Resources Contact Us Home
Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamber

Image Number 14 for United States Patent #6807972.

A single wafer cleaning chamber that includes a rotatable bracket that can place a wafer beneath an upper end of a catch cup during a wafer cleaning process, a gutter positioned above a wafer transfer slit; where the catch cup can mate with the gutter to create a gap, and with the upper end of the catch cup positioned at a height equal to or higher than the gutter.

  Recently Added Patents
Data encoding and decoding apparatus and method thereof for verifying data integrity
Vehicle window opening and closing control device
Interconnect, bus system with interconnect and bus system operating method
System and method for determining a characterisitic of an object adjacent to a route
Transfer of digital data through an isolation
Large scale data storage system with fault tolerance
Cytokine biomarkers as predictive biomarkers of clinical response for Glatiramer acetate
  Randomly Featured Patents
Monoclonal antibody W8B2 and method of use
Toner, and developer, developer container, process cartridge, image forming apparatus and image forming method using the toner
Call routing in a mobile communication system
Method and system for channel estimation in a single channel (SC) single-input multiple-output (SIMO) system
Disposable column cartridge
Water-cooled cyclone separator
Means for introducing additional air into air fuel stream of internal combustion engines
Curved and angular panel arm
Optical information recording medium
Frequency prepositioning for an indirect frequency synthesizer