetic resonance imaging having a planar strip array antenna including systems and methods related thereto
High-performance flexible hydrogen sensors
Optical tap having a v-shaped recess within the range of from 152.degree. t o .degree.
Van rear door display for two way traffic
Selection of serving network element in telecommunications network
Modular and expandable irrigation controller