Resources Contact Us Home
Method and apparatus for planarizing and cleaning microelectronic substrates

Image Number 8 for United States Patent #6749489.

A method and apparatus for mechanically and/or chemical-mechanically planarizing and cleaning microelectronic substrates. In one embodiment, a processing medium for planarizing and finishing a microelectronic substrate has a planarizing section with a first body composed of a first material and a finishing section with a second body composed of a second material. The first body may have a relatively firm planarizing surface to engage the substrate, and the first body supports abrasive particles at the planarizing surface to remove material from the substrate during a planarizing cycle. The second body may have a relatively soft buffing or finishing surface clean the abrasive particles and other matter from the substrate during a finishing cycle. The planarizing and finishing sections may be fixedly attached to a backing film, or they may be attached to one another along abutting edges with or without the backing film. In one particular embodiment, the processing media may be an elongated web configured to extend between a supply roller and a take-up roller of a web-format planarizing machine having a plurality of individually driven substrate holders. The planarizing and finishing sections of this embodiment may be long strips of material extending lengthwise along a longitudinal axis of the web. The planarizing machine and elongated web may contemporaneously planarize and finish two or more substrates.

  Recently Added Patents
Cooking oven with energy saving mode and method
Micro-fluidic device
Resistor-2 resistor (R-2R) digital-to-analog converter with resistor network reversal
2,5-disubstituted piperidine orexin receptor antagonists
Semiconductor device and manufacturing method thereof
Method and apparatus for generating soft bit values in reduced-state equalizers
Sensor chip, sensor cartridge, and analysis apparatus
  Randomly Featured Patents
Method of making metal oxide ceramic powders by using a combustible amino acid compound
Disinfecting caps for medical male luer connectors
Method of imparting a reddish color to seasoning salts
Drilling device for the study and exploitation of the subsoil
Protecting a disc cartridge from inadvertent actuation during nonuse
Environmental seal for network interface device
Personal electronics device with appliance drive features
Video tape recorder which allows preset program recording
Hearing aid with a volume wheel
Note assisted musical instrument system and method of operation