Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for creating a lateral overflow drain, anti-blooming structure in a charge coupled device










Image Number 3 for United States Patent #6794219.

A method for creating a lateral overflow drain, anti-blooming structure in a charge-coupled device, the method includes the steps of providing a substrate of a first conductivity type; providing a layer of silicon dioxide on the substrate; providing a layer of silicon nitride on the silicon dioxide layer; providing a first masking layer on the silicon nitride layer and having an opening in the first masking layer of a dimension which substantially equals a dimension of a subsequently implanted channel stop of the first conductivity type; etching away the exposed silicon nitride within the opening in the first masking layer; implanting ions of the first conductivity type through the first masking layer and into the substrate for creating the channel stop and removing the first masking layer; growing the silicon dioxide layer so that the channel stop is spanned by a thickest field silicon dioxide layer in the etched away portion; patterning a second masking layer having an opening adjacent the channel stop with a dimension substantially equal to a dimension of a subsequently implanted lateral overflow drain of a second conductivity type; etching away the exposed silicon nitride within the opening in the second masking layer; implanting the second conductivity type for forming the lateral overflow drain and removing any remaining masking layer; and growing the silicon dioxide layer so that a thicker silicon dioxide forms spanning the lateral overflow drain and the thickest silicon dioxide layer forms spanning the channel stop.








 
 
  Recently Added Patents
Compounds, compositions and methods for reducing lipid levels
Method of forming wafer level mold using glass fiber and wafer structure formed by the same
Faucet
Configurations and methods for effluent gas treatment
Inter-cell power control in the presence of fractional frequency reuse
Method and device for determining a set of frequencies that can be used for transmitting information between radio transceivers of a network operating with frequency hopping
(4928
  Randomly Featured Patents
One-time programmable logic device
Sample hold circuit and image display device using the same
Shaded lamp for reading and like purposes
High molecular weight polymers, devices and method for making and using same
Semiconductor integrated circuit device manufacturing method
Napkin holder
Light-stabile, reactive two-component PUR paints which cure at room temperature
Apparatus for treating nuts or the like
Process for the manufacture of polyarylene sulphides
Pump system