Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for creating a lateral overflow drain, anti-blooming structure in a charge coupled device










Image Number 3 for United States Patent #6794219.

A method for creating a lateral overflow drain, anti-blooming structure in a charge-coupled device, the method includes the steps of providing a substrate of a first conductivity type; providing a layer of silicon dioxide on the substrate; providing a layer of silicon nitride on the silicon dioxide layer; providing a first masking layer on the silicon nitride layer and having an opening in the first masking layer of a dimension which substantially equals a dimension of a subsequently implanted channel stop of the first conductivity type; etching away the exposed silicon nitride within the opening in the first masking layer; implanting ions of the first conductivity type through the first masking layer and into the substrate for creating the channel stop and removing the first masking layer; growing the silicon dioxide layer so that the channel stop is spanned by a thickest field silicon dioxide layer in the etched away portion; patterning a second masking layer having an opening adjacent the channel stop with a dimension substantially equal to a dimension of a subsequently implanted lateral overflow drain of a second conductivity type; etching away the exposed silicon nitride within the opening in the second masking layer; implanting the second conductivity type for forming the lateral overflow drain and removing any remaining masking layer; and growing the silicon dioxide layer so that a thicker silicon dioxide forms spanning the lateral overflow drain and the thickest silicon dioxide layer forms spanning the channel stop.








 
 
  Recently Added Patents
Compounds, compositions and methods for reducing lipid levels
Display device substrate, method for manufacturing the same, display device, method for forming multi-layer wiring, and multi-layer wiring substrate
Telephone line seizure module
Point-of-sale cart
Multilevel directory assistance apparatus and method
Container
Lentiviral gene transfer vectors and their medicinal applications
  Randomly Featured Patents
Wireless tracking and monitoring electronic seal
Process of making hexagonal magnetic ferrite pigment for high density magnetic recording applications
Printed circuit board daughter board support
Door seal
Humanoid robot and walking control method thereof
Ingestibles possessing intrinsic color change
Method of actinically imaging
Control apparatus for a plurality of cryopumps
Method, apparatus, and program for customizing credit accounts
Clamp with clamp force sensor