Resources Contact Us Home
Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamber

Image Number 4 for United States Patent #6807972.

A single wafer cleaning chamber that includes a rotatable bracket that can place a wafer beneath an upper end of a catch cup during a wafer cleaning process, a gutter positioned above a wafer transfer slit; where the catch cup can mate with the gutter to create a gap, and with the upper end of the catch cup positioned at a height equal to or higher than the gutter.

  Recently Added Patents
Polypeptides for the in vitro assessment of the sensitising potential of a test compound
Method and apparatus for resolving a cousin domain name to detect web-based fraud
Receiver for home theaters
Feature management of a communication device
System and method for managing locally-initiated medical device interrogation
Drink cooler
Wireless power transmission system, wireless power transmission apparatus and wireless power receiving apparatus therefor
  Randomly Featured Patents
Semiconductor cooling apparatus
Disposable dental prophylaxis handpiece
Method for fabricating metal interconnections
Laser aim determination system for use in creating a custom made putter
Dust suppression agent
Gelled hydrocarbon compositions and methods for use thereof
Aspiration system with positive pressure
Internal combustion engine with auxiliary combustion chamber
Uninterruptible power supply apparatus and method
Phosphoryl sulfenyl chloride olefin adducts