Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamber










Image Number 4 for United States Patent #6807972.

A single wafer cleaning chamber that includes a rotatable bracket that can place a wafer beneath an upper end of a catch cup during a wafer cleaning process, a gutter positioned above a wafer transfer slit; where the catch cup can mate with the gutter to create a gap, and with the upper end of the catch cup positioned at a height equal to or higher than the gutter.








 
 
  Recently Added Patents
Bad column management with bit information in non-volatile memory systems
Method and apparatus for organizing segments of media assets and determining relevance of segments to a query
Flat panel display device and method of fabricating the same
Reference circuit with curvature correction using additional complementary to temperature component
Phosphor, light emitting apparatus, and liquid crystal display apparatus using the same
Housing for gas flow indicator
System and method to obtain signal acquisition assistance data
  Randomly Featured Patents
Current leakage reduction for loaded bit-lines in on-chip memory structures
Linear vibrating motor
Cephalosporin compounds
Inflation and sealing device for inflatable air cushions
Circlips
Tracking method for digital signal reproducing apparatus
Semiconductor device and MIM capacitor
Method, apparatus and system for implementing multi-user virtual multiple-input multiple-output
Polymeric material having polyrotaxane and process for producing the same
System and method for controlling ignition timing for internal combustion engine