Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Thin-film forming apparatus and thin-film forming method










Image Number 3 for United States Patent #6723660.

A thin-film forming apparatus of the present invention is capable of reducing variation of film formation rate and forming thin films of a stable thickness. The thin-film forming apparatus can prevent decrease of the film formation rate due to raise of temperatures of an RF electrode and an inner wall of a reaction chamber, by supplying a pressure control gas of a predetermined pressure into the reaction chamber also in non-film formation time to keep a gas pressure in the reaction chamber constant. Thereby, thickness of a film grown on a substrate can be controlled to a constant thickness. Further, by heating the pressure control gas to raise its temperature to a value approximately equal to a temperature of a material gas, variation of the pressure of the gas in the reaction chamber is controlled and the temperatures of the inner wall of the reaction chamber and the RF electrode are kept constant. Thereby, since the film formation rate on the inner wall of the reaction chamber and a surface of the RF electrode are kept constant, the quantity of the material gas substantially supplied to the surface of the substrate is kept constant. Thereby, the film formation rate on the surface of the substrate can be kept constant.








 
 
  Recently Added Patents
Nanofibers containing latent reactive groups
Halogen-free flame retardants for epoxy resin systems
Power supply system for motor vehicle
System and method for managing investment funds
Memory with separate read and write paths
Ice data collection system
VGPU: a real time GPU emulator
  Randomly Featured Patents
Soft drink can crusher
Hearing aid device wearable in the ear or hearing aid device having an otoplastic wearable in the ear
Bezel
Mold produced design for a thumb screw
Plate heat exchangers
Electric effect-based security feature on security documents and on documents of value-proof process belonging thereto
Automatic wiring method for semiconductor package enabling design of high-speed wiring for semiconductor package with reduced labor
Multipurpose auxiliary brush for a vacuum cleaner
Reject chip marking device and method of discriminating reject mark
Computer game