Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Flash memory having improved core field isolation in select gate regions










Image Number 4 for United States Patent #6815292.

A flash memory array having improved core field isolation in select gate regions via shallow trench isolation and field isolation implant after liner oxidation is disclosed. The flash memory array includes a core area and a periphery area, wherein the core area further includes a select gate region. The method of fabricating the flash memory array begins by patterning a layer of nitride over a substrate in active device locations. After the nitride is patterned, a silicon trench etch is performed to form trenches. After forming the trenches, a layer of liner oxide is grown in the trenches. Then, a field implant is performed in both the core area and periphery area to provide field isolation regions for the flash memory array with. Thereafter, poly1 is patterned in the core area to form floating gate and select word-lines.








 
 
  Recently Added Patents
Data processor and scanner device
Systems and methods for programming an RFID reader
RF/optical shared aperture for high availability wideband communication RF/FSO links
Position detection device, pointing device and input device
Display screen with transitional icon
Leg mounted portable computer
Patient programmer with automated MRI compatibility verification for active implantable medical device
  Randomly Featured Patents
Video signal recording and reproducing system for special motion effects
Accumulator for elongated products, such as tubes and the like
Arrangement for separating fruits into fruit pulp, fruit skin and fruit core
Process for producing 1,4-dicyano-2-butene
Propulsion sulky
Operating device
Aromatic esters for marking or tagging organic products
Cycling system for tracer-controlled machine tools
Method and apparatus for driving plasma display panel using selective writing and erasing
Apparatus for spinning textile fibers