Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamber










Image Number 14 for United States Patent #6807972.

A single wafer cleaning chamber that includes a rotatable bracket that can place a wafer beneath an upper end of a catch cup during a wafer cleaning process, a gutter positioned above a wafer transfer slit; where the catch cup can mate with the gutter to create a gap, and with the upper end of the catch cup positioned at a height equal to or higher than the gutter.








 
 
  Recently Added Patents
Optoelectronic component and method for producing an optoelectronic component
Soybean sequences associated with the FAP3 locus
Combination therapy to enhance NK cell mediated cytotoxicity
Method and apparatus for sharing virtual workspaces
Magnetic circuit and speaker using same
Cooking oven with energy saving mode and method
Satellite mounting pole
  Randomly Featured Patents
Two-way adjustable tie
Metered dose inhaler and ambulatory manual breathing unit combination
Data processing system for a multi-function device
Positioning support device and positioning support method
Sensor data collector mote
Confetti
Auto-accompaniment instrument developing chord sequence based on inversion variations
Method for manufacturing a thin film transistor array panel for a liquid crystal display
Heat dissipating device
Tree climber step assembly