Resources Contact Us Home
Amorphous carbon absorber/shifter film for attenuated phase shift mask

Image Number 2 for United States Patent #6852455.

An exemplary embodiment relates to a phase shifting mask including a glass substrate layer and an amorphous carbon absorber layer located above the glass substrate layer. The amorphous carbon absorber layer includes apertures through which light passes unaltered to the glass substrate layer.

  Recently Added Patents
Method for transferring inventory between virtual universes
Mobile terminal apparatus, radio base station apparatus and radio communication method
Low power voltage controlled oscillator (VCO)
Decoration holder
Portable computer
High voltage fast recovery trench diode
Scaleable status tracking of multiple assist hardware threads
  Randomly Featured Patents
Method for welding silicon workpieces
Data link data and address recognition
LDD field effect transistor having a large reproducible saturation current
Portable detection system and method
Tetraalkyl piperidylated stabilizers for plastics
Electrode arrangement
Full numerical aperture pump of laser-sustained plasma
Liquid crystal display apparatus containing image sensor and process for producing the same
Replacement window display case
Image processing methods and systems