Resources Contact Us Home
Amorphous carbon absorber/shifter film for attenuated phase shift mask

Image Number 2 for United States Patent #6852455.

An exemplary embodiment relates to a phase shifting mask including a glass substrate layer and an amorphous carbon absorber layer located above the glass substrate layer. The amorphous carbon absorber layer includes apertures through which light passes unaltered to the glass substrate layer.

  Recently Added Patents
Light irradiation element, image forming structure, and image forming apparatus
Carbonyl-ene functionalized polyolefins
Transferring a document
Automated synchronization of design features in disparate code components using type differencing
System and method for video encoding
Snapshots in de-duplication
Methods and apparatus to identify exposure to 3D media presentations
  Randomly Featured Patents
Method of making soft ice-drink and apparatus of making the same
Preformed multi-acid adducts useful for grafting polyolefin polymers
Package for a number of products and method of using same
Wall-mounted microwave oven and method for controlling hood motor therefor
Method of scrolling that is activated by touchdown in a predefined location on a touchpad that recognizes gestures for controlling scrolling functions
Orifice meter with isolation valve on the carrier
Hierarchical memory array structure having electrically isolated bit lines for temporary data storage
System and method of performing an electrosurgical procedure
Papermaking belt
Optical members and blanks or synthetic silica glass and method for their production