Resources Contact Us Home
Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamber

Image Number 14 for United States Patent #6807972.

A single wafer cleaning chamber that includes a rotatable bracket that can place a wafer beneath an upper end of a catch cup during a wafer cleaning process, a gutter positioned above a wafer transfer slit; where the catch cup can mate with the gutter to create a gap, and with the upper end of the catch cup positioned at a height equal to or higher than the gutter.

  Recently Added Patents
Composition comprising a mixture of dextro- and levo-amphetamines complexed with ion-exchange resin particles to form drug resin particles
System and method for combined I/Q generation and selective phase interpolation
Identifying multi-component carrier cells
Mirror drift compensation in an optical circuit switch
Network attachment for IMS systems for legacy CS UE with home node B access
Power converter with a variable reference voltage and inrush current limiting
Modified polyolefin resin for glass fiber treatment, surface-treated glass fiber, and fiber-reinforced polyolefin resin
  Randomly Featured Patents
Helix-spiral combination antenna
Reworkable and thermally conductive adhesive and use thereof
Combined sign and support bracket
Sleeve joint
Garbage or waste bag disposal
Expandable stents and method for making same
Lubrication system for a vertical gear unit
Pushbutton dial for a telephone set or the like
Modular patient communicator for use in life critical network
Fuse module