Resources Contact Us Home
Nitride semiconductor substrate and method for manufacturing the same, and nitride semiconductor device using nitride semiconductor substrate

Image Number 7 for United States Patent #6861729.

A nitride semiconductor substrate including (a) a supporting substrate, (b) a first nitride semiconductor layer having a periodical T-shaped cross-section, having grown from periodically arranged stripe-like, grid-like or island-like portions on the supporting substrate, and (c) a second nitride semiconductor substrate covering said supporting substrate, having grown from the top and side surfaces of said first nitride semiconductor layer, wherein a cavity is formed under the second nitride semiconductor layer.A protective layer having a periodically arranged stripe-like, grid-like or island-like apertures is formed on the supporting substrate. The first nitride semiconductor layer is laterally grown from the exposed portion of the substrate. The growth is stopped before the first nitride semiconductor layer covers the supporting substrate. Thus, the first nitride semiconductor layer has a periodical T-shaped cross-section. Then, the protective layer is removed and the second nitride semiconductor layer is grown from the top and side surface of the first nitride semiconductor layer to cover the substrate.

  Recently Added Patents
Acrylic pressure-sensitive adhesive composition, acrylic pressure-sensitive adhesive layer, and acrylic pressure-sensitive adhesive tape
Field of view matching in a visual prosthesis
SONOS stack with split nitride memory layer
Policy based cryptographic application programming interface in secure memory
Image reading apparatus
Image forming apparatus
  Randomly Featured Patents
Ceramic glow plug having portion of heater within metallic sleeve
Folded yard sign
Crucible with differentially expanding release mechanism
Charged particle beam exposure apparatus
Anti-PRO335 antibodies
Apparatus and methods for transceiver power adaptation
Socket with integral, retractable socket contact protector
Thermal transfer medium with phase isolated reactive components
Ceiling fan housing
Structural fasteners and components thereof