Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for creating a lateral overflow drain, anti-blooming structure in a charge coupled device










Image Number 3 for United States Patent #6794219.

A method for creating a lateral overflow drain, anti-blooming structure in a charge-coupled device, the method includes the steps of providing a substrate of a first conductivity type; providing a layer of silicon dioxide on the substrate; providing a layer of silicon nitride on the silicon dioxide layer; providing a first masking layer on the silicon nitride layer and having an opening in the first masking layer of a dimension which substantially equals a dimension of a subsequently implanted channel stop of the first conductivity type; etching away the exposed silicon nitride within the opening in the first masking layer; implanting ions of the first conductivity type through the first masking layer and into the substrate for creating the channel stop and removing the first masking layer; growing the silicon dioxide layer so that the channel stop is spanned by a thickest field silicon dioxide layer in the etched away portion; patterning a second masking layer having an opening adjacent the channel stop with a dimension substantially equal to a dimension of a subsequently implanted lateral overflow drain of a second conductivity type; etching away the exposed silicon nitride within the opening in the second masking layer; implanting the second conductivity type for forming the lateral overflow drain and removing any remaining masking layer; and growing the silicon dioxide layer so that a thicker silicon dioxide forms spanning the lateral overflow drain and the thickest silicon dioxide layer forms spanning the channel stop.








 
 
  Recently Added Patents
Collaborative computing community role mapping system and method
Automatic pill dispenser
Methods of forming semiconductor devices having diffusion regions of reduced width
Identification of protected content in e-mail messages
Context-sensitive views
Display stand for a mobile tablet computer
Method and apparatus for communication channel error rate estimation
  Randomly Featured Patents
Attachment assembly for preventing improper positional mounting
Underwater brush
Filling fluent foodstuffs into containers
Disk holder, disk alignment mechanism and disk drive
Liquid crystal display device comprising drive circuits that include thin film transistors formed on both substrates
Bell cuff for clothing
Rack
Method for improving the light-off or regeneration behavior of an aftertreatment device in a vehicle system
Clamping stand
Peeler