Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method and system for decreasing the spaces between wordlines










Image Number 6 for United States Patent #6727195.

A method and system for providing a semiconductor device is disclosed. The method and system include providing a semiconductor substrate and providing a plurality of lines separated by a plurality of spaces. Each of the plurality of spaces preferably has a first width that is less than a minimum feature size. In one aspect, the method and system include providing a reverse mask having a plurality of apertures on an insulating layer. In this aspect, the method and system also include trimming the reverse mask to increase a size of each of the plurality of apertures, removing a portion of the insulating layer exposed by the plurality of trimmed apertures to provide a plurality of trenches and providing a plurality of lines in the plurality of trenches. In a second aspect, the method and system include providing a reverse mask on the insulating layer and removing a first portion of the insulating layer exposed by the plurality of apertures to provide a plurality of trenches. The reverse mask includes a plurality of apertures having a first width. Each of the plurality of trenches has a width. In this aspect, the method and system also include trimming a second portion of the insulating layers to increase the width of each of the plurality of trenches and providing a plurality of lines in the plurality of trenches.








 
 
  Recently Added Patents
Phosphine-containing hydrogel contact lenses
Angle-resolved spectroscopic instrument
Connection apparatus, processing method for connection apparatus and computer-readable recording medium in which processing program is recorded
Semiconductor device having silicon-diffused metal wiring layer and its manufacturing method
Pretensioner, seat belt retractor with pretensioner, and seat belt unit including seat belt retractor
Self-described rendering of data
Wafer dicing using femtosecond-based laser and plasma etch
  Randomly Featured Patents
Prunus tree rootstock named `Piku 1`
Memory card read/write device provided with an anti-fraud device
Water-soluble salts of trimethylammonium derivatives of polyene macrolide antibiotics and the preparation thereof
Cover for water conditioning tank
Rechargeable lithium battery
Refiner and tooling for refining suspended fibrous material
Robot apparatus, and load absorbing apparatus and method
Car battery terminal quick connect handle
Optical cable exit trough
Sound-absorbing material and a cable reel including the same