Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method and system of determining chamber seasoning condition by optical emission










Image Number 13 for United States Patent #6825920.

A plasma processing system that comprises a process chamber, a plasma source, a light detection device and a controller. The controller is useful for determining a seasoning state of the plasma processing system. The present invention further provides a method of determining the seasoning state of a plasma processing system comprising the steps of forming a first plasma in the process chamber utilizing the plasma source; measuring a first signal related to light emitted from the first plasma using the light detection device and storing the first signal using the controller; forming a second plasma in the process chamber utilizing the plasma source; measuring a second signal related to light emitted from the second plasma using the light detection device and storing the second signal using the controller; and correlating a change between the first signal and the second signal with a seasoning state of the plasma processing system.








 
 
  Recently Added Patents
Multilevel directory assistance apparatus and method
Method, base station and system for adjusting cell wireless configuration parameter
RF power amplifier circuit with mismatch tolerance
Clothing fastener accessory
Power-saving receiver
Digital broadcast receiver and method for processing caption thereof
Lettuce sister lines PX06514083, PX06514153, PX06514201 and PX06514204
  Randomly Featured Patents
Vibration damping system
Remote control
Electronic device
Processes including the production of non-congealing shale oil from oil shales
Electronic security tag system
Apparatus and process for irradiating product pallets
Method of producing a fiber string having a plurality of tufts extending outwardly therefrom
Reinforced composite vehicle load floor of the cellular core sandwich-type
Biocompatible absorbable polymer fastener and driver for use in surgical procedures
Information management systems and methods for heterogeneous data sources