Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for creating a lateral overflow drain, anti-blooming structure in a charge coupled device










Image Number 3 for United States Patent #6794219.

A method for creating a lateral overflow drain, anti-blooming structure in a charge-coupled device, the method includes the steps of providing a substrate of a first conductivity type; providing a layer of silicon dioxide on the substrate; providing a layer of silicon nitride on the silicon dioxide layer; providing a first masking layer on the silicon nitride layer and having an opening in the first masking layer of a dimension which substantially equals a dimension of a subsequently implanted channel stop of the first conductivity type; etching away the exposed silicon nitride within the opening in the first masking layer; implanting ions of the first conductivity type through the first masking layer and into the substrate for creating the channel stop and removing the first masking layer; growing the silicon dioxide layer so that the channel stop is spanned by a thickest field silicon dioxide layer in the etched away portion; patterning a second masking layer having an opening adjacent the channel stop with a dimension substantially equal to a dimension of a subsequently implanted lateral overflow drain of a second conductivity type; etching away the exposed silicon nitride within the opening in the second masking layer; implanting the second conductivity type for forming the lateral overflow drain and removing any remaining masking layer; and growing the silicon dioxide layer so that a thicker silicon dioxide forms spanning the lateral overflow drain and the thickest silicon dioxide layer forms spanning the channel stop.








 
 
  Recently Added Patents
Apparatus for controllable delay cell and associated methods
Potentiometric-sensor chip, potentiometric assay, and assay kit
Image processing apparatus and image processing method
Toy ball
Electric vehicle charging station parking meter systems
Methods, systems, and computer program product for virtually modifying surface region curvature to detect protrusions
Front exterior of an automotive tail lamp
  Randomly Featured Patents
Image processing apparatus and application executing method
Roller bearing ratchet tool
Transfer process and transfer sheet for use therein
Garlic press
Mapping of presentation material
Fish-plates for electrically conducting railway rails
Transfer press machine
Communications unit for executive work station
Building block
Apparatus for heating baby formula pot and method of operating the same