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Method of manufacturing tapered optical waveguide

Image Number 2 for United States Patent #6767756.

Disclosed is a method for manufacturing a tapered optical waveguide through which waveguides of different sizes are connected with each other optically. In the method, a photo-resist pattern having an inclined profile is formed on the core layer by means of a gray-scale mask, then the profile of the tapered waveguide can be precisely controlled by controlling the profile of the photo-resist pattern and the etching-selection ratio between the photo-resist and the core layer.

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