Resources Contact Us Home
Insitu post atomic layer deposition destruction of active species

Image Number 7 for United States Patent #6844260.

Systems and methods for insitu post atomic layer deposition (ALD) destruction of active species are provided. ALD processes deposit multiple atomic layers on a substrate. Pre-cursor gases typically enter a reactor and react with the substrate resulting in a monolayer of atoms. After the remaining gas is purged from the reactor, a second pre-cursor gas enters the reactor and the process is repeated. The active species of some pre-cursor gases do not readily purge from the reactor, thus increasing purge time and decreasing throughput. A high-temperature surface placed in the reactor downstream from the substrate substantially destroys the active species insitu. Substantially destroying the active species allows the reactor to be readily purged, increasing throughput.

  Recently Added Patents
White light emitting lamp and white LED lighting apparatus including the same
Mounting apparatus for PCI card
Methods of establishing virtual circuits and of providing a virtual private network service through a shared network, and provider edge device for such network
Electronic device with a screen
6-O-substituted benzoxazole and benzothiazole compounds and methods of inhibiting CSF-1R signaling
Low powered activation arrangement and method thereof
Apparatus for focus beam analysis of high power lasers
  Randomly Featured Patents
Filtering device and related wireless communication receiver
Method and apparatus for providing on demand services in a subscriber system
Coinjection molding or multi-layered articles
Automatic transmissions using compact hydrodynamic torque converters
Heel ulcer prevention and cushioning boot
Method for making a microreplicated article using a substrate comprising a syndiotactic vinyl aromatic polymer
Plasma processing installation, influenced by a magnetic field, for processing a continuous material or a workpiece
Memory device
Method for extending capabilities of an arbitrary web server
Image processing apparatus comprising judgement means for judging dot photograph image, photograph image and character image