Resources Contact Us Home
Nitride semiconductor substrate and method for manufacturing the same, and nitride semiconductor device using nitride semiconductor substrate

Image Number 7 for United States Patent #6861729.

A nitride semiconductor substrate including (a) a supporting substrate, (b) a first nitride semiconductor layer having a periodical T-shaped cross-section, having grown from periodically arranged stripe-like, grid-like or island-like portions on the supporting substrate, and (c) a second nitride semiconductor substrate covering said supporting substrate, having grown from the top and side surfaces of said first nitride semiconductor layer, wherein a cavity is formed under the second nitride semiconductor layer.A protective layer having a periodically arranged stripe-like, grid-like or island-like apertures is formed on the supporting substrate. The first nitride semiconductor layer is laterally grown from the exposed portion of the substrate. The growth is stopped before the first nitride semiconductor layer covers the supporting substrate. Thus, the first nitride semiconductor layer has a periodical T-shaped cross-section. Then, the protective layer is removed and the second nitride semiconductor layer is grown from the top and side surface of the first nitride semiconductor layer to cover the substrate.

  Recently Added Patents
Rain barrel
Method for production of fermentable sugars from biomass
Multi-function wrench for a power tool
Antenna module and wireless communication apparatus
Assisted hybrid mobile browser
Human renal disease marker substance
Multi-wired antenna for mobile apparatus
  Randomly Featured Patents
Device and method for therapeutic treatment of living organisms
Process and apparatus for heat disinfecting soft contact lenses
Methods for optimizing recording order of data files to optical media
Source and destination determination system and method
Folding towbar and lock mechanism
Child restraint seat including automatic pivot hinge
Setting tool
Image pickup lens and image pickup apparatus
Layout editing device and computer program product