Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Exposure apparatus, method for manufacturing thereof and method for manufacturing microdevice










Image Number 2 for United States Patent #6717651.

An exposure apparatus exposes a transfer pattern of a mask onto a photosensitive substrate in an overlapping manner. The exposure apparatus includes an illumination optical system for guiding illumination light to the mask. An imaging optical system in the illumination optical system forms an illumination area on the mask. The exposure apparatus includes a lens driving apparatus. The lens driving apparatus moves at least one of the lenses constituting the imaging optical system along the optical axis and so forth, thereby correcting an optical characteristic of the imaging optical system.








 
 
  Recently Added Patents
Method for configuring analog-to-digital converter keys and non-transitory machine readable medium storing program code executed for performing such method
Data processing apparatus, activation control method, and computer-readable storage medium
Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region
Architectural panel with Tarwe and grass
Phase-amplitude 3-D stereo encoder and decoder
Maize variety hybrid X13A495
Coordinated multi-point transmission in a cellular network
  Randomly Featured Patents
Polishing apparatus
Communication device with a wideband antenna
Electrode unit of extreme ultraviolet generator
Apparatus and methods for implementing dedicated cache flushing
Compositions and methods of their use for improving the condition and appearance of skin
Safety and arming device for a pyrotechnic train of a projectile
Quick assembly blind for boats
Programmed release ambroxol--HCl dosage forms
Machine for supplying and sewing overlapped fabric layers
Memory device and method for using prefabricated isolated storage elements