Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Exposure apparatus, method for manufacturing thereof and method for manufacturing microdevice










Image Number 2 for United States Patent #6717651.

An exposure apparatus exposes a transfer pattern of a mask onto a photosensitive substrate in an overlapping manner. The exposure apparatus includes an illumination optical system for guiding illumination light to the mask. An imaging optical system in the illumination optical system forms an illumination area on the mask. The exposure apparatus includes a lens driving apparatus. The lens driving apparatus moves at least one of the lenses constituting the imaging optical system along the optical axis and so forth, thereby correcting an optical characteristic of the imaging optical system.








 
 
  Recently Added Patents
Segmenting video based on timestamps in comments
Smartphone
Pattern generation method and pattern generation program
High purity diphenyl sulfone, preparation and use thereof for the preparation of a poly(aryletherketone)
Packaging
Unsupervised document clustering using latent semantic density analysis
Systems and methods for tracking power modulation
  Randomly Featured Patents
Conductor polymer backfill composition and method of use as a reinforcement material for utility poles
Combination safety stop and down lock for folding tables
Cover for a portable device having grip portions
Faucet
Lightweight internet protocol encapsulation (LIPE) scheme for multimedia traffic transport
Photothermal densitometer for reading electrophoresis gels
Automotive valve cap with display dimple
DNA encoding canine immunoglobulin A
Broadband thermal optical limiter for the protection of eyes and sensors
Laser light source device, illumination device, image display device, and monitor