Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Chemical supply system










Image Number 19 for United States Patent #6764212.

A chemical supply system comprises, as principal elements, a chemical storage tank in which a liquid chemical for cleaning is stored in the state of its formulated concentrate, a chemical supply apparatus connected to the chemical storage tank for positively performing chemical supply, a piping system connected to the chemical supply apparatus to form a supply flow passage that is a passage for ultrapure water which the liquid chemical is to be mixed with, a pair of discharge nozzles disposed at end portions of the piping system so as to oppose surfaces of a wafer set in a cleaning chamber to supply a cleaning liquid onto the surfaces. Thereby, remarkable miniaturization/simplification of a cleaning liquid supply system including chemical tanks is intended, it is made possible easily and rapidly to compound and supply a cleaning liquid at an accurate chemical concentration, and particles or the like being generated and mixing in a cleaning liquid, are suppressed to the extremity.








 
 
  Recently Added Patents
Clusterin antisense therapy for treatment of cancer
Apparatus and method for exerting force on a subject tissue
Liquid crystal display panel
Immunotherapy in cancer treatment
Making transparent capacitor with multi-layer grid
Recovering a database to any point-in-time in the past with guaranteed data consistency
Electronic dispersion compensation within optical communications using reconstruction
  Randomly Featured Patents
Method for monitoring heart failure via respiratory patterns
Dishrack
Circuits and methods for dividing frequency by an odd value
Location blocking service from a web advertiser
Silicon-on-insulator differential amplifier circuit
Culture monitoring system
Internal combustion engine and fuel injection control device therefor
Apparatus for reading a record carrier
Distributor for distributing a fluid to a number of fluid application nozzles
Carrying case