Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for fabricating semiconductor device with ultra-shallow super-steep-retrograde epi-channel by decaborane doping










Image Number 13 for United States Patent #6753230.

The present invention provides a method for fabricating a semiconductor device with ultra-shallow super-steep-retrograde epi-channel that is able to overcome limitedly useable energies and to enhance manufacturing productivity than using ultra low energy ion implantation technique that has disadvantage of difficulties to get the enough ion beam current as well as that of prolonged processing time. The inventive method includes the steps of: a method for fabricating a semiconductor device with ultra shallow super-steep-retrograde (hereinafter referred as to SSR) epi-channel, comprising the steps of: forming a channel doping layer below a surface of a semiconductor substrate by implanting decaborane; forming an epi-layer on the channel doping layer; forming sequentially a gate dielectric layer and a gate electrode on the epi-layer; forming source/drain extension areas shallower than the channel doping layer by being aligned at edges of the gate electrode; forming a spacers on lateral sides of the gate electrode; and forming source/drain areas deeper than the channel doping layer by being aligned at edges of the spacer through ion implantation onto the substrate.








 
 
  Recently Added Patents
Bacterial superantigen vaccines
Antisense modulation of C-reactive protein expression
Braided boomerang pet toy
Method and system for Bluetooth low power link layer connection setup
Food-grade flour from dry fractionated corn germ and collet composition and method for producing same
Method of manufacturing touch panel
Device for maneuvering a vehicle using maneuvering moves using at least one trajectory
  Randomly Featured Patents
Structure for reducing die corner and edge stresses in microelectronic packages
Enhanced memory management for portable devices
Information providing apparatus, information providing method, and computer product
Contactless eddy current sensor and process for detecting test objects
Voltage regulator and method for voltage regulation
Method and apparatus, demodulating method and signal demodulating apparatus
Compositions and process for the protective treatment of wood
Portion of a footwear sole
Computer interface apparatus for linking games to personal computers
Waterproof structure and electronic equipment