Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of manufacturing semiconductor integrated circuit device comprising a memory cell and a capacitor










Image Number 2 for United States Patent #6746913.

A silicon oxide film on which a capacitor of a semiconductor integrated circuit device is formed is formed by the plasma CVD method at a temperature of 450.degree. C. to 700.degree. C. In this semiconductor integrated circuit device, a memory cell formed of a MISFET for data transfer and a capacitor is formed in a memory cell forming area, and an n channel MISFET and a p channel MISFET constituting a logic circuit is formed in a logic circuit forming area. As a result, the amount of degassing from the silicon oxide film can be reduced. Therefore, the growth of silicon grains on a surface of the silicon film constituting a lower electrode of the capacitor is not hindered by the degassing, and it becomes possible to increase the capacitance. Also, the step of a heat treatment for removing the moisture and the like after forming the silicon oxide film can be omitted, and it becomes possible to prevent the deterioration of the property of the MISFET.








 
 
  Recently Added Patents
White light emitting lamp and white LED lighting apparatus including the same
Network traffic demotion
Method and apparatus for providing spin-home function for mobile communication terminal
Dynamically updating privacy settings in a social network
Multiple-frequency inversion method and control apparatus for internal combustion engine driven generator
Storage basket with lid
Maize variety inbred PH1CD7
  Randomly Featured Patents
N-substituted azaheterocyclic carboxylic acids and esters thereof
Connection method for rotating rectifiers on a generator
Mobile wireless apparatus
Integrated modem and line-isolation circuitry and associated method
Dynamic media asset delivery
Method and apparatus for displaying information
Foldable game board with fastener for checkers
Apparatus and method for digital data transmission using orthogonal cyclic codes
Automatic base seal
Vehicle surroundings monitoring apparatus