Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Flash memory having improved core field isolation in select gate regions










Image Number 4 for United States Patent #6815292.

A flash memory array having improved core field isolation in select gate regions via shallow trench isolation and field isolation implant after liner oxidation is disclosed. The flash memory array includes a core area and a periphery area, wherein the core area further includes a select gate region. The method of fabricating the flash memory array begins by patterning a layer of nitride over a substrate in active device locations. After the nitride is patterned, a silicon trench etch is performed to form trenches. After forming the trenches, a layer of liner oxide is grown in the trenches. Then, a field implant is performed in both the core area and periphery area to provide field isolation regions for the flash memory array with. Thereafter, poly1 is patterned in the core area to form floating gate and select word-lines.








 
 
  Recently Added Patents
Systems and methods for a signed magnitude adder in one's complement logic
Systems and methods for selective text to speech synthesis
Semiconductor pressure sensor
Optical switching device and communications system
Thermoplastic fluoropolymer composition
Apparatus for counting particles in a gas
Nonvolatile semiconductor memory device and method for manufacturing the same
  Randomly Featured Patents
Static induction transistors
Fecal specimen sampling and analysis
Beverage dispensing valve with flow control lever arm
Automated packaging systems with associated automated pushers
Objective lens with large field deflection system and homogeneous large area secondary electron extraction field
Method for producing a sheet member containing at least one enclosed channel
Jewelry organizer
Tool for gripping a bone fragment
Analog sound velocity calculator
Adjustment device for adjusting the relative rotational angle position of a camshaft in relation to a crankshaft of an internal combustion engine