Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for an improved developing process in wafer photolithography










Image Number 3 for United States Patent #6746826.

Methods and apparatus are described for improved yield and line width performance for liquid polymers and other materials. A method for minimizing precipitation of developing reactant by lowering a sudden change in pH includes: developing at least a portion of a polymer layer on a substrate with an initial charge of a developer fluid; then rinsing the polymer with an additional charge of the developer fluid so as to controllably minimize a subsequent sudden change in pH; and then rinsing the polymer with a charge of another fluid. A method for achieving a more uniform, quasi-equilibrium succession of states from the introduction of developer chemical to the wafer surface to its removal is also described. The method reduces process-induced defects and improves critical dimension (CD) control.








 
 
  Recently Added Patents
Valved, microwell cell-culture device and method
Avirulent oncolytic herpes simplex virus strains engineered to counter the innate host response
Method of manufacturing crystalline silicon solar cells with improved surface passivation
Methods and apparatus for preserving privacy in an RFID system
Variety corn line NPAA2720
Estimating optical characteristics of a camera component using sharpness sweep data
Handheld electronic device with text disambiguation employing advanced editing feature
  Randomly Featured Patents
Road finisher
Information processing apparatus equipped with display device
Movable connector board for computer
Reduced stress terminal pattern for integrated circuit devices and packages
Mail sorting and distributing transfer system
Controlling erosion of river or sea beds
Reversible playing or performance area
Liquid ejecting head, liquid ejecting head unit and liquid ejecting apparatus
Process for producing 3,5-dichloroaniline from 1-bromo-2,4-dichlorobenzene
Method for separation of polyvinyl alcohol from aqueous solutions thereof using peroxodisulfates