Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method and apparatus for using a dynamic control model to compensate for a process interrupt










Image Number 3 for United States Patent #6725121.

A method for processing an interrupted workpiece includes providing a dynamic control model defining the processing characteristics of a processing tool throughout a processing run; providing a partially processed workpiece; determining an extent of processing metric for the partially processed workpiece; and determining at least one operating recipe parameter of the processing tool based on the dynamic control model and the extent of processing metric. A manufacturing system includes a processing tool and a process controller. The processing tool is adapted to process a partially processed workpiece in accordance with an operating recipe. The process controller is adapted to determine an extent of processing metric for the partially processed workpiece and determine at least one parameter of the operating recipe based on a dynamic control model defining the processing characteristics of the processing tool throughout a processing run and the extent of processing metric.








 
 
  Recently Added Patents
Process for the enzymatic reduction of enoates
Methods and devices for rapid and specific detection of multiple proteins
Sports helmet
Nut
Bull stationery tab
Therapeutic human anti-IL-1R1 monoclonal antibody
Method for implementing dynamic pseudorandom keyboard remapping
  Randomly Featured Patents
Adjustable overhang panel for building eave
Method for reducing electromigration in semiconductor interconnect lines
Planarizing agents and devices
Oxidation resistant coating for titanium alloys
Inkjet printhead and manufacturing method thereof
Aqueous process to remove cholesterol from food products
Method and device for separating continuously conveyed material webs
Demetalation of hydrocarbonaceous feedstocks using hydroxo-carboxylic acids and salts thereof
Herbal oro-dental care composition and process for preparing the same
Sulfoximine and suldodiimine matrix metalloproteinase inhibitors