Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Workpiece stage of a resist curing device










Image Number 2 for United States Patent #6897415.

A workpiece stage of a resist curing device is devised in which a workpiece on which a resist has been applied is held on a workpiece stage by vacuum suction, in which the workpiece is irradiated with UV radiation with a simultaneous temperature increase, in which it is cooled after UV radiation and by which the resist is cured, the workpiece stage having heating and cooling arrangements, major warping of the carrier is avoided and reliable holding of the workpiece on the carrier surface by vacuum suction obtained by the carrier being made of an aluminum alloy or a copper alloy which meets the following condition:.sigma. labeling the thermal stress which is determined using the following formula:where E is Young's modulus (N/mm.sup.2) at 200.degree. C., .alpha. is the coefficient of linear expansion (1/.degree. C.) at 200.degree. C. and .DELTA.T is a temperature difference (.degree. C.) of 120.degree. C., and .sigma..sub.y is the fracture point at 200.degree. C.








 
 
  Recently Added Patents
Electronic multiparty accounts receivable and accounts payable system
Apparatus for performing timer management regarding a system timer scheduler service, and associated method
Change management automation tool
Curable sublimation marking material and sublimation transfer process using same
Discharge circuit and method
Topology discovery, control channel establishment, and datapath provisioning within an aggregation network with centralized control
Fluid handling structure, a lithographic apparatus and a device manufacturing method
  Randomly Featured Patents
MP3 player
Semi-Autonomous RISC pipelines for overlapped execution of RISC-like instructions within the multiple superscalar execution units of a processor having distributed pipeline control for sepcula
Process for producing a part of torque converter
Method of reducing the incursion of storm waters into sanitary sewer systems
Automatic transmission with overdrive
Method and system for transmitting short message service using messenger, and computer readable recording medium recording program for implementing the method
Juice extractor
Brake device and motor with speed reducing mechanism
Infant medicine dispenser
Gaming machine with wagering features