Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Amorphous carbon absorber/shifter film for attenuated phase shift mask










Image Number 2 for United States Patent #6852455.

An exemplary embodiment relates to a phase shifting mask including a glass substrate layer and an amorphous carbon absorber layer located above the glass substrate layer. The amorphous carbon absorber layer includes apertures through which light passes unaltered to the glass substrate layer.








 
 
  Recently Added Patents
Method for membrane backwashing and backwashing apparatus
Cascade enzyme-linked immunosorbent assay
Configuration and analysis of design variants of multi-domain circuits
Switch having a protective housing and method for producing same
Optical connection structure and production method of optical waveguide to be used for the optical connection structure
Interactive water plane apparatus
In-situ defect reduction techniques for nonpolar and semipolar (Al, Ga, In)N
  Randomly Featured Patents
Azo containing polyurethanes for drug delivery to the large intestines
Air flow conditioner
Method for silicon nitride chemical vapor deposition
System and method for measuring stress during processing of an optical fiber
Roller blind structure
Composition and method for controlling growth of tobacco suckers
Method for forming ferroelectric dielectric for integrated circuit applications at microwave frequencies
MOS Inverter-buffer circuit having a small input capacitance
Decorative synthetic resin sheets having three-dimensional pattern for walls, ceilings or furniture and process for manufacturing same
Composition for permanent magnet