Resources Contact Us Home
Nitride semiconductor substrate and method for manufacturing the same, and nitride semiconductor device using nitride semiconductor substrate

Image Number 7 for United States Patent #6861729.

A nitride semiconductor substrate including (a) a supporting substrate, (b) a first nitride semiconductor layer having a periodical T-shaped cross-section, having grown from periodically arranged stripe-like, grid-like or island-like portions on the supporting substrate, and (c) a second nitride semiconductor substrate covering said supporting substrate, having grown from the top and side surfaces of said first nitride semiconductor layer, wherein a cavity is formed under the second nitride semiconductor layer.A protective layer having a periodically arranged stripe-like, grid-like or island-like apertures is formed on the supporting substrate. The first nitride semiconductor layer is laterally grown from the exposed portion of the substrate. The growth is stopped before the first nitride semiconductor layer covers the supporting substrate. Thus, the first nitride semiconductor layer has a periodical T-shaped cross-section. Then, the protective layer is removed and the second nitride semiconductor layer is grown from the top and side surface of the first nitride semiconductor layer to cover the substrate.

  Recently Added Patents
Moving structure and micro-mirror device using the same
Fail-safe upgrading of portable electronic device software
System and method for detecting deadlock in a multithread program
Method of treating cancer using a survivin inhibitor
Display screen or portion thereof with graphical user interface
Round carrying case
Detection of bioagents using a shear horizontal surface acoustic wave biosensor
  Randomly Featured Patents
Service quality monitoring process
Holder for a liquid container
Color correction adapter for photographic enlargers
Political chess game
Nested receptacle
Method and device for the orientation and logitudinal movement of rounded can bodies in relation to a welding apparatus
Mo.sub.6 Se.sub.6 solid state electrode for secondary lithium batteries
Ecotin as a factor Xa, XIa, and XIIa inhibitor
Volume reduction in liquid scintillation counting
Baffle for an automotive vehicle and method of use therefor