Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamber










Image Number 14 for United States Patent #6807972.

A single wafer cleaning chamber that includes a rotatable bracket that can place a wafer beneath an upper end of a catch cup during a wafer cleaning process, a gutter positioned above a wafer transfer slit; where the catch cup can mate with the gutter to create a gap, and with the upper end of the catch cup positioned at a height equal to or higher than the gutter.








 
 
  Recently Added Patents
Stool
Resist underlayer film forming composition for lithography, containing aromatic fused ring-containing resin
Artifact removal in nuclear images
Display apparatus
Plural component proportioner
Dental composition, kit of parts and use thereof
Modulation of TIM receptor activity in combination with cytoreductive therapy
  Randomly Featured Patents
Biochemical assays
Production of polyoxymethylene and suitable catalysts
Burst-level resource allocation in cellular systems
Cable far end port identification using repeating link state patterns
Two-phase pumped liquid loop for mobile computer cooling
Handheld electronic device
Catheter with autoinflating, autoregulating balloon
Wiring unit with angled insulation displacement contacts
Vertical shaft windmill
Noncorrosive cuprammonia fungicide and method for using same