Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for an improved developing process in wafer photolithography










Image Number 3 for United States Patent #6746826.

Methods and apparatus are described for improved yield and line width performance for liquid polymers and other materials. A method for minimizing precipitation of developing reactant by lowering a sudden change in pH includes: developing at least a portion of a polymer layer on a substrate with an initial charge of a developer fluid; then rinsing the polymer with an additional charge of the developer fluid so as to controllably minimize a subsequent sudden change in pH; and then rinsing the polymer with a charge of another fluid. A method for achieving a more uniform, quasi-equilibrium succession of states from the introduction of developer chemical to the wafer surface to its removal is also described. The method reduces process-induced defects and improves critical dimension (CD) control.








 
 
  Recently Added Patents
Roll of continuous web of optical film laminate and production method therefor
Method and apparatus for controlling cardiac resynchronization therapy using cardiac impedance
System, method and computer program product for monitoring and controlling network connections from a supervisory operating system
Wheel
Blow moulding machine with compressed air recycling
Method and apparatus for cutting high quality internal features and contours
Semiconductor memory device, test circuit, and test operation method thereof
  Randomly Featured Patents
Fuel injection system for internal combustion engine with injector isolator ring
Early product removal alarm
Method of wrapping a floral grouping
Hydrogel encapsulated nematodes
Tonometric measuring head and measuring method
Flexible medium voltage interconnection and method to obtain same
Switching device with integrated light source
System for controlling the sublimation of reactants
Combination optics light emitting diode landing light
Apparatus and methods for enhancing cardiopulmonary blood flow and ventilation