Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Process for manufacturing semiconductor device including lamp annealing










Image Number 6 for United States Patent #6784058.

A process for a semiconductor device includes the following steps applied to a silicon substrate wherein a floating gate electrode having sidewalls is formed above the semiconductor substrate with a tunnel oxide film intervened and wherein active regions are arranged in places adjoining both sides of floating gate electrode, as seen from above, and arsenic is injected into said active regions as an impurity: the lamp annealing step of carrying out a heat treatment in the atmosphere of a first gas mixture which includes nitrogen and oxygen; and the oxygen film formation step of carrying out a heat treatment in the atmosphere of a second gas mixture which includes oxygen so as to form an oxide film on sidewalls of floating gate electrode after the lamp annealing step.








 
 
  Recently Added Patents
Cryptographic key split combiner
Diagnostic data interchange
Stabilized redispersible polymer powder compositions
Representations of compressed video
Verification of a portable consumer device in an offline environment
Information processing apparatus and method
Semiconductor device and method of manufacturing the same
  Randomly Featured Patents
Jukebox entertainment system having multiple choice games relating to music
Organic peroxide and use thereof
Channel quality index feedback reduction for broadband systems
Circuit and method for correcting skew in a plurality of communication channels for communicating with a memory device, memory controller, system and method using the same, and memory test sys
Process for the autonomous reduction of acquisition and tracking thresholds of carriers received in orbit
Method and apparatus for classifying Java remote method invocation transport traffic
Poinsettia plant named `Eckallyn`
Guide rail system for a power tool
Compositions of aminoacyl-tRNA synthetase and uses thereof
Heat level indication method and apparatus