Resources Contact Us Home
Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamber

Image Number 4 for United States Patent #6807972.

A single wafer cleaning chamber that includes a rotatable bracket that can place a wafer beneath an upper end of a catch cup during a wafer cleaning process, a gutter positioned above a wafer transfer slit; where the catch cup can mate with the gutter to create a gap, and with the upper end of the catch cup positioned at a height equal to or higher than the gutter.

  Recently Added Patents
Method for making an abrasion-resistant steel plate and plate obtained
Fluid-borne particle detector
Method and apparatus for providing contention-based resource zones in a wireless network
Method and arrangement for controlling semiconductor component
Front exterior of an automotive tail lamp
System and method for stranded file opens during disk compression utility requests
Printer driver, printer control method, and recording medium
  Randomly Featured Patents
Interpolymers of aromatic polyesters and rubbers
Low line harmonic AC to DC power supply
Lighter having a safety switch
System and method for determining joint moment and track estimation performance bounds from sparse configurations of total-field magnetometers
Method for the production of tetrahydrogeranylacetone
Method for adjusting operating frequency of an optical input device according to reference frame changes
Automatic verification system for maintenance/diagnosis facility in computer system
Method and system for encrypting and storing content to a user
Data input circuit of semiconductor memory apparatus and data input method using the same
Air conditioning unit for car