Resources Contact Us Home
Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamber

Image Number 4 for United States Patent #6807972.

A single wafer cleaning chamber that includes a rotatable bracket that can place a wafer beneath an upper end of a catch cup during a wafer cleaning process, a gutter positioned above a wafer transfer slit; where the catch cup can mate with the gutter to create a gap, and with the upper end of the catch cup positioned at a height equal to or higher than the gutter.

  Recently Added Patents
Semiconductor apparatus
Lacrosse head
Methods, systems, and products for providing communications services
Real-image zoom viewfinder and imaging apparatus
Method for computer-based determination of a position in a map, navigation device and mobile radio telephone
Dielectric insulation medium
Display for gloves
  Randomly Featured Patents
Tillage point
Method for safely interrupting blocked work in a server
Apparatus and method for the non-destructive separation of hardened material layers from a flat construction plane
Arrangement for comparing two temporally separated bursts of signal at two different frequencies
Vacuum pump
Method for making electrical contacts to diamond by means of a laser, and diamond provided with contacts according to this optical method
Remote control device programming and indication of programming mode status
Fabrication method for thin film magnetic heads
Method of simulating the state of a linear feedback shift register
Storage and deployment system for automobile covers