Resources Contact Us Home
Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamber

Image Number 14 for United States Patent #6807972.

A single wafer cleaning chamber that includes a rotatable bracket that can place a wafer beneath an upper end of a catch cup during a wafer cleaning process, a gutter positioned above a wafer transfer slit; where the catch cup can mate with the gutter to create a gap, and with the upper end of the catch cup positioned at a height equal to or higher than the gutter.

  Recently Added Patents
Methods and apparatus for clock signal synchronization in a configuration of series connected semiconductor devices
Electronic component and reflected-wave cancelling method
Methods and apparatuses for configuring and operating graphics processing units
5-HT.sub.3 receptor modulators, methods of making, and use thereof
Fuse part in semiconductor device and method for forming the same
Peer-to-peer, internet protocol telephone system with proxy interface for configuration data
Use of physical deformation during scanning of an object to generate views of the object
  Randomly Featured Patents
Carrier for electrophotography and developing material for electrophotography using same
Techniques for nerve stimulation
Foam-stabilized malt beverage
Curved panel shear test apparatus
System and method for distributed processing in an internet protocol network
Animal handling apparatus
Decaprenylamine derivatives
Catalyst for concentrating hydrogen isotopes and process for producing a support therefor
Semiconductor apparatus testing arrangement and semiconductor apparatus testing method
Image forming apparatus and control method thereof