Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamber










Image Number 14 for United States Patent #6807972.

A single wafer cleaning chamber that includes a rotatable bracket that can place a wafer beneath an upper end of a catch cup during a wafer cleaning process, a gutter positioned above a wafer transfer slit; where the catch cup can mate with the gutter to create a gap, and with the upper end of the catch cup positioned at a height equal to or higher than the gutter.








 
 
  Recently Added Patents
Peered proctoring
Software self-checking systems and methods
Method for determining an object class of an object, from which light is emitted and/or reflected to a vehicle
Data transfer operation completion detection circuit and semiconductor memory device provided therewith
Vehicles with electric motor
Bit error mitigation
Method of purifying crude acetone stream
  Randomly Featured Patents
Decentered protective eyewear
Automatic and a manual lift-up ventilated gate for use with an overhead garage door
Attitude compensating liquid content indicator
Preparation of a surface for deposition of a passinating layer
Method for treating process condensate
Glass/ceramic coatings for implants
Decal for use on china dinnerware or similar articles
Virtual set cache that redirects store data to correct virtual set to avoid virtual set store miss penalty
ribH
Peer-to-peer active content sharing