Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of manufacturing semiconductor integrated circuit device comprising a memory cell and a capacitor










Image Number 2 for United States Patent #6746913.

A silicon oxide film on which a capacitor of a semiconductor integrated circuit device is formed is formed by the plasma CVD method at a temperature of 450.degree. C. to 700.degree. C. In this semiconductor integrated circuit device, a memory cell formed of a MISFET for data transfer and a capacitor is formed in a memory cell forming area, and an n channel MISFET and a p channel MISFET constituting a logic circuit is formed in a logic circuit forming area. As a result, the amount of degassing from the silicon oxide film can be reduced. Therefore, the growth of silicon grains on a surface of the silicon film constituting a lower electrode of the capacitor is not hindered by the degassing, and it becomes possible to increase the capacitance. Also, the step of a heat treatment for removing the moisture and the like after forming the silicon oxide film can be omitted, and it becomes possible to prevent the deterioration of the property of the MISFET.








 
 
  Recently Added Patents
Combination of a microorganism and a phytosphingosine derivative, composition, methods of use
Routing of data including multimedia between electronic devices
Embedded package and method for manufacturing the same
Conductor for transmitting electrical power
System and method for document orientation detection
Carbon nanotube fiber spun from wetted ribbon
Electronic device
  Randomly Featured Patents
N-stage ring connected voltage controlled oscillator
Iron golf club head
Restoring virtual devices
Method and a device in a mobile station for maintaining a communication link to a radio base station in a cellular telephony system
Wind energy power enhancer system
Method and apparatus for producing fine particles, and fine particles
Block noise prevention by selective interpolation of decoded image data
Controller integrated with engine and circuit boards package used in controller
Anti-inflammatory medicaments
Electric motor