Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Thin-film forming apparatus and thin-film forming method










Image Number 3 for United States Patent #6723660.

A thin-film forming apparatus of the present invention is capable of reducing variation of film formation rate and forming thin films of a stable thickness. The thin-film forming apparatus can prevent decrease of the film formation rate due to raise of temperatures of an RF electrode and an inner wall of a reaction chamber, by supplying a pressure control gas of a predetermined pressure into the reaction chamber also in non-film formation time to keep a gas pressure in the reaction chamber constant. Thereby, thickness of a film grown on a substrate can be controlled to a constant thickness. Further, by heating the pressure control gas to raise its temperature to a value approximately equal to a temperature of a material gas, variation of the pressure of the gas in the reaction chamber is controlled and the temperatures of the inner wall of the reaction chamber and the RF electrode are kept constant. Thereby, since the film formation rate on the inner wall of the reaction chamber and a surface of the RF electrode are kept constant, the quantity of the material gas substantially supplied to the surface of the substrate is kept constant. Thereby, the film formation rate on the surface of the substrate can be kept constant.








 
 
  Recently Added Patents
Die seal ring
Radio frequency splitter
Modular system having expandable form factor
Apparatus with a local timing circuit that generates a multi-phase timing signal for a digital signal processing circuit
System and method for logical separation of a server by using client virtualization
Dynamic bar oriented user interface
Undercabinet plug-in mount
  Randomly Featured Patents
Triazole derivatives
Antenna alignment indicator system for satellite receiver
Method and apparatus for photometrically monitoring the concentrations of both chlorine and chlorine dioxide
Sweetening with L-aminodicarboxylic acid alkenes
Method for applying sealing material to envelopes
Self-drilling screw
Communication device
New Guinea Impatiens plant named `Danimin`
Printhead maintenance system comprising disposable sheet feed
Optical scanning device comprising a tiltable lens system