Resources Contact Us Home
Chemical supply system

Image Number 19 for United States Patent #6764212.

A chemical supply system comprises, as principal elements, a chemical storage tank in which a liquid chemical for cleaning is stored in the state of its formulated concentrate, a chemical supply apparatus connected to the chemical storage tank for positively performing chemical supply, a piping system connected to the chemical supply apparatus to form a supply flow passage that is a passage for ultrapure water which the liquid chemical is to be mixed with, a pair of discharge nozzles disposed at end portions of the piping system so as to oppose surfaces of a wafer set in a cleaning chamber to supply a cleaning liquid onto the surfaces. Thereby, remarkable miniaturization/simplification of a cleaning liquid supply system including chemical tanks is intended, it is made possible easily and rapidly to compound and supply a cleaning liquid at an accurate chemical concentration, and particles or the like being generated and mixing in a cleaning liquid, are suppressed to the extremity.

  Recently Added Patents
Pattern-forming method
Video switcher
Surface-emitting laser array, optical scanning device, and image forming device
Semiconductor packages with thermal dissipation structures and EMI shielding
Optical packet switching system and optical packet transmitter device
Image display apparatus capable of recommending contents according to emotional information
A/D converter, solid-state imaging device and camera system
  Randomly Featured Patents
Electronic substrate device
Biodegradable in-situ forming implants and methods for producing the same
Microwave sensor and mutual interference preventing system between microwave sensors
Polyhydroxyalkanoate biopolymer compositions
Method for producing substrate having carbon-doped titanium oxide layer
Buttable flat panel display module
Push-pull dual fan fansink
Umbrella locking sleeve
Air-fuel ratio control system for internal combustion engine
Process for producing enantiomer of amlodipine in high optical purity