Resources Contact Us Home
Nitride semiconductor substrate and method for manufacturing the same, and nitride semiconductor device using nitride semiconductor substrate

Image Number 7 for United States Patent #6861729.

A nitride semiconductor substrate including (a) a supporting substrate, (b) a first nitride semiconductor layer having a periodical T-shaped cross-section, having grown from periodically arranged stripe-like, grid-like or island-like portions on the supporting substrate, and (c) a second nitride semiconductor substrate covering said supporting substrate, having grown from the top and side surfaces of said first nitride semiconductor layer, wherein a cavity is formed under the second nitride semiconductor layer.A protective layer having a periodically arranged stripe-like, grid-like or island-like apertures is formed on the supporting substrate. The first nitride semiconductor layer is laterally grown from the exposed portion of the substrate. The growth is stopped before the first nitride semiconductor layer covers the supporting substrate. Thus, the first nitride semiconductor layer has a periodical T-shaped cross-section. Then, the protective layer is removed and the second nitride semiconductor layer is grown from the top and side surface of the first nitride semiconductor layer to cover the substrate.

  Recently Added Patents
Wrench head
Method for generating codewords
Method for distributing advertisements to client devices using an obscured ad monitoring function
Projection illumination system for EUV microlithography
Apparatus for preventing overcharge of a battery
Packaging sleeve
Compositions and processes for forming photovoltaic devices
  Randomly Featured Patents
Protein kinase stress-related polypeptides and methods of use in plants
Method of reducing access when passing data from external memory through buffer to data processor by allocating buffer portion for receiving external memory's identification data
Prostaglandin analogs
Carriageable multimedia player
Multi-session connection across a trust boundary
Self-learning mechanism for a set of nested computer graphics
Purification of cellulose ethers
Pellet burning system
Method for making cordierite honeycomb
Cap for a container