Resources Contact Us Home
Process for manufacturing semiconductor device including lamp annealing

Image Number 2 for United States Patent #6784058.

A process for a semiconductor device includes the following steps applied to a silicon substrate wherein a floating gate electrode having sidewalls is formed above the semiconductor substrate with a tunnel oxide film intervened and wherein active regions are arranged in places adjoining both sides of floating gate electrode, as seen from above, and arsenic is injected into said active regions as an impurity: the lamp annealing step of carrying out a heat treatment in the atmosphere of a first gas mixture which includes nitrogen and oxygen; and the oxygen film formation step of carrying out a heat treatment in the atmosphere of a second gas mixture which includes oxygen so as to form an oxide film on sidewalls of floating gate electrode after the lamp annealing step.

  Recently Added Patents
Process for making thermoplastic polymer pellets
Off-loading of processing from a processor blade to storage blades based on processing activity, availability of cache, and other status indicators
Programmable computer mouse
Method and apparatus for analysis of histopathology images and its application to cancer diagnosis and grading
Reliable event broadcaster with multiplexing and bandwidth control functions
System for purifying air through germicidal irradiation and method of manufacture
  Randomly Featured Patents
Film forming apparatus, substrate conveying apparatus, film forming method, and substrate conveying method
Apparatus for the treatment of a filter cake with a liquid on a movable filter
Shoe upper with lacing
Data receiving apparatus
Display device and driving method thereof
Opto-acoustic spectroscopy employing amplitude and wavelength modulation
Method of making diffused buried plate trench DRAM cell array
Carrier matrix for integrated microanalysis systems, method for the production thereof and use of the same
Microkeratome and method and apparatus for calibrating a microkeratome