Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Flash memory having improved core field isolation in select gate regions










Image Number 4 for United States Patent #6815292.

A flash memory array having improved core field isolation in select gate regions via shallow trench isolation and field isolation implant after liner oxidation is disclosed. The flash memory array includes a core area and a periphery area, wherein the core area further includes a select gate region. The method of fabricating the flash memory array begins by patterning a layer of nitride over a substrate in active device locations. After the nitride is patterned, a silicon trench etch is performed to form trenches. After forming the trenches, a layer of liner oxide is grown in the trenches. Then, a field implant is performed in both the core area and periphery area to provide field isolation regions for the flash memory array with. Thereafter, poly1 is patterned in the core area to form floating gate and select word-lines.








 
 
  Recently Added Patents
High-resolution, active reflector radio frequency ranging system
Tap initialization of equalizer based on estimated channel impulse response
Hydrating lounge chair
Economic filtering system for delivery of permission based, targeted, incentivized advertising
Method and apparatus for communications
Digital media content distribution
Sonic fast-sync system and method for bluetooth
  Randomly Featured Patents
Timing and time information extraction in a radio controlled clock receiver
Multi-purpose absorbent and shred-resistant sheet material
Video display device displaying input videos in various screen modes and/or aspect ratios
Dental composition based on a functionalized silicone crosslinkable and/or polymerizable by heat-process
Dihydrobenz thiazine derivative and microorganism control agent
Gyroscopic apparatus
Vehicle control apparatus
Method and apparatus for congestion control in location updating
Cable reel
System for limiting horizontal movements in a lift