Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Insitu post atomic layer deposition destruction of active species










Image Number 7 for United States Patent #6844260.

Systems and methods for insitu post atomic layer deposition (ALD) destruction of active species are provided. ALD processes deposit multiple atomic layers on a substrate. Pre-cursor gases typically enter a reactor and react with the substrate resulting in a monolayer of atoms. After the remaining gas is purged from the reactor, a second pre-cursor gas enters the reactor and the process is repeated. The active species of some pre-cursor gases do not readily purge from the reactor, thus increasing purge time and decreasing throughput. A high-temperature surface placed in the reactor downstream from the substrate substantially destroys the active species insitu. Substantially destroying the active species allows the reactor to be readily purged, increasing throughput.








 
 
  Recently Added Patents
MiR 204, miR 211, their anti-miRs, and therapeutic uses of same
Reoccuring keying system
Methods and arrangements for realising betting with off-line terminal
Display screen with graphical user interface
Vacuum cleaner filter adapter ring
Purine compounds used as CB2 agonists
Antitumoral compounds
  Randomly Featured Patents
Nucleic acids encoding PRO1159 polypeptides
Solid state imager with transfer smear suppression for moving and stationary images
Digital signal reproduction circuit and digital signal reproduction method
Device comprising an adjustable dosing member for spreading distributable material
Method for the preparation of planographic printing plates
Method of producing radial type ceramic turbine rotor
System for separating a diced semiconductor die from a die attach tape
System and method for erasing a data frames queue on a mobile device
Method and apparatus for removing waste pieces from a pre-cut sheet
Central vacuum system mounting flange and hose cuff for use with standard electrical outlets