Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method and apparatus for using a dynamic control model to compensate for a process interrupt










Image Number 5 for United States Patent #6725121.

A method for processing an interrupted workpiece includes providing a dynamic control model defining the processing characteristics of a processing tool throughout a processing run; providing a partially processed workpiece; determining an extent of processing metric for the partially processed workpiece; and determining at least one operating recipe parameter of the processing tool based on the dynamic control model and the extent of processing metric. A manufacturing system includes a processing tool and a process controller. The processing tool is adapted to process a partially processed workpiece in accordance with an operating recipe. The process controller is adapted to determine an extent of processing metric for the partially processed workpiece and determine at least one parameter of the operating recipe based on a dynamic control model defining the processing characteristics of the processing tool throughout a processing run and the extent of processing metric.








 
 
  Recently Added Patents
Systems and methods for adaptive error thresholds or adaptive modulation schemes based on atmospheric conditions
Multiple secure elements in mobile electronic device with near field communication capability
Automated user interface adjustment
Method and apparatus for communication channel error rate estimation
Lettuce sister lines PX06514083, PX06514153, PX06514201 and PX06514204
Device to control force required to depress accelerator pedal
Badge or pin
  Randomly Featured Patents
Storage cell field and method of producing the same
Pentane insoluble asphaltene removal
Miter saw with cutting alignment device on a dust chute
Galling resistant austenitic stainless steel
Method and apparatus for hyperlink list navigation
Method and device for driving DC brushless motor
Method and apparatus for endpointing mechanical and chemical-mechanical polishing of substrates
Scatter compensation in an X-ray system
Fluorescent substance and process for producing the same, and luminescent element using the same
Compositions and photoreceptor overcoatings containing a dihydroxy arylamine and a crosslinked polyamide