Resources Contact Us Home
Chemical supply system

Image Number 19 for United States Patent #6764212.

A chemical supply system comprises, as principal elements, a chemical storage tank in which a liquid chemical for cleaning is stored in the state of its formulated concentrate, a chemical supply apparatus connected to the chemical storage tank for positively performing chemical supply, a piping system connected to the chemical supply apparatus to form a supply flow passage that is a passage for ultrapure water which the liquid chemical is to be mixed with, a pair of discharge nozzles disposed at end portions of the piping system so as to oppose surfaces of a wafer set in a cleaning chamber to supply a cleaning liquid onto the surfaces. Thereby, remarkable miniaturization/simplification of a cleaning liquid supply system including chemical tanks is intended, it is made possible easily and rapidly to compound and supply a cleaning liquid at an accurate chemical concentration, and particles or the like being generated and mixing in a cleaning liquid, are suppressed to the extremity.

  Recently Added Patents
System, method and apparatus for tail biting convolutional code decoding
Intent deduction based on previous user interactions with voice assistant
Minute impedance variation detection device
Methods of testing wireless devices in over-the-air radio-frequency test systems without path loss characterization
Forced hold call handling in a VoP environment
Football kicking tee
Calibrachoa plant named `Balcabdepy`
  Randomly Featured Patents
Polycyclic polymers containing pendant ion conducting moieties
Charge pump for axle driving apparatus including hydrostatic transmission
Toilet protector
Carrier strip
Baggage claiming method and apparatus
Glass compositions
One cone bit with interchangeable cutting structures, a box-end connection, and integral sensory devices
Device for forming a hem on fabric edges with the use of a sewing machine
Detection of malaria
Chair and desk assembly