Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method and system for decreasing the spaces between wordlines










Image Number 6 for United States Patent #6727195.

A method and system for providing a semiconductor device is disclosed. The method and system include providing a semiconductor substrate and providing a plurality of lines separated by a plurality of spaces. Each of the plurality of spaces preferably has a first width that is less than a minimum feature size. In one aspect, the method and system include providing a reverse mask having a plurality of apertures on an insulating layer. In this aspect, the method and system also include trimming the reverse mask to increase a size of each of the plurality of apertures, removing a portion of the insulating layer exposed by the plurality of trimmed apertures to provide a plurality of trenches and providing a plurality of lines in the plurality of trenches. In a second aspect, the method and system include providing a reverse mask on the insulating layer and removing a first portion of the insulating layer exposed by the plurality of apertures to provide a plurality of trenches. The reverse mask includes a plurality of apertures having a first width. Each of the plurality of trenches has a width. In this aspect, the method and system also include trimming a second portion of the insulating layers to increase the width of each of the plurality of trenches and providing a plurality of lines in the plurality of trenches.








 
 
  Recently Added Patents
Resin composition and display device using the same
Method and apparatus for error correction in MBMS receipt system
Display screen with graphical user interface
Signal processing apparatus and methods
System and method for optimizing utilization of inventory space for dispensable articles
Battery loading and unloading mechanism
Veronica plant named `Amethyst Plume`
  Randomly Featured Patents
Conditioning agents for personal care compositions
Cervical tissue cell-gathering device
Frame indexing technique to improve personal video recording functionality and security of transmitted video
Built-in self diagnosis device for a random access memory and method of diagnosing a random access
Electrical connector
Gas-tight container
Protective frame for stroller
Polarization-maintaining optical isolator
Inkjet printhead device having an array of inkjet nozzles arranged according to a heirarchical pattern
Data partitioning and duplication in a distributed data processing system