Resources Contact Us Home
Insitu post atomic layer deposition destruction of active species

Image Number 7 for United States Patent #6844260.

Systems and methods for insitu post atomic layer deposition (ALD) destruction of active species are provided. ALD processes deposit multiple atomic layers on a substrate. Pre-cursor gases typically enter a reactor and react with the substrate resulting in a monolayer of atoms. After the remaining gas is purged from the reactor, a second pre-cursor gas enters the reactor and the process is repeated. The active species of some pre-cursor gases do not readily purge from the reactor, thus increasing purge time and decreasing throughput. A high-temperature surface placed in the reactor downstream from the substrate substantially destroys the active species insitu. Substantially destroying the active species allows the reactor to be readily purged, increasing throughput.

  Recently Added Patents
Surface emitting laser device, surface emitting laser array, optical scanning device, and image forming apparatus
Single-pass Barankin Estimation of scatterer height from SAR data
Tool bag with removable tool wall
Image-processing method and program, and image-processing apparatus
Method and system for reduction of decoding complexity in a communication system
Image processing apparatus, method, and storage medium for performing soft proof processing
Servo write assembly
  Randomly Featured Patents
Display and shipping package
Synthetic cofactor analogs of S-adenosylmethionine as ligatable probes of biological methylation and methods for their use
Water-in-oil emulsion containing retinol its use
Ultrasonic transducer assembly having a cobalt-base alloy housing
Apparatus for decasing food links
Force sensor and method for detecting at least one force component
Pressure-based mobility shift assays
System for driving high-resolution display panel and method thereof
Rear module for fitting on a motor vehicle
Air vane actuator latch with a portion of a vane portion between storage disk edge and housing sidewall