Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Chemical supply system










Image Number 19 for United States Patent #6764212.

A chemical supply system comprises, as principal elements, a chemical storage tank in which a liquid chemical for cleaning is stored in the state of its formulated concentrate, a chemical supply apparatus connected to the chemical storage tank for positively performing chemical supply, a piping system connected to the chemical supply apparatus to form a supply flow passage that is a passage for ultrapure water which the liquid chemical is to be mixed with, a pair of discharge nozzles disposed at end portions of the piping system so as to oppose surfaces of a wafer set in a cleaning chamber to supply a cleaning liquid onto the surfaces. Thereby, remarkable miniaturization/simplification of a cleaning liquid supply system including chemical tanks is intended, it is made possible easily and rapidly to compound and supply a cleaning liquid at an accurate chemical concentration, and particles or the like being generated and mixing in a cleaning liquid, are suppressed to the extremity.








 
 
  Recently Added Patents
Mobile communication terminal provided with handsfree function and controlling method thereof
Plants and seeds of hybrid corn variety CH367819
Methods for diagnosing irritable bowel syndrome
(4940
Redundant power delivery
Live-attenuated compositions for bacterial infections
Managing job execution
  Randomly Featured Patents
Desk telephone
Method of locally forming a high-k dielectric gate insulator
Method and apparatus for investigation of glaucoma in eye therapeutics
Surface effect sea train
Directional antenna configuration for TDD repeater
All-tap fractionally spaced, serial rake combiner apparatus and method
Method and apparatus for base station synchronization
Shoulder strap retainer
Closure with pressure compensating valve for a liquid container
Light emitting panel assemblies