Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for creating a lateral overflow drain, anti-blooming structure in a charge coupled device










Image Number 3 for United States Patent #6794219.

A method for creating a lateral overflow drain, anti-blooming structure in a charge-coupled device, the method includes the steps of providing a substrate of a first conductivity type; providing a layer of silicon dioxide on the substrate; providing a layer of silicon nitride on the silicon dioxide layer; providing a first masking layer on the silicon nitride layer and having an opening in the first masking layer of a dimension which substantially equals a dimension of a subsequently implanted channel stop of the first conductivity type; etching away the exposed silicon nitride within the opening in the first masking layer; implanting ions of the first conductivity type through the first masking layer and into the substrate for creating the channel stop and removing the first masking layer; growing the silicon dioxide layer so that the channel stop is spanned by a thickest field silicon dioxide layer in the etched away portion; patterning a second masking layer having an opening adjacent the channel stop with a dimension substantially equal to a dimension of a subsequently implanted lateral overflow drain of a second conductivity type; etching away the exposed silicon nitride within the opening in the second masking layer; implanting the second conductivity type for forming the lateral overflow drain and removing any remaining masking layer; and growing the silicon dioxide layer so that a thicker silicon dioxide forms spanning the lateral overflow drain and the thickest silicon dioxide layer forms spanning the channel stop.








 
 
  Recently Added Patents
Data-conditioned encryption method
Variable speed traffic control system
Social community generated answer system with collaboration constraints
Warm air generating apparatus, sheet feeding apparatus, and image forming apparatus including warm air generating apparatus and sheet feeding apparatus
Method and apparatus for encoding and decoding video based on first sub-pixel unit and second sub-pixel unit
Transport of multiple asynchronous data streams using higher order modulation
Tiger paw stationary tab
  Randomly Featured Patents
Integrated motor and resolver including absolute position capability
Optical circulators
Axial piston machine having a return device
Ringing detection circuit
Diaphragm for the separation of hydrogen from hydrogen-containing gaseous mixtures
Flying ball
High and low pressure sides-integrating steam turbine, long blades thereof and combined cycle power generation system
Tub and drum of a washing-machine
Cis and trans-3-aryloxy-4-hydroxypyrrolidines used as anti-arrhythmics
Marking heat-treated substrates