Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method and apparatus for using a dynamic control model to compensate for a process interrupt










Image Number 5 for United States Patent #6725121.

A method for processing an interrupted workpiece includes providing a dynamic control model defining the processing characteristics of a processing tool throughout a processing run; providing a partially processed workpiece; determining an extent of processing metric for the partially processed workpiece; and determining at least one operating recipe parameter of the processing tool based on the dynamic control model and the extent of processing metric. A manufacturing system includes a processing tool and a process controller. The processing tool is adapted to process a partially processed workpiece in accordance with an operating recipe. The process controller is adapted to determine an extent of processing metric for the partially processed workpiece and determine at least one parameter of the operating recipe based on a dynamic control model defining the processing characteristics of the processing tool throughout a processing run and the extent of processing metric.








 
 
  Recently Added Patents
Enzyme-catalyzed metal deposition for the enhanced detection of analytes of interest
Vehicle with improved integrated steering and suspension system
Driving circuit and lighting equipment using the same
Substituted indole derivatives
Cosmetic container
Passive wireless gastroesophageal sensor
Lead-free sintered lubricating material and sinter powder for manufacture of the same
  Randomly Featured Patents
Packaging container
Instep lacing component system
Li/Air non-aqueous batteries
Reverse-direction-staple system and method
Method for forming LDD CMOS
Double closing unit for an injection moulding machine
Deskewed differential detector employing analog-to-digital converter
Method for separation of material mixtures, containing abrasive particles, in a hydrocyclone separator
Chromatographic method for high yield purification and viral inactivation of antibodies
Faucet handle