Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Chemical supply system










Image Number 19 for United States Patent #6764212.

A chemical supply system comprises, as principal elements, a chemical storage tank in which a liquid chemical for cleaning is stored in the state of its formulated concentrate, a chemical supply apparatus connected to the chemical storage tank for positively performing chemical supply, a piping system connected to the chemical supply apparatus to form a supply flow passage that is a passage for ultrapure water which the liquid chemical is to be mixed with, a pair of discharge nozzles disposed at end portions of the piping system so as to oppose surfaces of a wafer set in a cleaning chamber to supply a cleaning liquid onto the surfaces. Thereby, remarkable miniaturization/simplification of a cleaning liquid supply system including chemical tanks is intended, it is made possible easily and rapidly to compound and supply a cleaning liquid at an accurate chemical concentration, and particles or the like being generated and mixing in a cleaning liquid, are suppressed to the extremity.








 
 
  Recently Added Patents
Method for dropping packet data, radio communication device, and mobile communication system
Electronic communication device
Device and method for unified codes
Xylitol-based anti-mucosal compositions and related methods and compositions
System, method and computer program product for sharing a single instance of a database stored using a tenant of a multi-tenant on-demand database system
HSP20 inhibits amyloidogenesis and neurotoxicity
Memory device and method for dynamic random access memory having serial interface and integral instruction buffer
  Randomly Featured Patents
Apparatus for the surface cleaning of quartz-crystal pieces
Method and apparatus for image reproduction
Antiprotozoal saponins
Phone activated emergency signaling system
Scraper attachment for oscillating vibrator sanders
Lift system for a platform, and weighing system equipped with the lift system
Electrodynamic method for separating components
Plasma etching method, plasma etching apparatus, control program and computer-readable storage medium
Method of producing composite metal pipe
Power segmented electrode