Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method and apparatus for using a dynamic control model to compensate for a process interrupt










Image Number 3 for United States Patent #6725121.

A method for processing an interrupted workpiece includes providing a dynamic control model defining the processing characteristics of a processing tool throughout a processing run; providing a partially processed workpiece; determining an extent of processing metric for the partially processed workpiece; and determining at least one operating recipe parameter of the processing tool based on the dynamic control model and the extent of processing metric. A manufacturing system includes a processing tool and a process controller. The processing tool is adapted to process a partially processed workpiece in accordance with an operating recipe. The process controller is adapted to determine an extent of processing metric for the partially processed workpiece and determine at least one parameter of the operating recipe based on a dynamic control model defining the processing characteristics of the processing tool throughout a processing run and the extent of processing metric.








 
 
  Recently Added Patents
SMS transport resource control
Image processing apparatus, image forming system, and computer-readable storage medium
Telephone relaying apparatus, telephone relaying method, and program
Center spreader adapter tool for toilet paper rolls and paper towel rolls that do not have inner cardboard tubes
Sheet coil type resolver
Tiered cost model for access to a computer network
Nacelle cover
  Randomly Featured Patents
Articulating guide seal
Plural hydraulic pump system with automatic displacement control and pressure relief valve
Estimated pose correction
Solar-gas combined cycle electrical generating system
Through-silicon via with scalloped sidewalls
Electrochemical cobalt silicide liner for metal contact fills and damascene processes
Internal apparatus for continuous electrical and oximetric intrapartum monitoring of the fetus
Long acting, reversible veterinary sedative and analgesic and method of use
Clocked half-rail differential logic with sense amplifier and shut-off
Wafer dividing method