Resources Contact Us Home
Workpiece stage of a resist curing device

Image Number 4 for United States Patent #6897415.

A workpiece stage of a resist curing device is devised in which a workpiece on which a resist has been applied is held on a workpiece stage by vacuum suction, in which the workpiece is irradiated with UV radiation with a simultaneous temperature increase, in which it is cooled after UV radiation and by which the resist is cured, the workpiece stage having heating and cooling arrangements, major warping of the carrier is avoided and reliable holding of the workpiece on the carrier surface by vacuum suction obtained by the carrier being made of an aluminum alloy or a copper alloy which meets the following condition:.sigma. labeling the thermal stress which is determined using the following formula:where E is Young's modulus (N/mm.sup.2) at C., .alpha. is the coefficient of linear expansion (1/.degree. C.) at C. and .DELTA.T is a temperature difference (.degree. C.) of C., and .sigma..sub.y is the fracture point at C.

  Recently Added Patents
Coated article and method for making the same
Beverage container lid
Composite materials comprising aggregate and an elastomeric composition
Fine grain voltage scaling of back biasing
Controller interface providing improved data reliability
Method and apparatus for band switching in wireless local access network
Methods for determining decoding order in a MIMO system with successive interference cancellation
  Randomly Featured Patents
DC offset correction of a radio frequency receiver used with a continuous transmission radio frequency signal
Image display apparatus
Holder for garage door openers
Interference canceling device
Golfer's training aid
Constant-speed control device for a vehicle
Preparation of photosensitive polyaldehydes
PG-type 1,15-lactones
Integrated circuit with power monitor
Cable bolt spinning tool