Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for an improved developing process in wafer photolithography










Image Number 4 for United States Patent #6746826.

Methods and apparatus are described for improved yield and line width performance for liquid polymers and other materials. A method for minimizing precipitation of developing reactant by lowering a sudden change in pH includes: developing at least a portion of a polymer layer on a substrate with an initial charge of a developer fluid; then rinsing the polymer with an additional charge of the developer fluid so as to controllably minimize a subsequent sudden change in pH; and then rinsing the polymer with a charge of another fluid. A method for achieving a more uniform, quasi-equilibrium succession of states from the introduction of developer chemical to the wafer surface to its removal is also described. The method reduces process-induced defects and improves critical dimension (CD) control.








 
 
  Recently Added Patents
Crosslinked core/shell polymer particles
Helmet mandible
Systems and methods for assigning a template to an existing network configuration
Multi-band dipole antenna
Monitoring heap in real-time by a mobile agent to assess performance of virtual machine
Bundled flexible cable with water resistant structure
Techniques for accessing a parallel database system via external programs using vertical and/or horizontal partitioning
  Randomly Featured Patents
Storage apparatus and method of detecting power failure in storage apparatus
Display shelf
System and method for a combined rotatable mechanical and electrical speaker mounting system
Pharmaceutical for oral delivery comprising MGBG
French fry cutter for food processors
Stencil printing device
Heating system for outdoor conveyors in a carwash
Market data domain and enterprise system implemented by a master entitlement processor
Instrument for measuring reflective properties of paper and other opaque materials
One-step enzymatic and amine detection technique