Resources Contact Us Home
Thin-film forming apparatus and thin-film forming method

Image Number 3 for United States Patent #6723660.

A thin-film forming apparatus of the present invention is capable of reducing variation of film formation rate and forming thin films of a stable thickness. The thin-film forming apparatus can prevent decrease of the film formation rate due to raise of temperatures of an RF electrode and an inner wall of a reaction chamber, by supplying a pressure control gas of a predetermined pressure into the reaction chamber also in non-film formation time to keep a gas pressure in the reaction chamber constant. Thereby, thickness of a film grown on a substrate can be controlled to a constant thickness. Further, by heating the pressure control gas to raise its temperature to a value approximately equal to a temperature of a material gas, variation of the pressure of the gas in the reaction chamber is controlled and the temperatures of the inner wall of the reaction chamber and the RF electrode are kept constant. Thereby, since the film formation rate on the inner wall of the reaction chamber and a surface of the RF electrode are kept constant, the quantity of the material gas substantially supplied to the surface of the substrate is kept constant. Thereby, the film formation rate on the surface of the substrate can be kept constant.

  Recently Added Patents
Isolated Australian coral reef fluorescent proteins and cell-based kinase or phosphatase platforms for cancer drug development
Charged particle beam apparatus
Registry key federation systems and methods
Method for producing interferon alpha 5
Drive and startup for a switched capacitor divider
Computing device with improved user interface for applications
System and method for distributed security
  Randomly Featured Patents
Moving hydraulic press
Automated media transport device and method of using the same
Towel ring
Tool holder
Method for removing metallic seeds from nylon tubing used in interstitial brachytherapy
Multi-segmented sealing ring
Image forming apparatus having sheet curvature correcting device
Electronic apparatus
Pressure-sensitive materials with small amounts of styrene
Connector with channels having concave grooves facing into connector and convex support surfaces for mounting on substrate