Resources Contact Us Home
Thin-film forming apparatus and thin-film forming method

Image Number 3 for United States Patent #6723660.

A thin-film forming apparatus of the present invention is capable of reducing variation of film formation rate and forming thin films of a stable thickness. The thin-film forming apparatus can prevent decrease of the film formation rate due to raise of temperatures of an RF electrode and an inner wall of a reaction chamber, by supplying a pressure control gas of a predetermined pressure into the reaction chamber also in non-film formation time to keep a gas pressure in the reaction chamber constant. Thereby, thickness of a film grown on a substrate can be controlled to a constant thickness. Further, by heating the pressure control gas to raise its temperature to a value approximately equal to a temperature of a material gas, variation of the pressure of the gas in the reaction chamber is controlled and the temperatures of the inner wall of the reaction chamber and the RF electrode are kept constant. Thereby, since the film formation rate on the inner wall of the reaction chamber and a surface of the RF electrode are kept constant, the quantity of the material gas substantially supplied to the surface of the substrate is kept constant. Thereby, the film formation rate on the surface of the substrate can be kept constant.

  Recently Added Patents
Image forming apparatus
Remote control of transmitter-side rate adaptation
Method and system for enhanced scanner user interface
Electronic devices for defect detection
System and method for burstiness-aware scheduling and capacity assessment on a network of electronic devices
Method for data processing in an optical network, optical network component and communication system
Previewing effects applicable to digital media content
  Randomly Featured Patents
Computer system for controlling routed data amount
Methods and formulations for making bupropion hydrochloride tablets using direct compression
Whisker reinforced ceramic material working tools
System and article of manufacture for executing initialization code to configure connected devices
Integrated device with bipolar transistor and electronic switch in "emitter switching" configuration
Ram type blowout preventer having improved ram front packings
Adjustable chair or similar article
Patterned disk medium for vertical magnetic recording, and magnetic disk drive with the medium
Photosensitive line imager utilizing a movable scanning arm
Epoxy resin with dibasic acid (methyl ester)/ethyleneurea modifier