Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Exposure apparatus, method for manufacturing thereof and method for manufacturing microdevice










Image Number 2 for United States Patent #6717651.

An exposure apparatus exposes a transfer pattern of a mask onto a photosensitive substrate in an overlapping manner. The exposure apparatus includes an illumination optical system for guiding illumination light to the mask. An imaging optical system in the illumination optical system forms an illumination area on the mask. The exposure apparatus includes a lens driving apparatus. The lens driving apparatus moves at least one of the lenses constituting the imaging optical system along the optical axis and so forth, thereby correcting an optical characteristic of the imaging optical system.








 
 
  Recently Added Patents
Unit for returning erroneous operation that instructs display device to display operation history when panic key is pressed
Methods and systems for achieving print uniformity using reduced memory or computational requirements
Method and apparatus of physically moving a portable unit to view an image of a stationary map
Protecting a BSF entity from attack
Image processing apparatus and method
3D authoring tool ensuring no buffer underrun upon jumps
Passive shims to increase the effective B.sub.0 and B.sub.1 uniformity in a body coil
  Randomly Featured Patents
Esophageal cytology balloon catheter
Catheter with collapsible wire guide
Fluid bed paraffin aromatization
Method for obtaining powder from highly concentrated high viscous solutions
Merged text and graphics printing method
Upper grip panel
Apparatus and method for the production of gas filters
Orthogonal mode junction (OMJ) for use in antenna system
Method of manufacturing a circuit member for a resin-sealed semiconductor device
Contact lens and method of molding