Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Nitride semiconductor substrate and method for manufacturing the same, and nitride semiconductor device using nitride semiconductor substrate










Image Number 7 for United States Patent #6861729.

A nitride semiconductor substrate including (a) a supporting substrate, (b) a first nitride semiconductor layer having a periodical T-shaped cross-section, having grown from periodically arranged stripe-like, grid-like or island-like portions on the supporting substrate, and (c) a second nitride semiconductor substrate covering said supporting substrate, having grown from the top and side surfaces of said first nitride semiconductor layer, wherein a cavity is formed under the second nitride semiconductor layer.A protective layer having a periodically arranged stripe-like, grid-like or island-like apertures is formed on the supporting substrate. The first nitride semiconductor layer is laterally grown from the exposed portion of the substrate. The growth is stopped before the first nitride semiconductor layer covers the supporting substrate. Thus, the first nitride semiconductor layer has a periodical T-shaped cross-section. Then, the protective layer is removed and the second nitride semiconductor layer is grown from the top and side surface of the first nitride semiconductor layer to cover the substrate.








 
 
  Recently Added Patents
Faucet
Vehicle display system or projection display for a motor vehicle, and calibration method
Rack
Liquid low temperature injection molding process
Wideband multi-channel receiver with fixed-frequency notch filter for interference rejection
Magnetoresistive shield with coupled lateral magnet bias
Methods and systems for determining the reliability of transaction
  Randomly Featured Patents
Slot card reader
System for fabricating semiconductor components with through wire interconnects
High speed optoelectronic mixer
Dual port cell structure
Apparatus for supplying ink to printing machine
Memory device with improved performance
Decorative base for flower arrangements
Illumination apparatus and projection display device
Thrust augmented spin recovery device
Jitter-form background control for minimizing spurious gray cast in scanned images