Resources Contact Us Home
Insitu post atomic layer deposition destruction of active species

Image Number 7 for United States Patent #6844260.

Systems and methods for insitu post atomic layer deposition (ALD) destruction of active species are provided. ALD processes deposit multiple atomic layers on a substrate. Pre-cursor gases typically enter a reactor and react with the substrate resulting in a monolayer of atoms. After the remaining gas is purged from the reactor, a second pre-cursor gas enters the reactor and the process is repeated. The active species of some pre-cursor gases do not readily purge from the reactor, thus increasing purge time and decreasing throughput. A high-temperature surface placed in the reactor downstream from the substrate substantially destroys the active species insitu. Substantially destroying the active species allows the reactor to be readily purged, increasing throughput.

  Recently Added Patents
Manufacturing process for cellular screening substratum, resultant substratum, and method and apparatus for screening
Stroboscopic image modulation to reduce the visual blur of an object being viewed by an observer experiencing vibration
Rotating-body electrification mechanism, image carrier unit, process cartridge, image forming apparatus, and method for electrifying image carrier unit
Expandable mobile device
Movable assemblies for an image reader unit and a cover unit in an image formation apparatus
Stock analysis method, computer program product, and computer-readable recording medium
Engineered nucleic acids encoding a modified erythropoietin and their expression
  Randomly Featured Patents
System and method for accelerated performance of quadrature amplitude modulation (QAM) decoding operations in a processor
Stack of pressure sensitive adhesive coated sheets
Snowmobile track
Bioactive material delivery systems comprising sol-gel compositions
Isolation damper pulley and method of producing the same
Cathodes for primary solid state lithium cells
Blast-resistant vehicle hull
Adjustable outrigger holder for the top of a boat
Low power CMOS switching
Lenticular panel