Resources Contact Us Home
Pressurized liquid diffuser

Image Number 8 for United States Patent #6860279.

The invention relates to a diffuser for wet processing systems involved in the manufacturing of semiconductor wafers. The diffuser includes a plenum section and a slitted section. Pressurized fluid from the plenum section is forced through the slitted section and across a plurality of wafers mounted in the wet processing system. One advantage is that by "diffusing" pressurized fluid through the slitted section, a generally uniform and/or laminar flow is achieved. Desirably, the diffuser provides a more reliable, and hence more cost-effective, technology for wet processing fabrication of semiconductor wafers.

  Recently Added Patents
Print system
Mobile communication terminal provided with handsfree function and controlling method thereof
Vehicle wheel rim protector
Low temperature pressure chamber unit, magnetic resonance device with a low temperature pressure chamber unit, and an attachment method to attach at least one add-on unit to an external housin
  Randomly Featured Patents
Dust extractor
Apparatus for washing the upright surfaces of vehicles
Method and apparatus for storing guide wires
Moisture-sensitive device protection system
Door hinge repair apparatus and method
Architecture for creating and maintaining virtual filers on a filer
Electrical circuit for the pulsed operation of high-pressure gas-discharge lamps
Intramedullary nail system and method for fixation of a fractured bone
Flotation system for buildings
Ball screw mechanism