Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Thin-film forming apparatus and thin-film forming method










Image Number 3 for United States Patent #6723660.

A thin-film forming apparatus of the present invention is capable of reducing variation of film formation rate and forming thin films of a stable thickness. The thin-film forming apparatus can prevent decrease of the film formation rate due to raise of temperatures of an RF electrode and an inner wall of a reaction chamber, by supplying a pressure control gas of a predetermined pressure into the reaction chamber also in non-film formation time to keep a gas pressure in the reaction chamber constant. Thereby, thickness of a film grown on a substrate can be controlled to a constant thickness. Further, by heating the pressure control gas to raise its temperature to a value approximately equal to a temperature of a material gas, variation of the pressure of the gas in the reaction chamber is controlled and the temperatures of the inner wall of the reaction chamber and the RF electrode are kept constant. Thereby, since the film formation rate on the inner wall of the reaction chamber and a surface of the RF electrode are kept constant, the quantity of the material gas substantially supplied to the surface of the substrate is kept constant. Thereby, the film formation rate on the surface of the substrate can be kept constant.








 
 
  Recently Added Patents
Process for shaping polymeric articles
Wireless refrigerant scale platform
Method and apparatus for power management control of an embedded memory having sleep and shutdown features
Reconstruction of deforming surfaces by canceling ambient occlusion and refining 3-D shape
High conductive water-based silver ink
Reduced sorbent utilization for circulating dry scrubbers
Charge pump circuit and power-supply method for dynamically adjusting output voltage
  Randomly Featured Patents
Tool changing device on a hand-operated machine tool
Method and apparatus for controlling and regulating a rotorcraft turbine engine
Method of producing glycol methacrylate or glycol acrylate polymers and copolymers
Process of forming multi piece vaporizable pattern for foundry castings
Adapter
Synergistic insecticidal compositions
Spontaneous light emitting device and driving method thereof
Lubricating system for OHC engine
Device for overall diameter measurement of a group of hairs or fibers (ODMOGH)
Cleaning device for an endless web and method of cleaning