Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Workpiece stage of a resist curing device










Image Number 4 for United States Patent #6897415.

A workpiece stage of a resist curing device is devised in which a workpiece on which a resist has been applied is held on a workpiece stage by vacuum suction, in which the workpiece is irradiated with UV radiation with a simultaneous temperature increase, in which it is cooled after UV radiation and by which the resist is cured, the workpiece stage having heating and cooling arrangements, major warping of the carrier is avoided and reliable holding of the workpiece on the carrier surface by vacuum suction obtained by the carrier being made of an aluminum alloy or a copper alloy which meets the following condition:.sigma. labeling the thermal stress which is determined using the following formula:where E is Young's modulus (N/mm.sup.2) at 200.degree. C., .alpha. is the coefficient of linear expansion (1/.degree. C.) at 200.degree. C. and .DELTA.T is a temperature difference (.degree. C.) of 120.degree. C., and .sigma..sub.y is the fracture point at 200.degree. C.








 
 
  Recently Added Patents
Method, apparatus and article for detection of transponder tagged objects, for example during surgery
Apparatus and method for layered decoding in a communication system using low-density parity-check codes
Method for generating multi-antenna signals
Communication device and method for detecting a radio signal
Dual use photovoltaic system
Image reconstruction iterative method
Managing method and apparatus for servicing contents provided by content provider
  Randomly Featured Patents
Water conserving toilet tank adapter
Ultrasonic guided needle
Enterprise planning
.DELTA.-9 desaturase and its use in making polyunsaturated fatty acids
Miniaturized confocal spectrometer
Package for electronic device
Power supply module providing feedback voltage stabilization to eliminate inductor spike
Semiconductor device having a dynamically reconfigurable circuit configuration
Mobile bearing articulating disc
Method for production of pearlescent composition comprising a fatty acid glycol ester mixture