Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method and system of determining chamber seasoning condition by optical emission










Image Number 13 for United States Patent #6825920.

A plasma processing system that comprises a process chamber, a plasma source, a light detection device and a controller. The controller is useful for determining a seasoning state of the plasma processing system. The present invention further provides a method of determining the seasoning state of a plasma processing system comprising the steps of forming a first plasma in the process chamber utilizing the plasma source; measuring a first signal related to light emitted from the first plasma using the light detection device and storing the first signal using the controller; forming a second plasma in the process chamber utilizing the plasma source; measuring a second signal related to light emitted from the second plasma using the light detection device and storing the second signal using the controller; and correlating a change between the first signal and the second signal with a seasoning state of the plasma processing system.








 
 
  Recently Added Patents
Hypallergenic mosaic antigens and methods of making same
Method and apparatus for executing load distributed printing
Method and system for automatic 3-D image creation
System for seeking for an optimal configuration of a bi-, tri- or multi-ventricular cardiac resynchronization implanted device
ZnO green luminescent material and its preparation
End to end email monitor
LCD television set capable of external connection with application processor
  Randomly Featured Patents
Security element in the form of threads or strips to be embedded in security documents and a method for producing and testing the same
Breath analysis device
Railway truck friction stabilizing assembly
Optical recording tape with continuous prerecorded tracks
Laser apparatus with a multipass resonator
Concrete railroad grade crossing panels
Golf stroke direction aligner
Silver halide light-sensitive material
Method and apparatus for paging a mobile terminal in a wireless LAN
Method for determining a characteristic viscosity-shear rate relationship for a fluid