Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for an improved developing process in wafer photolithography










Image Number 3 for United States Patent #6746826.

Methods and apparatus are described for improved yield and line width performance for liquid polymers and other materials. A method for minimizing precipitation of developing reactant by lowering a sudden change in pH includes: developing at least a portion of a polymer layer on a substrate with an initial charge of a developer fluid; then rinsing the polymer with an additional charge of the developer fluid so as to controllably minimize a subsequent sudden change in pH; and then rinsing the polymer with a charge of another fluid. A method for achieving a more uniform, quasi-equilibrium succession of states from the introduction of developer chemical to the wafer surface to its removal is also described. The method reduces process-induced defects and improves critical dimension (CD) control.








 
 
  Recently Added Patents
CMOS image sensor
Pixel structure of organic light emitting device
Advertisement in operating system
Virtual image display device and manufacturing method of virtual image display device
Information terminal, setting information distribution server, right information distribution server, network connection setting program and method
Digital IF demodulator for video applications
Broadband optical network apparatus and method
  Randomly Featured Patents
Photographic camera
Flexible tube for vacuum system
Vacuum cleaner wand
Method and apparatus for video processing in context-adaptive binary arithmetic coding
Method and apparatus for currency discrimination
Method for mounting in sections an annular tower for wind power generator, heliostatic power generator or chimney composed from three concrete segments or more
Structural assemblies and preforms therefor formed by linear friction welding
Adaptable evaporative element for a humidifier
Process for treating dust and fume produced by the basic oxygen steelmaking process
Power amplifier for an inductive load