Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Exposure apparatus, method for manufacturing thereof and method for manufacturing microdevice










Image Number 17 for United States Patent #6717651.

An exposure apparatus exposes a transfer pattern of a mask onto a photosensitive substrate in an overlapping manner. The exposure apparatus includes an illumination optical system for guiding illumination light to the mask. An imaging optical system in the illumination optical system forms an illumination area on the mask. The exposure apparatus includes a lens driving apparatus. The lens driving apparatus moves at least one of the lenses constituting the imaging optical system along the optical axis and so forth, thereby correcting an optical characteristic of the imaging optical system.








 
 
  Recently Added Patents
Compact multi-functional scanning apparatus with retractable flatbed scanner
Generating package profiles in software package repositories using selective subsets of packages
Navigation device, navigation method, and navigation program
Systems and methods for synchronizing and controlling multiple image sensors
Boring machine
Redistribution layer (RDL) with variable offset bumps
Inductive antenna coupling
  Randomly Featured Patents
Film formation method and film formation apparatus
Newspaper vending machine
Integration of SAC and salicide processes by combining hard mask and poly definition
System for measuring the optical density of both the background and the image areas of an original
Apparatus for achieving etch rate uniformity
Pipe fitting having over-sized strengthened starter threads
Brush head
Methacrylimide group-containing polymer
Spill-resistent urinal
Die for extruding flowable materials and having a static mixer therein