Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Chemical supply system










Image Number 19 for United States Patent #6764212.

A chemical supply system comprises, as principal elements, a chemical storage tank in which a liquid chemical for cleaning is stored in the state of its formulated concentrate, a chemical supply apparatus connected to the chemical storage tank for positively performing chemical supply, a piping system connected to the chemical supply apparatus to form a supply flow passage that is a passage for ultrapure water which the liquid chemical is to be mixed with, a pair of discharge nozzles disposed at end portions of the piping system so as to oppose surfaces of a wafer set in a cleaning chamber to supply a cleaning liquid onto the surfaces. Thereby, remarkable miniaturization/simplification of a cleaning liquid supply system including chemical tanks is intended, it is made possible easily and rapidly to compound and supply a cleaning liquid at an accurate chemical concentration, and particles or the like being generated and mixing in a cleaning liquid, are suppressed to the extremity.








 
 
  Recently Added Patents
Method for manufacturing and reoxidizing a TiN/Ta.sub.2O.sub.5/TiN capacitor
Data storage device with surface ornamentation
Methods for the production of aligned carbon nanotubes and nanostructured material containing the same
Method for implementing dynamic pseudorandom keyboard remapping
Prevention and treatment of osteoarthritis
Masking method and apparatus
Circuit board and display panel assembly having the same
  Randomly Featured Patents
Door hardware
Food container cleaner apparatus and method
Clearcoat composition for primerless MVSS adhesion
Process for the preparation of tetrabromobisphenol-A
Sidewall extender for a wheelbarrow
Methods and systems for engine control
Plants and seeds of corn variety CV932089
Edging block, and method of enclosing an area utilizing a series of edging blocks
Testing apparatus for ATC transponder FAR compliance
Hybrid system having a non-MEMS device and a MEMS device