Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for fabricating semiconductor device with ultra-shallow super-steep-retrograde epi-channel by decaborane doping










Image Number 13 for United States Patent #6753230.

The present invention provides a method for fabricating a semiconductor device with ultra-shallow super-steep-retrograde epi-channel that is able to overcome limitedly useable energies and to enhance manufacturing productivity than using ultra low energy ion implantation technique that has disadvantage of difficulties to get the enough ion beam current as well as that of prolonged processing time. The inventive method includes the steps of: a method for fabricating a semiconductor device with ultra shallow super-steep-retrograde (hereinafter referred as to SSR) epi-channel, comprising the steps of: forming a channel doping layer below a surface of a semiconductor substrate by implanting decaborane; forming an epi-layer on the channel doping layer; forming sequentially a gate dielectric layer and a gate electrode on the epi-layer; forming source/drain extension areas shallower than the channel doping layer by being aligned at edges of the gate electrode; forming a spacers on lateral sides of the gate electrode; and forming source/drain areas deeper than the channel doping layer by being aligned at edges of the spacer through ion implantation onto the substrate.








 
 
  Recently Added Patents
Polypropylene bottles
Out-of-order load/store queue structure
Beaconing and superframe structure for millimeter wave wireless technologies
Light-emitting device package and method of manufacturing the same
Bit error mitigation
Audiovisual multi-room support
Power supply input voltage detection circuit
  Randomly Featured Patents
Composite structure repair process
Remote climate control system providing an indication relating to remote climate control operation and associated methods
Method for powering down a microprocessor embedded within a gate array
Deployment system for inflatable structures
Arginine keto-amide enzyme inhibitors
Oven air flow director
Impatiens plant named `Balpixreco`
Techniques for detecting RFID tags in electronic article surveillance systems using frequency mixing
Hydrogen storage
Ionizer having interchangeable ionization chamber