Resources Contact Us Home
Amorphous carbon absorber/shifter film for attenuated phase shift mask

Image Number 2 for United States Patent #6852455.

An exemplary embodiment relates to a phase shifting mask including a glass substrate layer and an amorphous carbon absorber layer located above the glass substrate layer. The amorphous carbon absorber layer includes apertures through which light passes unaltered to the glass substrate layer.

  Recently Added Patents
Plural component proportioner
Tuning peg for a stringed instrument
Semiconductor apparatus
Cable sheath
Hydroxyl-terminated thiocarbonate containing compounds, polymers, and copolymers, and polyurethanes and urethane acrylics made therefrom
Methods and systems for flicker correction
Notification systems and methods that consider traffic flow predicament data
  Randomly Featured Patents
Neutral-cationic lipid for nucleic acid and drug delivery
Tool revolver unit for a machine tool
Heat curable binders
Intelligent electronic device for providing broadband internet access
Iris control for gas turbine engine air brake
Lease based safety protocol for distributed system with multiple networks
Control for a heating and/or cooling unit
Woodworking router
Method for diagnosing the subluxation of a skeletal articulation
Minnow dipper