Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for fabricating semiconductor device with ultra-shallow super-steep-retrograde epi-channel by decaborane doping










Image Number 13 for United States Patent #6753230.

The present invention provides a method for fabricating a semiconductor device with ultra-shallow super-steep-retrograde epi-channel that is able to overcome limitedly useable energies and to enhance manufacturing productivity than using ultra low energy ion implantation technique that has disadvantage of difficulties to get the enough ion beam current as well as that of prolonged processing time. The inventive method includes the steps of: a method for fabricating a semiconductor device with ultra shallow super-steep-retrograde (hereinafter referred as to SSR) epi-channel, comprising the steps of: forming a channel doping layer below a surface of a semiconductor substrate by implanting decaborane; forming an epi-layer on the channel doping layer; forming sequentially a gate dielectric layer and a gate electrode on the epi-layer; forming source/drain extension areas shallower than the channel doping layer by being aligned at edges of the gate electrode; forming a spacers on lateral sides of the gate electrode; and forming source/drain areas deeper than the channel doping layer by being aligned at edges of the spacer through ion implantation onto the substrate.








 
 
  Recently Added Patents
Optical signal output apparatus, electrical signal output apparatus, and test apparatus
Advanced CAPTCHA using images in sequence
Managing method and apparatus for servicing contents provided by content provider
Techniques for performing translation of messages
Methods and systems for determining the reliability of transaction
Recombinant vectors for use in position-independent transgene expression within chromatin
Lubricant composition
  Randomly Featured Patents
System and methods of deriving fluid properties of downhole fluids and uncertainty thereof
System and method for drying toner particles
Ball suspending apparatus and method
Efficient workspace management using content groups
Clip-clinching device for a coil-spring unit of a mattress
Model-driven service creation and management
Surface inspection method and inspecting device using the same
CMOS off-chip driver circuit
Bumper installation for sensor gate
Apparatus and method for reducing acoustic feedback