Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Amorphous carbon absorber/shifter film for attenuated phase shift mask










Image Number 2 for United States Patent #6852455.

An exemplary embodiment relates to a phase shifting mask including a glass substrate layer and an amorphous carbon absorber layer located above the glass substrate layer. The amorphous carbon absorber layer includes apertures through which light passes unaltered to the glass substrate layer.








 
 
  Recently Added Patents
Methods and systems for distributing broadcast messages on various networks
Method for manufacturing photoelectric conversion device
Targeted gene deletions for polysaccharide slime formers
Light emitted diode
Process for the production of electric energy by the excitation and capture of electrons from ground or water sources
Creating three dimensional graphics data
Vacuum switch and electrode assembly therefor
  Randomly Featured Patents
Liquid crystalline copoly(ester-imide)s and a process for the preparation thereof
Lens-fitted film unit with IC memory and method of writing data in IC memory
Portable terminal
Anti-human MP52 monoclonal antibody
Portable self-contained alarm system
Apparatus and process for stacking sheets of half-cell structure to make a honeycomb core
X-ray radiator
Mounting structure of electronic component, electro-optic device, electronic equipment, and method for mounting electronic component
Electronic apparatus
Vending machine